Chillers/Cryogenics and Heaters for Vacuum Processing Applications

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

 

Tel: 1-800-645-3050 Polycold® PFC Fast Cycle Water Vapor Cryopump  This proven, reliable system significantly reduces pumpdown time and improves product quality by quickly removing water vapor from your vacuum process. Brooks Automation, Polycold Systems’ PFC provides high speed, in-chamber water vapor cryopumping, with speeds up to 200,000 l/s, vacuum levels to the 10-10 Torr range, temperatures of -100°C to -150°C, and heat removal to 3600 watts. The PFC delivers true fast cycle performance – reaching base pressure faster and defrost- ing within minutes to return your chamber to action. This means more production cycles per shift, higher throughput and enhanced profitability. Brooks Automation Polycold® Systems Petaluma, CA Tel: 1-707-769-7000 Qdrive Acoustic Coolers  Qdrive offers a full range of cryo-condensers for cold-trapping service and gas condensation, including the 2s241K shown here. All Qdrive coolers use the acoustic Stirling cycle. These robust, near-silent condensers provide cooling to under 50 K, with capacities from a few watts to hundreds of watts at 77K rating temperature. Zero Scheduled Maintenance is achieved by no cold moving parts and no oil anywhere. Operation is by a single on/off switch, with multiple process safeties built in. The Qdrive model 2s241K-LX-DE shown here can condense up to 1.5 liquid liter per hour of oxygen, or operate at low gas flow to as low as 45K. This mobile unit operates from 220 VAC, 3-phase, drawing less than 5 kW. Custom packages and interfaces are available. CFIC-Qdrive is currently offering the 2s241K with 200 watt capacity at 77K in close-coupled form. A FAR (remote coldhead) option will be offered soon. The 2s102K is rated at 8 to 10 W @ 77K; the 2s132K is rated 25W @ 77K; and the 2s241K is rated 200W @ 77K. Flexibly-Attached Remote (FAR)-head Acoustic Cryocoolers  Qdrive announces the Flexibly-Attached Remote (FAR)-head Acoustic Cryocoolers, for cryopumping, target & substrate spot-cooling, and other uses in production-critical equipment. These silent coolers combine acoustics’ efficient reliability (no moving parts or fields at the head, no oil anywhere) with the packaging ease of a remote coldhead. Applications once restricted to J-T or G-M coolers can now enjoy Qdrive’s lower vibration and downtime (Zero Scheduled Maintenance), with cooling as low as 50K. Cooling at 70 to 80K is 2 to 5 times is said to be more efficient than competing coolers, with head and drive in any orientation. The Qdrive model 2s102K acoustic cooler shown operates on 110 VAC, 60 Hz. It can be modulated via inexpensive, built-in dimmer-type control for precise load-matching. It gives instant starts, stops, and re-starts at all temperatures, and is so robust it’s used in hot, 24/7 oil refinery service, to test-chill in-line petroleum samples. The 2s102K operates at 8 to 10 watts at 77K in both FAR and close-coupled form, and adding FAR options to other popular models in its range of larger coolers such as the 2s132K which is rated 25W @ 77K and the 2s241K is rated 200W @ 77K. CFIC Qdrive™ Troy, NY Tel: 1-518-272-3565  Cryogenic Storage and Distribution  Chart Industries has a solution for nearly every cryogenic application. Driven by innovation for over 40 years, Chart is an industry standard for many cryogenic applications. Chart can custom design products around specific customer requirements. Chart’s products and services cover the entire cryogenic value chain. Whether you are a distributor of cryogenic gases or an end user with a particular cryogenic application, Chart has the necessary skill sets and production capabilities to help with the most challenging applications. For storing or transferring cryogenic fluids or gases, Chart’s wide range of storage tanks — large or small, stationary or portable —will cover the requirements. Chart also applies its knowledge of cryogenic technology to the actual piping of the cryogenic liquid or gas to the point of application via its patented Vacuum Insulated Piping design. Maintaining the proper pressure and temperature of cryogens can be challenging. Chart’s proven performance in insulation technology, along with the patented bayonet connections for field installation, provide a valued sense of security. Chart offers factory certified service, repair and parts for all of its products, standard or custom. The website provides complete schematics and diagrams of each of the products with detailed labeling of each component, making it easy to click and order replacement parts. Chart Industries Inc. New Prague, MN Tel: 1-952-758-4484  Cryorefrigerators (Cryocoolers)  Cryomech, Inc. manufactures single and two stage cryorefrigerators based on both the Pulse Tube and the Gifford-McMahon Cycles. This provides low temperatures to < 2.7K and capacities as high as >300 W at 77K. Also available is a closed-cycle dilution refrigerator offering 0.050 K. Pulse Tube Cryorefrigerators (PTR) come in single and two stage models. All PTRs reach cryogenic temperatures without the displacers that cause vibrations. This reduction of the cold moving parts increases the mean time between maintenance, while decreasing noise and vibration. The PT405, a two stage PTR, obtains a low temperature of < 2.7K, in both 50 and 60 Hertz power versions. We also offer the