Gas Delivery & Diagnostics
June. '08 Digital Edition
Gas Delivery & Diagnostics
Mar. '08 Digital Edition
Gas Delivery & Diagnostics
Nov. '07 Digital Edition
Gas Delivery & Diagnostics
Sep '07 Digital Edition
|
|
|
Article
|
Vacuum Feedthroughs and Seals
Compiled by Terrence Thompson, Contributing Editor
This product showcase describes the increasingly capable vacuum feedthroughs and seals used in a wide variety of vacuum-centric process applications. Feedthroughs, and their seals, are used in many vacuum processes. If one needs to introduce a linear or rotary motion with manual, pneumatic or motorized actuation, fluid and electric feedthroughs from a source outside the vacuum chamber, specialized feedthroughs are used to accomplish the task. Often, instrumentation sensors within a vacuum chamber are necessary and electrical feedthroughs accomplish this task. Linear and rotary motions are used to move work pieces, targets, etc.
Electrical feedthroughs are available in a wide variety of terminations, maximum voltages and current carrying capacities on standard vacuum mounting flanges. Instrumentation feedthroughs are available for signal passthrough using standard coaxial configurations and a variety of multipin variations. Thermocouple feedthroughs are available for temperature measurement in all standard ANSI codes in both singleended & double-ended configurations. Mil-Spec versions of the thermocouple feedthroughs are also available, as well as thermocouple feedthroughs with integral power leads.
Which Combination?
Check with the manufacturers since there are an incredible number of potential combinations for a given application. Your choices may be narrowed if it is a retrofit application for a system that performed well when new. If upgrading, then examine the newer technologies to see if there is a ‘fit.’
The AVEM [] lists feedthrough collars as well as electrical, high current, fluid, linear motion, optical, radio frequency, rotary motion and fluid feedthrough plus related tubing, flanges, fittings, bellows and seals. Sealing options range from elastomer seals to ferrofluidic technology with each type working well in specific applications.
Product Descriptions
In the following product descriptions, vendors make distinctions to focus on specific intended applications, so direct comparisons are difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements. Next month the rest of the vacuum feedthroughs and seals will be showcased..
SuperSeal™ Ferro-Sealed Rotary-Motion Feedthroughs
A&N Corporation’s SuperSeal™ vacuum feedthroughs provides many models for  reliable motion, fluid and electrical applications. Each of these products are designed to enable a vacuum user to bridge the barrier between your vacuum environment and atmosphere without compromising the vacuum integrity of your system. A&N Corporation and Rigaku Vacuum Products Division have combined our expertise in vacuum component production to create a breakthrough in rotary vacuum feedthrough technology. The SuperSeal is hermetically sealed with the Rigaku SuperSeal™ ferrofluid technology with vacuum rated for 1×10-8 Torr (UHV option rated to 1×10-9 Torr). It is rated for up to 5000 rpm performance with very low stray magnetic fields and it has no magnets in the vacuum environment. The feedthrough has high torque capacity with a 2- 1 /2 atmosphere pressure differential tolerance. Multiple connection options (threaded nose, baseplate, CF, ISO or customized are available). The SuperSeal is a direct replacement for traditional elastomer and bellows and has greatly increased service life and a higher torque capacity with no leak rate fluctuation during rotation. The maximum operating pressure is 37 psig. With a maximum operating differential of 2.5 atm. It is pressure tested to 38 psig @ 2000 rpm and helium leak tested to 5×10-9 Std. cm3 /s. The maximum operating temperature for the HV model is 80°C. www.ancorp.com
ULRIC™ Quick Clamp/Metal Seal Flange System
A&N Corporation’s ULRIC™ Vacuum Flange System combines the temperature and pressure functionality of a traditional copper  seal (CF) vacuum flange with the quick installation feature of an ISO clamp system. The ULRIC™ flange system also provides reusable vacuum seals available in stainless steel, copper, or elastomer. The ULRIC™ flange system is a quick clamp assembled, ultra-high vacuum capable flange system. The vacuum seal can be created in two ways - through the compression of a metallic sealing ring onto a “protected knifeedge” or through the compression of a captured elastomer o-ring. ULRIC™ flanges provide a complete range of fittings to mount with tubing sized 3 /4” up to 4” in diameter. The flange system consists of two sexless, infinitely rotatable flanges, a re-usable sealing ring which also provides alignment, and a fastener to compress the seal between the two flanges. The flanges are made of 304L grade stainless steel; metal seals are made of copper or stainless steel; elastomer seals are made of Viton® , buna or silicone; and clamps are available in stainless steel or aluminum. A&N offers a complete line of flanges, fittings, valves, traps, chambers and accessories with ULRIC™ connections that can be used to create a complete vacuum system or pumping line.
A&N Corporation
Williston, FL
www.ancorp.com
Contact: Paul Donovan, Marketing Manager
Tel: 1.800.FLANGE1 or 1-352-528-4100
E-mail: pauld@ancorp.com
Fiber Optic Feedthroughs
The Accu-Glass Products, Inc. Fiber Optic feedthroughs  are constructed with 200, 400, 600, and 1000 Micron UV/VIS fibers. They are designed for vacuum applications requiring fiber optic connections from inside a vacuum system to external equipment. The fiber is hermetically sealed into a stainless steel shell, using the latest in glass bonding technology, and terminates on the vacuum and air side with standard SMA 905 terminations. Features include UHV compatible construction; a SMA-905 connector interface; High Temperature rated to 250°C; Conflat compatible flange mounts; ISO KF compatible flange mounts; and Polyimide coated vacuum rated optical cables. Ultrahigh vacuum cable Polyimide coated optical fibers are available to meet the demands of Ultrahigh vacuum environments. Materials include Stainless Steel, Glass, and Quartz. The Vacuum Ranges are Ultrahigh vacuum 1 × 10-10 Torr, and High vacuum 1 × 10-8 Torr. Temperatures are feedthroughs 250°C, Flange, CF Style 450°C and Flange, KF / LF Style 150°C. www.accuglassproducts.com
Subminiature-D Instrumentation Feedthroughs
The Accu-Glass Products, Inc. Subminiature-D  Instrumentation Feedthroughs are available in 9, 15, 25 and 50 pin configurations. Accu-Glass has a large inventory of hermetically-sealed electrical feedthroughs. Overall assembly ratings are adjusted to that of the lowest rated component. Hermetic Subminiature-D feedthroughs are high density multipin instrumentation feedthroughs constructed with pin arrangements designed to meet MIL-C-24308 specifications for applications in instrumentation, power, coaxial and thermocouple-power contact combinations. The 9, 15, 25 or 50 gold plated pins are hermetically sealed and electrically insulated in a stainless steel shell using the latest in glass-ceramic bonding technology. Ultrahigh Vacuum cable assemblies with Peek (polyetheretherketone thermoplastic ) connectors and Kapton insulated ribbon cables are available to meet the rigorous demands of ultrahigh vacuum environments. Air and vacuum side connectors are fitted with captured stainless steel socket head screws that provide a means of securely locking them to their mating feedthroughs. Vacuum side cable assemblies, stand-alone connectors and other accessories are also available along with connectors, cable assemblies and custom subminiature-d multipin assemblies with up to 250-pin configurations
Accu-Glass Products, Inc.
