Gas Delivery & Diagnostics
June. '08 Digital Edition
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Vacuum Gauges
Compiled by Terrence Thompson, Contributing Editor
This annual Vacuum Technology & Coating product showcase highlights vacuum gauges used in vacuum-based production, R&D and other applications. When you absolutely depend upon vacuum processes, knowing the precise pressure is essential.
Vacuum gauges determine precisely what vacuum pressure exists in specific applications. The many manufacturers and distributors of vacuum gauges, as well as the technical societies and trade associations addressing vacuum technologies, provide very comprehensive reference materials for potential buyers. There are many excellent books on vacuum topics although few are recent since the fundamentals are well understood by the vacuum gauge suppliers and many of their customers. We encourage you to indulge in the detailed technology descriptions that are available, many free direct from the manufacturers.
Many Choices
Why are there so many types and models of vacuum gauges? Because gauge manufacturers comprehensively respond to market demands. The representative models shown here all are commercially viable instruments, each with solid reasons for being used in appropriate applications. Prices vary, of course, since the intended applications impact the ruggedness required and therefore the cost to build it as well as the selling price. Selecting a vacuum gauge is more challenging than some might think.
Visit any vacuum gauge company’s website and you will find either a wealth of information to peruse instantly, download or have sent to you if you prefer hard copy references. And it’s well worth registering at the sites since some of the product and vacuum technology information that is mailed to you will be worth keeping in a prominent place on your bookshelf for years.
Product Descriptions
In the following product descriptions, vendors make legitimate distinctions to focus on specific intended applications so direct comparisons may be difficult. Visit Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
Adixen 2000 Series Vacuum Gauges
Alcatel Vacuum Products, Inc. has developed a new line of vacuum  instrumentation, the Adixen 2000 series of vacuum gauges. These instruments are accurate, affordable, easy to specify, and easy to use. These are intelligent gauges that can be used either stand alone or with a panel mount controller. Stand alone, they can be supplied with 15 to 30 VDC and return a 0 to 10V or RS485 output. In addition, set points are available directly on the gauge head. All sensors in this series use the same pin outs on a D sub 9 pin connector, so the wiring is easy. Alternatively, an Adixen ACS2000 single channel or ACM2000 3 channel controller can be used to display the pressures and power the gauges. These controllers come standard with 2 setpoints per channel, 0 to 10v outputs, and RS232 communication. Any gauge can be plugged into either controller and the controller will automatically recognize the gauge type and correctly display the pressure. The 2000 gauge series includes hot cathode ion gauges, cold cathode ion gauges, Pirani gauges and capacitance manometers and are capable of pressure measurements from atmosphere to 5×10-10 mbar. The gauges and controllers can give you more than just a simple pressure measurement, they can drive a production process or record a pressure trend. These gauges are appropriate for use in food packaging, cathode ray tube manufacturing, DVD production, cutting-edge electron microscopes, particle accelerators, semiconductor and almost all high vacuum applications. Product ranges areAP 2004 Pirani for 5×10-4 Torr toATM,ACC 2009 Cold Cathode/Pirani for 5×10-9 to ATM, ACH 2010 Hot Cathode/Crystal for 5×10-10 to ATM, ASD 2000 Capacitance Diaphragm for 5 ranges from ATM to 0.1 mTorr, ACS 2000 Single Gauge Controller, and ACM 2000 Three Gauge Controller. www.adixen-usa.com
ACC 2010 Hot Cathode/Crystal Gauge
Alcatel Vacuum Products, Inc. has developed the ACH 2010  Hot Cathode/Crystal vacuum gauge covering the range of 5×10-10 to atmospheric pressure. Using the combination of hot cathode in conjunction with a crystal gauge the ACH 2010 delivers pressure measurement with a single output to span the entire range between 5×10-1 and ATM pressure. The automatic range switching feature practically eliminates burning of the filament due to accidental venting. It is available in 2 versions, with an easy RS-485 protocol, or 0 to 10v output. The AHC 2010 gauge is very easy to use, it features a push button span adjustment so there are no potentiometers to ‘tweak’. It can be used stand alone, just supply it with 15 to 30VDC and get a 0 to 10v output signal or RS-485 digital communication, and two set points come standard on the gauge head. Or use the gauge with an Adixen ACS2000 single gauge or ACM2000 three-gauge controller to display the pressure. www.adixen-usa.com
ACS 2000 Single Channel Controller and ACM 2000 3 Channel Controller
Alcatel’s new ACS2000 single channel gauge controller and ACM2000 3  channel gauge controllers are extremely easy to specify and use. Either controller can be used with any of the Adixen 2000 series gauges, the controller will automatically recognize the gauge and display the proper pressure. There is no complicated part number to configure as they come standard with all popular features: Torr, mBar or Pascal units, RS-232 interface, 2 set points per channel, 0 to 10v output per channel, and can be powered by 220 or 110VAC. In addition, all gauges use the same type of cable, a straight through DB-9, so there is no complicated array of cables to wade through. These controllers can even be used with the Adixen 1000 series gauges (or visa versa) with a simple adapter, all at an affordable price. The 3-channel controller is very advanced. It can display any combination of Adixen 2000 series gauges, including capacitance gauges, in combination with ion or Pirani gauges, and can also display a graphical trend of the pressure signal over time, a very valuable feature for monitoring system performance, pump down times or troubleshooting leaks or out gassing.