PT805 which cools to < 8K. The PT60 is a single stage PTR which cools to < 30K, has 60 watts of capacity at 77K for an input power of 3 kW. Cryomech's Gifford-McMahon Cycle Cryorefrigerators come in single or two stage models. The single stage G-M's, the AL Series, reach a low temperature of either 10K or 25K in 20 minutes and are maximized for price and capacity from 10-80K. The two stage G-M’s, the GB Series, cool down to 6.5K on the second stage with the first stage supplying cooling from 40-80K. When cooling devices to below 20K with the second stage a GB Series Cryorefrigerator, the first stage supplies the power to intercept heat at a higher temperature, therefore shielding the second stage from unnecessary heat. Cryomech, Inc. Syracuse, NY Tel: 1-315-455-2555 Cold Box  Cryo Technologies is a supplier of custom engineered cryogenic process equipment including large cold boxes, with a focus on helium systems. Products include cryogenic helium extraction systems for producing crude helium from pipeline natural gas, cryogenic purifiers for producing pure helium from crude helium, helium refrigerators and liquefiers covering a full range of sizes and applications, nitrogen liquefiers, cryogenic and non-cryogenic gas purification and recycle systems for all gases, and low heat leak vacuum insulated piping and distribution systems. Cryo Technologies Allentown, PA Tel: 1-610-530-7288 Integrated Cryo Chamber Treatment  Integrated Cryogenic Systems Inc. is a deep cryogenic treatment company which offers deep cycle cryogenic material tempering to -300°F. It is affiliated with Integrated Metallurgical Services Ltd., specializing in post weld heat treatment. The company uses a deep cryogenic treating chamber, interior dimensions 96 inches L × 36 inches W × 36 inches D with multi point N2 injection, stainless steel constructed, capable of maximum load mass of 10,000 lb. The cryogenic processing control is a PC-based OPTO 22 system with a PID ramp cycle control, ± 0.25°F/min., multi thermocouple data acquisition and auxiliary instrumentation penetrations for resistivity, conductivity and optical pyrometry instrumentation. Integrated Cryogenic Systems Inc. Calgary, Alberta, Canada Tel: 1-403-279-2666 UHV Heater Modules  In addition to the complete sample heating solutions offered within the EpiCentre section, Lesker also offer a range of individual heater modules for end users to incorporate within their own heater stage designs. The range provides end users with a cost-effective solution to sample heating, whilst benefiting from a proven heater technology, used within market leading stages. The heater module product range is split into three sizes with two different element materials. Heating elements are constructed from high quality, high-density graphite, coated with pyrolytic graphite or pyrolytic boron nitride. By virtue of the exceptional thermal coupling of the heat to the substrate and the large radiating surface area (an effect of the high element surface to gap ratio), these elements run at considerably lower temperatures than conventional metal heaters. The typical ratio of element surface to meander gap is 5:1 resulting in excellent substrate heating uniformity, even without rotation. These heater modules are used in vacuum applications for radiantly heating semiconductor wafers, holder supported samples or various other substrates to high temperatures. The modules feature CVD processed heating elements packaged in refractory metal cases. The immediate hot zone holding the element is constructed from refractory metals such as molybdenum and tantalum and does not include any ceramics or other materials to compromise performance at high temperature. These modules are therefore particularly suitable for ultra high vacuum applications. The heater modules provide: High uniformity heating to 1000°C (1200°C for certain applications); High uniformity heating to 1000°C (1200°C for certain applications); and a Refractory metal hot zone. Heater modules are available with type ‘C’ or ‘K’ thermocouples and can be supplied with semiconductor grade ‘quartz guards’ to protect the heater element. There are High performance Pg or PBN coated graphite elements and a Quartz guard option for element protection. Heater Tape  The Lesker Tape Heaters are metal resistance filaments woven into a flexible glass fiber ‘tape’ that can be wound around ports, tubes, and parts of a chamber. Duo-Tape® heaters have a unique dual ‘sine-wave’ element — convenient since, unlike other tape heaters, both power leads emerge from one end of the tape. The 2 foot power leads are multi stranded ‘A’ nickel covered with two layers of AMOX® yarn and impregnated with a high temperature binder. The element is multi stranded resistance wire (35 to 40 standard wire gauge) covered with a minimum of two layers of braided AMOX yarn. The tape's heavy braided outer cover provides good abrasion resistance and insulation for the elements. Duo-Tapes may be wrapped around conducting metal tubes or glass/ceramic surfaces. The tapes have a maximum temperature of 760ºC and maximum power density of 8.67 W/in2 . Since this temperature exceeds those used in normal bakeout, we suggest the tape heater be connected to a power outlet via a Variac or other variable transformers. Close winding (side-by-side turns) is not often physically possible over the whole chamber. In addition tapes must not be overlapped. Obtaining a uniform chamber temperature is, therefore, rarely possible with tape heaters. However, as local area heaters— particularly for ports attached to an internally heated chamber— tape heaters are convenient, inexpensive, and easily installed.  