San Fernando, CA
www.accuglassproducts.com
Tel: 1-818-365-4215
E-mail: Sales@accuglassproducts.com
Vacuum Feedthroughs
CeramTec North America’s Ceramaseal® product offering is the most complete line of hermetically  sealed feedthroughs built to support vacuum technology. A feedthrough is an insulated, electrical lead assembly which provides for the transfer of electrical power, gases or fluids from outside a hermetic chamber to the inside. Ceramaseal® feedthroughs provide the solutions for applications requiring hermeticity and electrical isolation. Our feedthroughs are built to endure extreme conditions, whether it be an ultra-high vacuum (UHV) environment, temperatures ranging from cyogenic (4 K) to 450º C, pressures in excess of 25,000 psig, corrosive or caustic environments, while maintaining an unsurpassed level of reliability and performance. The science of ceramic-to-metal sealing technology, which we pioneered more than 56 years ago, and glass-ceramic sealing allow CeramTec to manufacture feedthroughs with capabilities that go far beyond that of any glass or elastomer sealed feedthrough. A feedthrough is basically defined by the requirements for installation, insulation, and conductor material. CeramTec’s Product Guide for Ceramaseal® Products includes thousands of standard feedthroughs with weldable, ISO KF flange, ConFlat® flange, NPT, and baseplate installation mountings. Most feedthroughs are available with a choice of 304 Stn. Stl., Nickel, Molybdenum or Copper conductors to suit your specific application. When the standard approach won’t do, turn to CeramTec’s team of engineers to custom design a solution for your demanding application! www.ceramaseal.com
Multipin Connectors
The CeramTec multipin connector category of products  describes hermetic feedthroughs of two or more conducting pins that are fitted with plugs on the air side. In many cases, these multipin connectors also accept vacuum-side plugs. Ceramaseal® product variations include our Micro D Type (MIL-DTL-83513) connectors, as well as Sub D Type (MIL-C-24308) connectors and circular connector types MIL-C-26482 and MIL-C-5015. Multipin connectors are used primarily to provide instrumentation signals, voltage and/or current into a high-vacuum or ultrahigh vacuum environment, with an in-line connection to outside instrumentation. Designs adapt a CeramTec feedthrough (receptacle) with an industry-standard plug. The connector assembly is characterized by the MIL Spec designation, installation method and number of pins. In situations where voltage and current requirements are moderate, CeramTec is able to achieve a very high pin/lead density (up to 51 pins) using glass-ceramic sealing technology. Designs include both single-ended and double-ended connector assemblies. CeramTec offers the complete connection solution with the air and vacuum-side plugs and cable assemblies. www.ceramaseal.com
Thermocouple Feedthroughs
Thermocouples are widely used to measure the temperature inside a vacuum or pressure chamber. CeramTec’s thermocouple feedthroughs,  manufactured with thermocouple materials or extension material, transmit through the wall of the chamber the electromotive force (emf) generated by the application of heat to the thermocouple ead without introducing error. External instrumentation can then evaluate the strength of the emf that is proportional to the temperature at the thermocouple bead thus yielding a temperature measurement. The Ceramaseal® thermocouple feedthroughs provide the necessary electrical isolation and a hermetic seal. Typical thermocouple feedthrough types include loop type (ANSI Type R/S & T), spade type (ANSI Type K & C) and MIL-C-5015 type (ANSI Type K). For refractory and noble-metal thermocouples CeramTec uses compensating wires. The joints between the compensating material and the true thermocouple conductor material must be thermally shielded and not exceed 260°C.
CeramTec, Ceramaseal Division
New Lebanon, NY
www.ceramaseal.com
Tel: 1-800-752-SEAL(7325) or 1-518-794-7800
E-mail: sales@ceramtec.com
In-line Drive Motorized Feedthroughs
With Ferrotec’s motor-integrated feedthroughs, they simplify integration challenges and  eliminate potential failure points. FerroDrive motorized spindles from Ferrotec combine a hermetic Ferrofluidic® vacuum feedthrough with a high precision motor and controller to offer a compact and high performance integrated sealing and rotation system. Ferrotec's motor-integrated feedthroughs eliminate integration challenges and the potential mechanical failure points associated with coupling discrete components. In addition motor-integrated feedthroughs offer significant benefits. Reduced size with an in-line motorized feed-through is compact in comparison to an offset or shaft-coupled drive. Integrated feedthroughs that have a brushless servomotor and matching amplifier with power supply and sinusoidal commutation. Application appropriate feedback devices and command loops are incorporated. Improved performance is available as the feedthrough has the motor fully integrated around the shaft rather than coupled to it, it provides optimum drive-to-load torque efficiency with no backlash over the life of the product. Flexible configurations include direct drive feedthroughs available with either solid or hollow shafts. Reduced implementation time is possible since units are supplied ready to install, saving time and effort in choosing and integrating components.
Ferrotec (USA) Corporation
Nashua, NH
Tel: 1-603-883-9800
SH-101/SH-102 Single Sensor Head/Feedthrough
INFICON’s Maxtek SH-101/102 Sensor Heads are designed for simple  installation and easy crystal replacement. The sensor head consists of two basic units: a water cooled 304 stainless steel housing which is permanently positioned in the vacuum system and a Cool Drawer™ crystal which snaps into the housing. The Cool Drawer crystal holder is thermally shielded by the watercooled housing insuring excellent crystal performance in temperature environments up to 300°C. The sensor heads may be used with no water-cooling to temperatures up to 160°C. The exposed crystal electrode is fully grounded to effectively eliminate problems due to free electrons and RF interference. The SH-101 is designed for installation through the top of the vacuum system and the water-cooling tubes are perpendicular to the crystal face. The SH-102 is designed for installation from the side or the bottom of the chamber and the cooling tubes and the crystal face are parallel. Each sensor head is provided with (4) tapped (4-40) holes for convenient mounting, 0.31 cm ( 1 /8 inches) OD diameter × 76 cm (30 inches) long water-cooling tubes, and a coaxial connector. The SH-101/102 can be installed in the system using either the IF-111 or the IF-276 feedthrough. The IF-111 is a 2.5 cm (1 inch) bolt, o-ring sealed feedthrough with one electrical and two water tubes. The IF-276 is a 7 cm (2-3/4 inches) Conflat® feedthrough with one electrical and two water tubes. Brazing or Swagelok® fittings are required to complete the installation. www.maxtekinc.com
INFICON
East Syracuse, NY
www.maxtekinc.com
E-mail: reachus@inficon.com
Tel: 1-315-434-1100
CF® Flange Gaskets from ¼ Hard OFHC Copper, Plated Versions Available
Kurt J. Lesker Company manufactures CF® Flange gaskets  from ¼ hard OFHC copper, then cleans and finishes them to a scratch- and burr-free condition. These premium gaskets are individually packaged to maintain cleanliness, and are available from stock for flange sizes 1.33” OD through 18” OD. KJLC even stocks the hard-to-find 14.25” OD and 14.5” OD CF® flange gaskets. For the most demanding high temperature applications, Kurt J. Lesker Company’s proprietary plating process produces the shiniest Silver-Plated CF® flange gasket available. Meticulous 100% visual inspection guarantees the high quality these gaskets deliver. For applications where frequent disassembly prohibits the use of a metal gasket, the Kurt J. Lesker Company offers two varieties of Viton® gaskets specifically designed for CF® flanges. These products are: an Econo version; and the premium VZVIT series, which provides simple assembly. The unique VZVIT design “holds” the gasket in place, even when the flange mating surfaces are perpendicular to the floor. Annealed OFHC copper, gold-plated OFHC copper, and aluminum CF® flange gaskets are also available from stock. www.lesker.com
Electrical Feedthroughs
The Kurt J. Lesker Co. manufactures over 1,200 different electrical  feedthroughs in a wide variety of terminations, max voltages, and current carrying capacities, including three distinct ranges: Power Feedthroughs, Instrumentation Feedthroughs, and Thermocouple Feedthroughs. Power Feedthroughs are available in voltages to 100kV, current capacity up to 600A, and on all standard vacuum mounting flanges. Various conductor materials are available, including (but not limited to) copper, nickel, stainless steel, and Kovar. Instrumentation Feedthroughs are available for signal pass-through in all standard coaxial configurations (BNC, MHV, SHV, Type N, SMA, and SMB) as well as a variety of multipin variations (Mil-Spec, Circular, Type D). Thermocouple Feedthroughs are available for temperature measurement in all standard ANSI codes (Type K, J, C, T, E, R, & S) in both single-ended and doubleended configurations. Mil-Spec versions of the thermocouple feedthroughs are also available, as well as thermocouple feedthroughs with integral power leads.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Mike Kelley or Matt Jaszcar