Alcatel Vacuum Products, Inc.
Adixen Brand Name Hingham, MA
www.adixen-usa.com
Contact: PaulYoung
Te: 1- 781-331-4200
E-mail: inquiry@adixen-usa.com or Paul.Young@adixen-usa.com
TIC Instrument Controller, Now with Six-Gauge and Capacitance Manometer Capability
The Edwards TIC instrument controller is a compact instrument  controller with a large clear graphical display, an intuitive user interface and serial communications providing full remote control. It is supplied with a Windows™ PC program which provides a comprehensive data logging ability, and enables full setup and control from a PC using the RS232 interfaces as standard. The controller supports and automatically recognizes vacuum gauges from the Edwards range, with coverage from 2000 to 2 × 10-11 mbar. The TIC is available in three-channel, six-channel and six-channel capacitance manometer capable versions. When combined with the optional external relay box that allows for control of six 250 VAC 5 amp changeover relays, the TIC instrument controller provides for flexible operation of a wide range of vacuum system measurement and control configurations. Additional features include: direct pressure readout of common gasses (N2, He, Ar, CO2, Kr & Ne) without conversion factors: up to six 0 to 10 V buffered analogue outputs; user-configurable display options including four-character alphanumeric name for each channel; option to display one, three, or six channels simultaneously; and ability to select gauge order when cycling through the display. www.edwardsvacuum.com
ADC – Active Digital Controller
The Edwards Active Digital Controller (ADC) is a  compact, single gauge controller and display. It features a bright LED display and simple push-button controls. The ADC automatically recognizes compatible Edwards gauges, loads the appropriate look-up table and displays the pressure in commonly used vacuum units. When combined with a suitable gauge, such as the Edwards APGX-H Convection Pirani or Wide Range Gauge (WRG), the ADC represents a cost effective means of monitoring and controlling process vacuum in a broad range of applications. An enhanced version of the ADC is available which can accept two compatible Edwards gauges of the same type. It also has two 48 V dc relays rated at 1 amp for simple process control, and an RS232 interface for communication with a computer or PLC. www.edwardsvacuum.com
WRG – Wide Range Gauge
The Edwards WRG family offers the capability of  single port pressure measurement in the range atmosphere to 10-9 mbar with a linear output. It’s a compact solution, halving the space and connectivity hardware requirement. The WRG has many features including push-button calibration and set point controls and comprehensive diagnostics. The WRG is a cost-effective vacuum management solution when used either with a Edwards controller or directly integrated into the system controls.