www.lesker.com Stab-In Heaters  The Lesker Stab-In (also known as Insertion) bakeout heaters are mounted on 2.75-inch OD ConFlat flanges and work as outgassing units for stainless steel chambers. They heat a vacuum system efficiently from the inside out, a method which produces a faster heating response than that produced by external heaters, resulting in a low heating effect outside the chamber. The bulb and thermocouple extend into the chamber about 5 1 /8 inches. The bulb produces 500W of power and is available in both a 115V or 240V version. The atmosphere side connection is made via a Mil-Spec connector.  www.lesker.com Quartz Lamp Heaters  The Lesker Quartz Lamp Heaters act as both bakeout heaters and sample heaters. Able to operate safely in an oxygen backfill, they mount inside a vacuum chamber to raise the temperature of substrates. Because they produce both infrared radiation and ultraviolet light, they clean nearly all molecules adhering to the substrate's surface through electron excitation and molecular vibration. Used in place of blanket heaters or panel ovens, lamp heaters save both time and power since the heat radiates directly to the critical surfaces. We offer single lamp assemblies, approximately 4 inches in length, each using a 500 W lamp producing 9500 lumens mounted in an electro-polished stainless steel 'V' reflector with a high-temperature, fabric-covered power cable. Our lamps have a heat output of approximately 200° Celsius with an average life of 2000 hours. Arrays of multiple lamps are also available in triangular and other configurations. The heater can achieve temperature uniformity of better than ±10% across a 4-inch diameter substrate. The black box design ensures efficient heat containment, minimizing secondary heating of other components. Power supplies up to 8 kW are available.  www.lesker.com  Button Heaters  The Lesker Button heaters work as thermionic cathodes to deliver temperatures of up to 1,200ºC to samples in UHV conditions. For non-specific and quick turnaround applications, we offer a simple package design con- sisting of an all molybdenum can with a resistive heater 'potted' into it. For cathode applications, a porous tungsten matrix, making up the top, holds the oxides which allow thermionic emission. Some applications benefit from thin molybdenum or molyrhenium sleeves into which the button heater fits. The sleeves provide thermal isolation as well as thermal shielding. We can provide sleeves of any length with or without holes and/or slots. When application demands, we can mount sleeves onto base flanges including mounting holes or weld flanges. We also offer a cathode, called a spiral heater, for ion lasers. Available in any size, number of turns and leg configuration, spiral heaters offer high emission currents at a low cost where beam focusing is not critical.  www.lesker.com  Epicentre Heater Stages  The Lesker EpiCentre is a combined wafer heater and rotational stage designed for critical thin film deposition, wafer processing, substrate modification, surface science and MBE processes. The modular construction lets the user combine exactly the components to match the desired requirements for: substrate rotation, automatic substrate removal, axial positioning of the substrate, and substrate temperature. EpiCentres, bakeable to 250ºC, can accept substrate biasing. Their minimum outgassing qualities make them compatible for UHV, high vacuum and reactive gas environments. The standard heater element for each EpiCentre is made from pyrolytic graphite (pyrolytic silicon carbide, or pyrolytic boron-nitride coated graphite available on request). It has a meander design with slotted resistive material (along chords of a circle) to give a long, uniform cross-section track. This efficient, black-bodied heater rests in a refractory metal reflector assembly giving consistent high-temperature heating with exceptional temperature uniformity across the wafer or substrate. The excellent thermal coupling between the heater element and the wafer, positioned close to the element surface in its support cradle, allows the element to run at considerably lower surface temperatures than a metal heater while able to raise the wafer temperature to 1,200ºC. The refractory metal enclosure and insulator-free mounting of the heater module make this design exceptionally clean with little particle generation. Heater modules of various sizes accommodate diameters from 25mm to 300mm. Kurt J. Lesker Clairton, PA www.lesker.com Contacts: Matt Jaszcar or Mark Mattis E-mail:  Sales@lesker.com Tel: 1-412-387-9200 or 1-800-245-1656 HPS Series 46 Heaters  The MKS Instruments—HPS Products’ Series 46 heaters have a new improved heater design for tighter temperature control, enabled by a microprocessor-controlled thermocouple. Reliability of the heater control system is improved by a no-arc relay circuit with an improved design of thermal fuse, eliminating failures that could be caused by transient thermal spikes. The 46 series is completely compatible with series 45 heaters in size and connectivity. Special temperature settings available on request. Enhanced heater