E-mail: salesus@lesker.com
Multipin Electrical Feedthroughs
Insulator Seal’s Multipin instrumentation feedthroughs contain more than one conductor path or pin and are also fitted with a fastening air-side connector. These feedthroughs are used for the transmission of signal voltages and currents. They are commonly referred to as instrumentation feedthroughs because of their use in instrumentation control applications such as electron microscopes, electron-beam evaporation, electron microscopy, surface science analysis and semiconductor process controls. www.insulatorseal.com
Coaxial Feedthroughs
Insulator Seal’s Coaxial feedthroughs are those products constructed with two concentric conductor paths. One outer metal  tube or shield path, concentric with, and enclosing, a cylindrical center conductor path. The inner and outer paths are separated and insulated with a high purity alumina ceramic. Coaxial components are offered for industry standard BNC, MHV, SHV, Type N, SMA, SMB, Triaxial, Microdot, Between Series and SHV Bakeable connector interfaces. Coaxial style feedthroughs for most any application, from instrumentation signals to 20 kV high voltage power are included. www.insulatorseal.com
Thermocouple Feedthroughs
Insulator Seal’s Thermocouple feedthroughs  are used in applications for in-vacuum temperature measurement. A thermocouple is a device that measures temperature as a function of the electromotive force induced when heat is applied to two dissimilar metal wires, which are joined at both ends. ISI thermocouple feedthroughs are not temperature sensing devices as such, but components used to conduct a thermocouple’s voltage (EMF) through the bulkhead of a chamber to external instrumentation. In other words, an airto-vacuum environmental splice in a thermocouple’s conductor path. ISI offers base, refractory and noble metal compatible feedthroughs with various connector options including miniature, circular MS, push-on and screw-type connectors. www.insulatorseal.com
Power Feedthroughs Medium Current
Insulator Seal’s are used to transmit either high voltage, high current or a combination  of both. These can be used for a multitude of vacuum applications including vacuum furnaces, sample heating or biasing, in-vacuum coating applications such as electron-beam evaporation, resistive heating evaporation, and DC plasma sputtering. Proven and time tested designs are used to optimize the electrical performance of ISI power feedthroughs. Where space is not a limitation, ceramic surfaces are made as long as possible to maximize strike and creep distances. If space is limited, ceramics are convoluted in order to achieve increased surface distances with minimal impact on an insulator’s overall length. All air-side ceramic surfaces are glazed with a high temperature glass coating that reduces ceramic surface roughness and minimizes surface contamination. This glass coating enhances a ceramics’ electrical surface tracking characteristics. Some ISI power feedthroughs are fitted with tubular conductors that can be used to transmit both power and coolant simultaneously. These products are referred to as water-cooled feedthroughs. Water-cooled electrical components are typically used with grounded, closedloop cooling systems and nonconductive coolants such as deionized water or ethylene glycol. If using plain tap water, the cooling system must be grounded and lines must employ nonconductive materials such as polypropylene tubing. Properly grounded water lines will provide a safe dissipation path for any power conducted by the water. Current or power ratings are usually not given for watercooled feedthroughs as the ratings are dependent on coolant flow rates and their heat dissipating capacity. Tap water temperatures can vary dramatically from one region to another, so too will its heat dissipating capacity. Users are advised to establish safe and practical coolant flow rates based on the power requirements for their specific application and coolant heat dissipation capacity. www.insulatorseal.com
RF Power Feedthroughs
Insulator Seal’s RF Power feedthroughs are used to transmit either high voltage, high current or a combination of both. These can be used for a multitude of vacuum applications including vacuum furnaces, sample heating or biasing, in-vacuum coating applications such as electron-beam evaporation, resistive heating evaporation, and DC plasma sputtering. Proven and time tested designs. www.insulatorseal.com
Water and Liquid Feedthroughs
Insulator Seal’s Water and Liquid Feedthroughs are used to transfer coolant to  processing equipment inside a vacuum. For example, electron beam evaporation sources must be in a high vacuum environment and generating a densely focused electron beam to produce enough heat to evaporate Alumina ceramics; water cooling is therefore required to prevent damage to evaporation crucibles and electromagnetic coils used respectively to contain the molten alumina and focus the electron beam. Liquid Nitrogen Feedthroughs are used for the same cooling purposes as Water Feedthroughs but offer lower temperature (- 200°C) capabilities and therefore greater cooling rates. Liquid Nitrogen Feed-throughs are designed so as to minimize heat transfer between coolant lines and vacuum mounts. Ice build up can be detrimental to the sealing characteristics of a vacuum mount. Thermal insulation in liquid nitrogen lines is achieved through double wall coaxial construction. A 0.25 inch cooling line is inserted and welded to one end of a 1 /2 inch support tube. The opposite end of the 1 /2 inch support tube is welded to the vacuum mount which, when evacuated, creates a coaxial vacuum cavity between the two tubes. This cavity is an excellent thermal barrier, which prevents ice build up on the vacuum mount flange. www.insulatorseal.com
Methods of Sealing
Insulator Seal’s Del-Seal™ (Conflat® compatible) metal seal flanges have  become America’s industry standard and the world’s leading choice for ultra high vacuum flanges. They are listed with both the American standard size designations as well as the European DN CF standard. They are offered in 13 sizes from 1.33” (DN16 CF) to 16.5” (non-DN standard) diameters. Copper gaskets, Viton® elastomer gaskets and bolt kits are also detailed. ConTorr™ Gaskets are an ISI patented design offered in plain or gold-plated OFE-copper. What makes these gaskets unique from conventional copper gaskets is the revolutionary method by which they are installed, held in place and removed from metal seal flanges. Kwik-Flange™ (ISO NW compatible) elastomer seal flanges were specifically designed for high vacuum system connections requiring quick and frequent assembly and disassembly. They have been modeled after the globally established ISO NW flange format. ISI offers the Kwik-Flange™ system, including mounting accessories, in tube sizes from .750” (DN16 KF) to 2.00” (DN50 KF). Baseplate elastomer seal mounts are self-contained mounts, originally developed for the vacuum coating industry and designed for use with bell-jar systems or flat Baseplate vacuum chambers. These blank mounts fit through 1.00” holes. As an added convenience, ISI blank Baseplate mounts are fitted with a female 3 /8-16 thread to support custom vacuum structures. National Pipe Thread (NPT) mounts are also offered as a line of standard blank mounts. These are made of 316 stainless steel material and used to blank-off unused NPT vacuum ports. These mounts are typically sealed using conventional plumber’s Teflon® tape and are suitable for rough vacuum applications. www.insulatorseal.com
Custom Engineering Seals
At Insulator Seal, we know that many of tomorrow’s standard  components will evolve from the special fabrications produced today and to this end we listen all the more carefully to our customer’s individual requirements. The custom engineering of ceramic-to-metal seals is a central part of our manufacturing activity. Our Research and Development personnel are always available to discuss technical issues and we pride ourselves on the speed with which we can evaluate a particular application and propose the most cost-effective solution to the customer. Insulator Seal (ISO-9001:2000 certified) is a key provider and world leader in the manufacture of electrical and optical, ceramic-to-metal components for the vacuum science and technology community. ISI has features the industry’s most comprehensive line of hermetically sealed electrical and optical ceramic-to-metal components. ISI scientists, engineers and technicians have been perfecting the science and art of ceramic-to-metal bonding for over thirty years. Using time tested proprietary vacuum bonding techniques and advanced vacuum brazing systems ISI provides the scientific and industrial vacuum community with ceramic-to-metal products of unsurpassed quality and performance. Insulator Seal’s product line includes a complete line of thermocouple feedthroughs, single and double-ended multipin instrumentation feedthroughs, an extensive selection of industry standard coaxial instrumentation and power feedthroughs, high frequency RF power feedthroughs with patented cooling geometry, as well as custom engineered products for exotic or demanding applications.
Insulator Seal, A division of MDC Vacuum Products LLC
Sarasota, FL
www.insulatorseal.com
Tel: 941-751-2880 and Toll-Free 800-548-9509
E-Mail: sales@insulatorseal.com
Series 31 Seals and Components
HPS® Series 31 is a line of ISO-KF standard vacuum components.  The ISO-KF system refers to the family of small vacuum components (up to 2”), including flanges, elbows, tees and crosses. The International Standards Organization (ISO) has defined the interface dimensions, allowing the interchanging of components that conform to the standard’s dimensions. Applications ISO-KF fittings can be used in a wide variety of applications including: roughing and foreline plumbing; small systems a well as systems requiring frequent cleaning or modification. Alsosed in research and teaching laboratories. ISO-KF components are primarily designed for use at subatmospheric pressure. Because of the large number of elastomer seals used, typical limiting pressure without baking is about 10-7 Torr. Baked systems using Viton® seals can be used to two decades lower. Standard components can be used to slight overpressure. If the ISO-KF system contains significant overpressure, i.e., 5 to 100 psig, then use the HPS® overpressure rings. The ISO-KF system is a modular, building block method of creating a piping system. There are several advantages in the use of ISO components. Since The flanges are “sexless” and the seal is symmetrical, so that the components are rotatable. By using ISO components, system assembly is quick and cost effective. See the online catalog for the ISO dimensions of flange sizes 10, 16, 25, 40 and 50. These dimensions apply to ISO-KF flanges of these nominal diameters throughout this catalog. The Series 31 component line also includes a few components in NW 80 (3”) and NW 100 (4”) sizes. There is no international standard for these sizes in the KF style. MKS has designed the flanging using series consistencies and customer requirements. www.mksinst.com
Series 76 ISO-Universal Flange and Seal Components
The HPS Series 76 series ISO-universal component  system is used in a variety of industries from process manufacturing to semiconductor fabrication to thin film deposition. Some uses in vacuum systems are roughing and foreline plumbing for large vacuum systems; high vacuum, high conductance, interconnections; modular systems which will be modified frequently; and Experimental systems in research laboratories ISO-Universal flange components using elastomer seals are primarily designed for use at subatmospheric pressure. When elastomer seals are used without baking, typical limiting pressures may be around 10-6 Torr. Baked systems using Viton can be used to 10- 8 Torr. Standard components can be used to a slight over pressure. MF flanges may be used at a maximum pressure of 30 psig if the metal spacer ring is used and the flange damps are firmly retained. ISO-Universal flanges and components in this catalog are made of type 304 stainless steel. Centering ring and seal assemblies are offered with an aluminum centering ring and spacer ring, or with a stainless centering ring and an aluminum spacer ring. Rotatable bolt rings and damps are made of aluminum alloy. Retaining rings are made of steel. Flange seal surfaces are carefully machined and inspected for defects. Assembled components are leak checked for high vacuum use. They are cleaned and packaged to remain clean and protected in shipping. The user should observe precaution as required to prevent seal surface harm. This is especially important for used components returned to storage. www.mksinst.com
Series 88 Line of CF-Style Fittings
The HPS Series 88 is a line of CF-style fittings. CF  flanges are the standard for ultrahigh vacuum applications. They use a flat gasket placed between two knife edges to provide the vacuum tight seal. Mating flanges have identical profiles, i.e., they are sexless, eliminating the need to store two types or worry about compatibility. Made with very high purity stainless steel and meticulous cleaning procedures, the HPS CF components are suitable for use in the ultrahigh vacuum regime to below 10-13 Torr and in temperatures from -196 to 500°C. The material characteristics of the flanges, seals, screws, and nuts are selected to provide high performance throughout a wide temperature range. Rotatable and nonrotatable flanges in sizes from mini 1- 1 /3 to 10 inches (34 to 254 mm) are available with several bore sizes to fit a range of tube diameters. MKS uses the latest automated equipment to provide the highest quality and consistency. Very high purity type304 stainless steel is selected to have few inclusions. Combined with MKS’surface treatment and cleaning procedures, this minimizes outgassing, permeability, and leakage. Proper hardness is maintained to prevent the knife edge from deterio- rating. HPS CF flanges suit applications requiring a very clean environment, ultrahigh vacuum conditions, high temperature, or where critical or dangerous materials must be contained or excluded. These include difficult applications with corrosive, radioactive, toxicor air sensitive materials; materials creation and processing such as molecularbeam epitaxy; analytical instrumentation including Auger electron spectrometers, mass spectrometers, and electron microscopes and high energy physics installation such as accelerators and fusion devices.
MKS Instruments, Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-800-227-8766 (USA) or 1-978-284-4000 (worldwide)
E-mail: mks@mksinst.com
UHV Dun-Optics Viewport
UHV Dun-Optics by MPF Products, Inc. is a  technology used to seal almost any crystalline or glass material into an ultra-high vacuum assembly. Standard sizes are 1” nominal view in a CF40 and 2” nominal view in a CF63. Other flange sizes and view areas can be designed and manufactured as well. Dun-Optics window materials include, but are not limited to, zinc selenide, magnesium fluoride, calcium fluoride, crystal quartz, sapphire, BK7, germanium, silicon and Cleartran™ (Zinc Sulfide). Anti-reflective coatings can also be provided at desired wavelengths. Utilizing similar technology, MPF Products also offers differentially pumped viewports. This is achieved by arranging two or more metal seals so that the space between the seals is accessible to an appended vacuum pump, thus creating a differentially pumped seal. By actively pumping the region between the seals, minute leakage through atmospheric seal is further eliminated to ensure the leakage through the inner seal is reduced by several orders of magnitude. Thus, differential pumping guarantees extreme high-vacuum (EHV) reliability. The allmetal, low permeation seals to zinc selenide and zinc sulfide Cleartran™ are ideally suited for CO2 laser geochronology.
MPF Products, Inc.