safety means the outside temperature of heater (45-65°C), is safe to touch. The heaters are UL listed and CE tested and marked for both electrical and thermal safety and passes the SEMI S9-95 strain relief test of 35 pounds. An integral thermal fuse with ground fault equipment leakage circuit interrupter power cord option eliminates most shock hazards. Greater thermal performance results in reduced power consumption and improved temperature uniformity while preventing cold zones. The patented design retains heat and improves thermal safety. The heaters may be used in forelines or exhaust lines. LEDs are sued on the local controller to confirm that heater is operating properly. A low temperature alert (LTA) option provides remote warning when heater is cold. The series 46 heater jackets are for stainless steel tubing. The heater design that provides improved temperature control and uniformity. The preset temperature setpoint is microprocessor controlled through an integral electronic controller within the power cord. the addition of a no-arc relay technique significantly extends the relay life in high current heaters. This new control method allows you to heat longer sections of tubing with fewer heaters.  www.mksinst.com  HPS Series 48 Heaters  The MKS Instruments-HPS Products' Series 48 heaters have been designed for safety, flexibility, power conservation, and advanced communications. The new design provides greater temperature control, improved thermal uniformity, increased performance, and further decreases system downtime. The heaters are UL listed and CE marked for thermal and electrical safety. Series 48 heaters are designed to deliver adequate heat in case supplied voltage is less than nominal, and to more appropriately distribute that heat to promote a uniform thermal profile. Extensive design and testing have been performed to ensure optimum performance. The heaters’ molded shapes conform to the tubing, minimizing gaps and subsequent heat loss. Using a patented process, silicone foam insulation is bonded to the outside of a reinforced silicone heater mat, resulting in external temperatures that are safe for human contact and meet OSHA safety requirements. The Series 48 heaters feature an Integrated Temp-erature Controller that provides unsurpassed thermal control. The controller has three optional plug and play display and communications modules which provide a user-friendly interface for adjusting control parameters. The controller features two microprocessor controlled relays, a safety relay for over-temperature protection and a no-arc relay for power switching. Thermal sensing is achieved via heater-embedded thermocouple feedback. The high-limit safety circuitry eliminates the need for a thermal fuse, thereby eliminating the need for heater replacement due to a single over-temperature event. This significantly reduces downtime potential and the need to stock replacement heaters. MKS Instruments, Inc. Wilmington, MA www.mksinst.com Contact: MKS HPS Applications Engineering Tel: 1-800-227-8766 (USA) or 1-978-284-4000 (worldwide) E-mail:  mks@mksinst.com Cryo Chambers  MTM provides cryogenic equipment in support of basic energy research, high energy physics and nuclear physics facilities that explore the fundamentals of matter. MTM also p r o v i d e s c r y o g e n i c equipment to OEM’s for i n d u s t r i a l applications. C r y o g e n i c p r o d u c t s include custom cryogenic systems, cryostats, custom Dewars, helium refrigerator/liquefier equipment, coil wound and custom heat exchangers and cryogenic transfer lines. Custom designed to a performance specification or build-to-print, MTM will provide the cryogenic products to meet or exceed your needs. Products include custom cryostats and cryogenic storage Dewar’s, cold box fabrication, coil wound heat exchangers, vacuum chambers for all applications, including UHV, ASME pressure vessels, precision machining of parts and welded assemblies, as well as custom fabrication applications, and abrasive water jet cutting services. Meyer Tool & Manufacturing, Inc. Oak Lawn, IL Tel: 1-708-425-9080 Model 3500 Point-of-Use (POU) Thermoelectric Temperature Control for Plasma Etch (Chiller)  Noah Precision, LLC’s model 3500 point-of-use thermoelectric temperature control systems are the ideal solutions whenever their lower-power Model 3300 systems do not have adequate cooling capacity for more rigorous applications. Use the 3500 where the process temperature requirements are more demanding—very low operating temperatures or heavy sustained heat loads. Model 3500 systems are often used for multiple chamber walls and/or wafer chucks where true independent temperature control is not required. By doubling the number of thermoelectric chips in the Model 3300 control module, Model 3500 systems have double the cooling capacity. While significantly increasing performance over Model 3300 systems, Model 3500 systems preserve the small footprint and high reliability of Model 3300 systems. If your application puts rigorous demands on wafer temperature control, Model 3500 systems are the answer. The 3500 systems have dynamic cooling for wafer temperature stability, frame-integrated mounting for small footprint, high reliability with solid-state design, high MTBF, low cost of ownership and are environmentally safe. Noah Precision, LLC Vancouver, WA Tel: 1-408-362-2107 CryoPlex Dual 10 System