Gray Court, SC
Tel: 864-876-9853
Electrical Feedthroughs
Nor-Cal’s extensive line of electrical feedthroughs are manufactured  from ultra-high vacuum grade materials such as high alumina ceramic insulators, OFHC® copper and nickel conductors, and 304 stainless steel flanges. These robust ceramic to metal feedthroughs have electrical ratings for operation with one side in dry atmosphere while the opposite end is in a stable vacuum. They are used in ultra high vacuum systems with CF flanges or high vacuum systems with NW flanges. CF feedthroughs can be baked to 450°C and NWs to 204°C with maximum system pressure of 1 × 10-4 Torr. Our product line consists of the most commonly required feedthroughs for general vacuum applications. Customs designs or modified standards can readily be supplied. www.n-c.com
Liquid Feedthroughs
Nor-Cal’s product line of liquid and liquid nitrogen  feedthroughs includes the most commonly required for general, high and ultrahigh vacuum applications. Tubing is 0.25 and 0.375 inch OD, type 304 stainless steel with CF or NW flanges. They are available without fittings or terminated with industry standard Swagelok® or Cajon® VCR tube fittings. Maximum bakeout with CF flanges is 450°C and 204°C with NWs. Vacuum ranges are 10-11 Torr and 10-8 , respectively. Water-cooled liquid feedthroughs are a cost-effective and reliable way to introduce water into a vacuum system. The 0.035 inch single wall tube construction is designed for the transmission of water as a cooling agent. Liquid nitrogen feedthroughs are constructed with dual and coaxial tube geometries. This thermal barrier effectively reduces condensation and ice buildup on the atmosphere side of the feedthrough around the mounting flange interface, protecting the seal’s integrity. This is necessary because of the extreme thermal gradients encountered with liquid nitrogen. Swagelok® stainless steel tube compression fittings provide a leakproof, torque free vacuum seal by swaging the stainless steel tube to which they are mated. They require no gaskets. Cajon® VCR stainless steel tube compression fittings properly handle rapid makeup in tube, pipe and welded vacuum systems. These zero clearance fittings make them the perfect installation solution when space is a problem. Compression of a removable copper gasket creates a vacuum seal between air and process sides. A new catalog book contains everything for the vacuum user, from the semiconductor process engineer to the UHV researcher. Our bound catalog contains US prices, specifications and drawings for 4000 standard vacuum components, including: isolation and pressure control valves; foreline traps; flanges and fittings; deposition monitors, feedthroughs and sensors; viewports and shutters; liquid and electrical feedthroughs; motion and positioning devices; and heater jackets and controllers. Custom chamber and weldment capabilities are also described in detail, including a detailed guide on vacuum chamber design.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Contact: Jacquie Daniel
E-mail: jacquiedaniel@n-c.com
Tel: 1-800-824-4166 or 1-530-842-4457
Magnetically-Coupled Transporter for Vacuum Applications
Transfer Engineering and Manufacturing offers a family of Precision Magnetic  Manipulators (PMMs) for use in high and ultra-high vacuum or controlled environments. Linear, rotary and linear/rotary motions are available with the independence of motion on the patented dual shaft models offering a wide range of secondary motions – operating clamping devices, vertical lift/lower mechanisms, securing locks as well as rotating stages. Widely used in research labs, the semiconductor industry and analytical laboratories, Precision Magnetic Manipulators can be incorporated into loadlock systems designed for sample / substrate/wafer introduction, positioning and removal. Each PMM can be customized to meet specific requirements. Examples of customization includes shaft extensions, very high force PMMs with internal magnets for HV applications, choice of shaft material, ceramic bearings and hollow shafts for electrical feed-throughs. PMMs can be motorized and controlled by computer or remote joystick.
Small Footprint, SEMI-Compatible, Loadlock & Transfer System
The Transfer Engineering and Manufacturing TEAMTM Mate is a compact, high-vacuum compatible,  single-substrate loadlock system designed to load wafers or other substrates into a SEMI-standard or custom process module. This small footprint system can mimic the motions of a complex and costly robot but is more convenient to use and requires little or no engineering to integrate with a process module. Designed with care in selection of interfacing materials along with an integrated magnetically-coupled transfer device with moving parts located well below transfer height minimizes generation of particulates. The unique magnetically-coupled slide mechanism can be operated manually or motorized. The valve interface can be easily modified to mate to a wide variety of vacuum systems. Applications include sample delivery to modules for process development, as a manufacturing tool or for low-volume production.
Transfer Engineering and Manufacturing, Inc.
Fremont, CA
Tel: 1-510-651-3000
Vacuum Furnaces and Ovens
Compiled by Terrence Thompson, Contributing Editor
This Vacuum Technology & Coating product showcase covers some of the many vacuum furnaces and ovens used in diverse applications throughout many industries.
Vacuum ovens and furnaces find applications in hundreds of manufacturing and other operations. Where are they used? If you need a vacuum to avoid gas interactions and oxidation when heating a product, the are a wide variety of ovens and furnaces to consider. Heating in a vacuum works exceptionally well for removing gas that would otherwise be trapped in a structure and potentially weakening it such as aerospace composites.
Vacuum Furnaces
The vacuum furnace heat-treat process takes place within an airtight vessel, where a vacuum minimizes surface reactions. Furnaces are built with high temperature materials to contain the process material and retain the heat without failure. Key specifications include process temperature range, chamber size and vacuum pressure range.
Common applications use atmospheres that include air or oxidizing, inert, reducing, and vacuum. Furnaces have either a single set point or programmable control to adjust/maintain temperature and temperature stability. Heat sources include arc, combustion, electrical or resistance, indirect or contact or conduction, induction, infrared or radiant, natural gas, RF/microwave or dielectric, and steam. Common applications include aging, annealing, baking, brazing or soldering, burn-off, curing, drying, firing or sintering, foundry or melting, heat treating, hot pressing, industrial, laboratory, preheating, and quenching.
Vacuum Ovens
With ovens, heat-treating also takes place inside an airtight vessel. The heat-treating process can take place either with a vacuum or a precisely controlled gas mixture. Heat treating under vacuum can prevent surface reactions, such as oxidation; remove surface contaminants; add a material to the surface layers; remove dissolved contaminating substances from metals by means of degassing.
Applications include preheating, quenching, sterilizing, aging, annealing, baking, brazing and soldering, burn-off, curing, drying, firing and sintering, melting, heat treating, hot pressing and laboratory R&D.
Product Descriptions
In the following product descriptions, vendors make distinctions to focus on specific intended applications, so direct comparisons are difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
SHQ-F Fixed Substrate Heaters/Rapid Anneal/O2 Furnace
For applications where the substrate   is fixed in front of one or two quartz lamps, AJA International, Inc. builds 1” and 2” diameter HV and UHV heaters which reach 1000°C. For 3” to 8” fixed substrates substrate heaters, annealing stations and oxygen furnaces are available which can achieve 500°C to 900°C depending on requirements and design constraints. www.ajaint.com
SHQ-X – Rotating Substrate Heaters
Substrate rotation in front of AJA International, Inc.’s unique quartz lamp  array optimizes both temperature and thin film deposition uniformity. SHQ-3X (up to 3” diam. substrates) and SHQ-4X (up to 4” diameter substrates) will achieve temperatures up to 850°C. SHQ-6X, SHQ-8X, SHQ-10X and SHQ-12X accommodate substrates from 6” to 12” diameter and can reach temperatures of up to 800°C. www.ajaint.com
SHQ-V/C – Combination Heating/Cooling
In applications where substrate heating and cooling is required in the  same process, AJA International, Inc. has developed the unique SHQ-V (0°C to 600°C ) and SHQ-C (70°C to 600°C). These units are designed for 4”, 6” and 8” substrates and utilize quartz lamps and either LHe, LN2 , or cool air. This “dry” cooling thus eliminates the need to drain the system when in the heating mode. A ferrofluid seal and motorized rotation system facilitate both uniform deposition, uniform heating and a well protected cooling delivery system. Motorized “Z” motion and RF / DC bias are available options on certain models. www.ajaint.com
SHQ-CES – Custom Engineered Solutions
AJA International, Inc. has custom engineered   dozens of special substrate heater solutions since 1989. Versions include heaters for square substrates, heaters with a transverse magnetic field, in-situ motorized tilt (shadow depositions) and mask exchange systems (combinatorial chemistry and general patterning). If a custom design is required, please provide details and a sketch if possible and e-mail or fax your requirement to AJA for a prompt quotation.
AJA International, Inc.
Scituate, MA
www.ajaint.com.
Contact: William Hale, President
Tel.: 1-781-545-7365
E-mail: topgun@ajaint.com
VIM/VMC Vacuum Induction Melting System
ALD Vacuum Technologies has a wide variety of metallurgy production systems. The vacuum induction melting and casting (vim/vidp) shown here is for charge weights from 1 kg up to 30 tons shown above. ALD also has electroslag remelting (esr); vacuum arc remelting (var); electron beam melting (eb); vacuum precision casting vacuum induction melting and casting with ceramic crucibles.
ALD Vacuum Technologies, Inc.
East Windsor, CT
Tel: 248-668-4022
PEO Multi-Purpose Fast Ramping Bench Top Furnaces
ATV Technologie GmbH’s multi purpose PEO allows various processes in one furnace with easily replaceable reactor inserts/in liners for LPCVD, CVD, epitaxy, poly Si, Silicon Nitride, LTO, TEOS, diffusion, POCl3, BBr3 , low k, HSQ, thermal oxide, MOCVD, PECVD, TCA, carbon nanotubes, GaAs, solar cell, LTCC, polyimide/ BCB curing, wafer bump reflow and alloying, thick film paste firing, LTCC sintering, annealing under inert atmosphere, hydrogen, high vacuum. Fast temperature ramping is a maximum 100°C/minute up, within less 1 hour down from 1100°C to less 100°C. Precisely controlled temperatures, 100 steps per program, max. 1150°C, max. 5 × 10-6 mbar, < 2 ppm O2 are achieved by only Nitrogen purging. This quartz glass chamber furnaces with controlled atmosphere is available for up 25 wafers 300 mm (50 wafers 200 mm) or any substrates like LTCC up to 12 × 12 inches. It requires just 2 m2 floor space, thus saving costly clean room space. Energy savings from no energy, no cooling air and no gas consumption during standby since operating mode is loading the furnace at room temperature. Ramping up to process temperatures, processing, cool down to close room temperature and unload furnace in stand by.
ATV Technologie GmbH
Vaterstetten, Germany
Tel: +49-8106-30-50-0
1200C Vacuum Tube Furnace (HVT)
Carbolite’s 1200C Vacuum Tube Furnaces (HVT) are known worldwide for their responsiveness and operational flexibility. The maximum tube furnace operating temperature 1,200°C for horizontal use only. It has vacuum levels of better than 10-5 mBar for a clean empty worktube. Vacuum system and controls are housed in the base. One end of the worktube is joined to the vacuum system via a stainless steel elbow with tube access is via the other end which is fitted with a removable stainless steel flange. Radiation shields are provided for both ends of the furnace to ensure maximum temperature uniformity. The tube furnaces include a two-stage sliding vane rotary pump, water cooled oil diffusion pump, high vacuum baffle valve, roughing/backing valve(s) and Pirani and Penning gauges. Special options include: gas systems, automatic/semi-automatic vacuum systems, air cooled diffusion pump, cooling water failure alarm, lower vacuum and special vertical and custom built designs
Carbolite, A division of Barloworld Scientific
Watertown, WI
Tel: 1-800-543-6208
Series M60 High Temperature High Vacuum/ Controlled Atmosphere Furnace
The Centorr Series M60 High Temperature High Vacuum/ Controlled Atmosphere furnace is a versatile laboratory and Research & Development unit designed for the varied needs any laboratory running metal or ceramic parts. The front loading Cold Wall Furnace is easily loaded and operated. The heat zone is resistance heated using metallic Moly or Tungsten heating elements and shielding. The M60 is available with numerous options allowing operation as a simple sintering furnace, or use for materials testing, tensile work, or vacuum/controlled atmosphere hot pressing. Ports are also provided for thermocouples, gauges, inert gas, and other pertinent instrumentation. With the proper choice of heat zone material, this furnace can operate up to temperatures over 2000°C in vacuum, inert gas, nitrogen and reducing atmospheres. All controls and instrumentation are front panel mounted in a control cabinet providing ease of visual monitoring and operation. The furnace is completely assembled and thoroughly tested prior to shipment.
Centorr Vacuum Industries
Nashua, NH
Tel: 1-603-595-7233
MT-300 Magnetic Vacuum Annealing Ovens
Despatch’s Magnetic Annealing Tool has a high field strength superconducting magnet for process flexibility and improved yields, enabling recording head manufacturers to make significant advances in product performance. The tool has a wide range of field strength options, including superconducting magnets up to 2.0 Tesla. Tight temperature uniformity of ± 0.5°C across each wafer and within the wafer stack maximize product yield is normal. The MT-300 has a superconducting magnet with field strength 1.7 Tesla standard. Field uniformity is ±2% with a divergence angle of 1.5°. It handles 15 wafer levels per batch, plus 1 control wafer. 300°C is the maximum tem- perature. Standard vacuum is 10-5 Torr with automatic mass flow controlled back-fill/ inert gas capability. Temperature uniformity is 0.5°C and the ramp-up rate is 5°C per minute with a ramp-down rate of 5°C per minute. Magnetic shielded enclosures provide operator safety. A user friendly graphical interface, featuring real time graphing, alarm monitoring and SECS/GEM compatibility.
Despatch Industries
Minneapolis, MN
Tel: 1-888-828-9903
High Altitude Chambers & Vacuum Ovens
Diversified Vacuum’s provides many products including stateof-the-art thermal vacuum systems for the space industry. DVI designs and manufactures its high vacuum equipment. Many related systems and components include vacuum furnaces, evaporation systems or clean, dry, empty vacuum chambers that can be configured to specific applications. Standard products can have view ports; custom stainless braided Viton hoses; custom metal flex hoses; fittings and flanges; custom valve controllers; and high and ultra-high vacuum chambers of any configuration.
Diversified Vacuum, Inc.
Suffolk, VA
Tel: 1-800-929-8240
HEQ Series of Vacuum Furnaces (Horizontal External Quench)
The Ipsen, Inc. Vacuum Furnace Systems’ HEQ series of vacuum furnaces (Horizontal External Quench) is the most popular VFS model. The ability of this vacuum furnace to perform optimally under a wide range of applications makes it the most versatile and cost effective furnace on the market today. The HEQ Series heat exchanger, quench motor, and blower wheel are mounted in one, space saving external quench enclosure to allow for convenient, safe maintenance. Another unique feature – gas quench nozzles mounted on the front door panel, where applicable – provides overall, even gas distribution. A variety of hot zone designs are available in the HEQ Series from graphite insulation to all-metal radiation shields. Other horizontal models are available at quench pressures up to 10 Bar. All models include graphite board and felt insulated hot zones or metal shielded hot zones. Temperature ranges up to 3,000°F (1,650°C) are available. All models are provided with molybdenum or graphite heating elements. Larger capacity quench systems are available for special applications.
Ipsen, Inc. (formerly Vacuum Furnace Systems)
Souderton, PA 18964
Tel: 800-359-7675 and 215-723-8125
CVF1000 Ultra High, Clean Vacuum Furnace
The Kurt J. Lesker Company’s CVF1000 Ultra High, Clean Vacuum Furnace is designed for degassing and conditioning components that are used inside a vacuum environment to reduce outgassing and pumpdown time. These parts can be components that are used in the manufacture of end product, or tooling that is used to assist process and manufacture of end product. Features include: a 24” wide x 30” high x 24” deep stainless steel water cooled chamber with hinged front door; thermocouple control to 1,000°C; high vacuum cryogenic pumping; molybdenum and Inconel hot zone; full computer control with data logging; ease of use maintenance; and Recipe Driven procedures with optional chart recording. Wherever there is a need for ultra high vacuum there will be a need for ultra clean, low out gassing of components inside the system. This ensures total cleanliness with lower out gassing, resulting in faster pump down and lower ultimate pressure. www.lesker.com
Quartz Lamp Heaters from Lesker
Kurt J. Lesker Company’s QLH series quartz lamp heaters act as both bakeout and sample heaters. Able to operate safely in an oxygen backfill environment, these heaters mount inside a vacuum chamber to raise the temperature of substrates. Because they produce both infrared radiation and ultraviolet light, they clean nearly all molecules adhering to the substrate’s surface through electron excitation and molecular vibration. KJLC offers single lamp assemblies, approximately 4” in length, each using a 500W lamp. Producing 9500 lumens, they mount in a polished stainless steel parabolic reflector with high-temperature, fabriccovered power cables. Our lamps have a heat output of approximately 200°C with an average life of 2,000 hours. Typical uniformity is 10% across a 100 mm diameter substrate. Using the specially designed mounting brackets, arrays of lamps are available in triangular, square (shown) and other multiple configurations.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Mark Mattis
Tel: 1-412-387-9200
E-Mail: markm@lesker.com
UHV Heater Modules
In addition to the complete sample heating solutions offered within the EpiCentre section, the Kurt J. Lesker Company also offers a range of individual heater modules for end users to incorporate within their own heater stage designs. The range provides end users with a cost-effective solution to sample heating, whilst benefiting from a proven heater technology, used within market leading stages. The heater module product range is split into three sizes with two different element materials. Heating elements are constructed from high quality, high-density graphite, coated with pyrolytic graphite or pyrolytic boron nitride. By virtue of the exceptional thermal coupling of the heat to the substrate and the large radiating surface area (an effect of the high element surface to gap ratio), these elements run at considerably lower temperatures than conventional metal heaters. The typical ratio of element surface to meander gap is 5:1 resulting in excellent substrate heating uniformity, even without rotation. These heater modules are used in vacuum applications for radiantly heating semiconductor wafers, holder supported samples or various other substrates to high temperatures. The modules feature CVD processed heating elements packaged in refractory metal cases. The immediate hot zone holding the element is constructed from refractory metals such as molybdenum and tantalum and does not include any ceramics or other materials to compromise performance at high temperature. These modules are therefore particularly suitable for ultra high vacuum applications. The heater modules provide: High uniformity heating to 1,000°C (1,200°C for certain applications); High uniformity heating to 1,000°C (1,200°C for certain applications); and a Refractory metal hot zone. Heater modules are available with type ‘C’ or ‘K’ thermocouples and can be supplied with semiconductor grade ‘quartz guards’ to protect the heater element. There are High performance Pg or PBN coated graphite elements and a Quartz guard option for element protection. www.lesker.com
Button Heaters
The Kurt J. Lesker Company Button Heaters work as thermionic cathodes to deliver temperatures of up to 1,200ºC to samples in UHV conditions. For non-specific and quick turnaround applications, we offer a simple package design consisting of an all molybdenum can with a resistive heater 'potted' into it. For cathode applications, a porous tungsten matrix, making up the top, holds the oxides which allow thermionic emission. Some applications benefit from thin molybdenum or molyrhenium sleeves into which the button heater fits. The sleeves provide thermal isolation as well as thermal shielding. We can provide sleeves of any length with or without holes and/or slots. When application demands, we can mount sleeves onto base flanges including mounting holes or weld flanges. We also offer a cathode, called a spiral heater, for ion lasers. Available in any size, number of turns and leg configuration, spiral heaters offer high emission currents at a low cost where beam focusing is not critical. www.lesker.com
Epicentre Heater Stages
The Kurt J. Lesker Company’s EpiCentre is a combined wafer heater and rotational stage designed for critical thin film deposition, wafer processing, substrate modification, surface science and MBE processes. The modular construction lets the user combine exactly the components to match the desired requirements for: substrate rotation, automatic substrate removal, axial positioning of the substrate, and substrate temperature. EpiCentres, bakeable to 250ºC, can accept substrate biasing. Their minimum outgassing qualities make them compatible for UHV, high vacuum and reactive gas environments. The standard heater element for each EpiCentre is made from pyrolytic graphite (pyrolytic silicon carbide, or pyrolytic boron-nitride coated graphite available on request). It has a meander design with slotted resistive material (along chords of a circle) to give a long, uniform crosssection track. This efficient, blackbodied heater rests in a refractory metal reflector assembly giving consistent high-temperature heating with exceptional temperature uniformity across the wafer or substrate. The excellent thermal coupling between the heater element and the wafer, positioned close to the element surface in its support cradle, allows the element to run at considerably lower surface temperatures than a metal heater while able to raise the wafer temperature to 1,200ºC. The refractory metal enclosure and insulator-free mounting of the heater module make this design ex- ceptionally clean with little particle generation. Heater modules of various sizes accommodate diameters from 25mm to 300mm.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contacts: Matt Jaszcar or Mark Mattis
E-mail: salesus@lesker.com
Tel: 1-412-387-9200 or 1-800-245-1656
HPS® Series 46 Heaters
The MKS Instruments—HPS Products’ Series 46 heaters now have an improved heater design for tighter temperature control, enabled by a microprocessor-controlled thermocouple. Reliability of the heater control system is improved by a no-arc relay circuit with an improved design of thermal fuse, eliminating failures that could be caused by transient thermal spikes. The 46 series is completely compatible with series 45 heaters in size and connectivity. Special temperature settings available on request. Enhanced heater safety means the outside temperature of heater (45 to 65°C), is safe to touch. The heaters are UL listed and CE tested and marked for both electrical and thermal safety and passes the SEMI S9- 95 strain relief test of 35 pounds. An integral thermal fuse with ground fault equipment leakage circuit interrupter power cord option eliminates most shock hazards. Greater thermal performance results in reduced power consumption and improved temperature uniformity while preventing cold zones. The patented design retains heat and improves thermal safety. The heaters may be used in forelines or exhaust lines. LEDs are sued on the local controller to confirm that heater is operating properly. A low temperature alert (LTA) option provides remote warning when heater is cold. The series 46 heater jackets are for stainless steel tubing. The heater design that provides improved temperature control and uniformity. The preset temperature setpoint is microprocessor controlled through an integral electronic controller within the power cord. the addition of a no-arc relay technique significantly extends the relay life in high current heaters. This new control method allows you to heat longer sections of tubing with fewer heaters.
MKS Instruments, Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-800-227-8766 (USA) or 1-978-284-4000 (worldwide)
E-mail: mks@mksinst.com
Vacuum Ovens
Sheldon Manufacturing’s vacuum ovens are built with a 304 stainless steel chamber for exceptional durability. We use true vacuum valves built of brass that use Teflon seats to prevent leaks. Our double plenum design exceeds CE safety requirements resulting in a cool outer surface. The doors have positive latch handles with spring-loaded glass to facilitate a good vacuum seal without hinge binds that shorten the gasket life. A selection of gaskets (for specific applications) and a small bench top footprint increase the versatility of our ovens. We were the first to bring square vacuum ovens to the industry and we continue to offer innovative, topof-the-line vacuum ovens. Our unique cross-flow ventilation forces inert gas to fill the entire chamber. Chose from3 /s-inch orifices or a KF25 fitting to withstand heavy use, minimize draw-down time and achieve low vacuum levels. We offer a full line of gaskets to suit applications involving high temperatures, acids or solvents.
Sheldon Manufacturing
Cornelius, OR
Tel: 1-503-640-3000
APF-183 Bell-Jar Type Furnace Automatic Vacuum/Hydrogen Furnace
Thermal Technology, LLC supplies a model APF 1836-MS furnace system. The APF-1836 is a bell-jar type furnace with the main heating element measuring 18 inches in diameter by 36 inches high, providing a work zone 15 inches in diameter by 30 inches high. The heating element is fabricated from molybdenum sheet and provides approximately 2000 square inches of radiating surface area facing the work. Trim heaters, manufactured of molybdenum stock, are installed at each end of the work zone to insure a high degree of temperature uniformity. Fully automatic process control and unattended operation are facilitated by a Honeywell controller/programmer with a multi-loop workstation. Similar systems to the one shipped to Argonne have been successfully applied to other processes such as co-firing of metallized ceramic products and sintering of metals and ceramics. These types of systems have been supplied for use at temperatures up to 2,500°C and are in production and R & D facilities around the world.
Thermal Technology, LLC
Santa Rosa, CA
Tel: 1-707-571-1911
Gas-Fired Vacuum Furnace
Thermotech’s gas-fired vacuum furnaces handle smaller to very large loads. Large are 60 × 60 × 104 inches (10,000 lb. load) or standard 36 × 36 × 64 inches (5,000 lb. load) Products exist for bright temper and annealing, stress relieving, normalizing, aging, etc. Thermotech can provide equipment for small loads (500 lb.) to very large loads (10,000 lb.). For much larger loads, bell annealers are found through a link to the Lee Wilson website. Thermotech manufactures and supports the entire line Lee Wilson brand of bell annealers and furnaces.
Thermotech Industries, Inc.
Toledo, OH
Tel: 1-419-729-2666
Single Wafer Rapid Thermal Processing System
The ULVAC Model RTP-6 lamp annealing system is ideally suited for silicide formation in single wafer semiconductor processes including annealing after ion implantation and annealing in compound semiconductor processes. The RTP-6 provides rapid heat treatment, excellent film thickness uniformity and reproducibility by control of nine zones and a cold wall structure that has no heavy metal contaminating source. One 4, 5 or 6-inch wafer can be heated from room temperature to 1,000°C in atmospheric air or inert gas static or gas flow. Top side heating is achieved by parabolic type reflector with infrared lamp at maximum heating rates from 10°C/sec. to 50°C/sec. depending on unit configuration, with ±10°C accuracy. Atmosphere and gases can be controlled with an optional pumping system, while long service life is ensured with optional quartz deposition shield.
The rapid thermal processor is comprised of an infrared gold image furnace, sample heating assembly, temperature controller, output unit with individual control of nine zones, gas piping system, exhaust system and optional pumping and pyrometer. www.ulvac.com
Spot Focusing Furnace
The compact ULVAC MIRO series of infrared gold image furnaces consists of a single or double ellipsoidal spot focusing furnace and a specialized high performance programmable temperature controller. The compact design consists of heater and specimen sections, separated by a transparent quartz plate. The MIRO series achieve a high maximum temperature of 2,000°C with low electric power requirements and has low heat loss of radiated infrared rays. MIRO provides high rates of heating/cooling as compared to a resistance furnace by utilizing low thermal capacity and a water-cooled reflector. The clean heating atmosphere can be either air, vacuum or with inert gas static/flow. Sample holding crucibles come standard in platinum and are available in alumina, stainless steel and molybdenum. Maximum sample size is 8 mm diam. × 10 mm long. www.ulvac.com
Programmable Tabletop Furnace Heats to 1200°C in Under 24 Seconds
The ULVAC MILA-3000 is a programmable tabletop furnace for high temperature materials testing and analysis. ULVAC’s Mini-Lamp Annealing system can heat samples to 1,200°C in less than 24 seconds using an infrared gold image furnace. Samples are heated by focusing reflected infrared rays onto the piece, which is mounted in a clean, atmosphere-controlled quartz vacuum chamber. The vacuum furnace permits very rapid and controlled heating and cooling experiments to be performed in annealing, gas quenching, thermal cycling, sintering and melting point determination applications. Priced under $10,000, the MILA-3000 anneals samples rapidly at 50°C/sec with temperature uniformity of ± 2°C. The MILA-3000 provides heating in a variety of atmospheres including air, vacuum and inert/reactive gases, requires low (1 kW) power consumption and handles samples up to 20 x 20 x 20 mm in size. www.ulvac.com
Infrared Gold Image Furnace
The versatile ULVAC QHC Series Infrared Gold Image Vacuum Furnace for high temperature materials testing and analysis consists of an infrared gold image furnace, a high accuracy programmable digital temperature controller, a quartz glass chamber, and a gas controller. It is ideal for basic research work in the materials science and semiconductor fields. The vacuum furnace heats the sample by focusing reflected infrared rays onto the sample, which is mounted in a clean, atmosphere-controlled quartz vacuum chamber. The IR lamps provide energy densities that are significantly higher than conventional heating elements. This features permits very rapid heating and cooling experiments to be performed. Operating temperatures can reach as high as 1,800°C, depending on the model. The furnace body is water and gas cooled for maximum accuracy and thermal response time. Experiments such as annealing, gas quenching, thermal cycling, sintering and melting point determinations under precisely controlled gas or vacuum atmospheres can be performed in this instrument. These furnaces are available in a variety of configurations and temperature ranges.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com.
Tel: 1-978-686-7550
E-mail: sales@ulvac.com
Addendum
November 2007
This Addendum updates the VT&C November 2007 Chillers/Cryogenics and Heaters for Vacuum Processing Applications Product Showcase. The listings inadvertently omitted Telemark Cryogenics. We apologize for the oversight.
Water Vapor Cryotraps
Telemark Cryogenics manufactures several models of water vapor cryotraps ranging from a maximum capacity 220,000 liters per second with 3500 watts of heat load (TVP3500), a mid-range capacity of 90,000 liter per second max trapping and 2000 watts of heat load (TVP2000) and a 50,000 liters per second max trapping and 1000 watts of heat load model (TVP1000). The TVP3500 and TVP2000 models are available with an optional “dual independent circuit” configuration. All units have integrated digital controls and communications and provide numerous modernized features. CE and Kyoto/green models are available for all sizes.
Telemark Cryogenics
Hayward, CA
www.telemark.com
Tel: 1-415-883-1004
E-mail: sales@telemark.com
| |
|
|
Vacuum Technology & Coating