Edwards Vacuum
Wilmington, MA
www.edwardsvacuum.com
Tel: 1-800-848-9800
E-mail: info@edwardsvacuum.com
B-RAX 3000 Rack-Mount Vacuum Gauge Controller
InstruTech has introduced its new rack mount vacuum gauge  Controller dubbed the B-RAX 3000. The B-RAX 3000 is capable of operating one InstruTech Ionization gauge and two Convection gauges providing a measurement range from 1 ×10-9 Torr to atmosphere. The B-RAX vacuum gauge Controller uses a different approach to traditional full range vacuum measurement practices. This results in significant cost savings for the user. The Electrometer for the Ionization gauge is built in to the InstruTech’s IGM-400 Ionization gauge module instead of the Controller itself. This allows the B-RAX to be offered as a compact, low heat generating and low cost multigauge vacuum gauge Controller. It is offered with three independent front panel pressure measurement displays as well as three set point relays for process control. The Controller can also accept and display pressures using an alternate analog input from other types of vacuum gauges such as a capacitance diaphragm. The setup and programming is provided via a front panel setup screen and push buttons. It is offered as a space saving half rack design, bench top or instrument panel. It can be also bemounted as a full rack or dual rack using rack panels. www.instrutechinc.com
IGM-402 “Hornet” Miniature Ionization Vacuum Gauge with Dual Convection
InstruTech’s new miniature Ionization vacuum gauge module, the  IGM402, is capable of operating two convection gauges simultaneously. Dubbed the “Hornet,” the IGM-402 is said to be the first modular Ionization gauge of its kind with an onboard Controller capable of operating two convection gauges at the same time. The IGM-402 can combine the vacuum measurement from the Ionization gauge and one of the convection gauges to provide a full range vacuum measurement from 1 × 10-9 to atmosphere, or simply operate the Ion gauge and two convection gauges as individual gauges. User has the choice to display all three measurements in one screen or auto cycle display from one gauge to the next. The IGM402 is a rugged metal Ionization gauge with Dual Filaments. It incorporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings are not subject to temperature drift. The IGM-402 is offered with an extremely bright yellow, crisp OLED display, three log-linear analog outputs, three setpoint relays and an RS485 interface. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. The user can turn on/off the filaments, Degas and change emission current using three different modes of operation, including front panel push buttons, Digital inputs or RS-485 commands. www.instrutechinc.com
“Hornet” Miniature Ionization Vacuum Gauge Module
InstruTech’s new miniature hot filament Ionization vacuum gauge  module the IGM401, dubbed the “Hornet” for measuring pressures from 1×10-9 to 5×10-2 Torr. The IGM401 is a rugged metal Ionization gauge with Dual Filaments. It incorporates numerous design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that the readings are not subject to temperature drift. The IGM-401 is offered with a extremely bright, crisp OLED display, one log-linear analog output, one setpoint relay and an RS485 interface. The display menu provides the user the choice to select from 16 common gases without having to apply manual correction factors. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. In addition to high vacuum measurements, a new option now available with the Hornet allows for connection of two convection vacuum gauges to the Hornet. The Hornet will operate and provide measurements from two external convection gauges without the need of another controller. The IGM gauge is also the first direct dropin plug-compatible replacement for the Granville-Phillips Micro-Ion® gauge, which has been in widespread use for many years. (Micro-Ion® is a registered trademark of Brooks Automation/Granville Phillips.)
InstruTech, Inc.
Longmont, CO
www.instrutechinc.com
Tel: 1-303-651-0551
E-mail: info@instrutechinc.com
Portable Thermocouple Gauging (KJL500TC)
Kurt J. Lesker Company’s portable thermocouple gauge is  used to monitor the (vacuum) pressures of different applications at different locations, for example, banks of heat treat furnaces, a series of crystal growers, or LN2 storage tanks. The large 3.5 digit LCD display switches between 1 to 1000 mTorr (for KJL-6000 and DV-6 gauge tubes) and 1×10-2 Torr to 20 Torr (for the DV-4 gauge tube). The controller is powered by a 9V alkaline battery (supplied). Other power options include a lithium cell and an AC adapter. The controller connects to the (premounted) gauge tube by a 5 foot coiled cable. The complete package (part number KJL500TC) includes: display, coiled cable, alkaline battery, and KJL-6000 gauge tube in a rugged plastic case. www.lesker.com
Hot Filament Ion Gauge Tubes
Kurt J. Lesker Company stocks a comprehensive selection of replacement  ion gauge tubes in tubulated envelope and nude designs that match both our controllers and those sold by competitors. We have tubes: in Pyrex, Nonex, and 7052 glasses; a range of envelope sizes; single tungsten and single or double thoriated iridium filaments; terminated in glass or metal tubes; or with various CF or KF flanges. We can cross reference almost any standard ion gauge tube and can provide custom or modified ion gauge tubes when required. www.lesker.com
True Digital Gauges by Lesker
The Kurt J. Lesker line of True Digital Gauges offers a  compact and modular alternative to the error-prone world of analog pressure measurement. Just four gauges – Piezo, Piezo/Pirani, Pirani and Pirani/ Bayard-Alpert – cover the entire pressure range from 1500 Torr to 7.5 × 10-9 Torr. The True digital nature of the gauges permit data to be read directly into a PLC or PC with no signal conversions being required. With the choice of two serial interfaces, RS 232 or RS 485, the digital data signals guarantee reliable data transmission using industry standard low cost cables. Profibus, DeviceNet, LON Works and CC converters are also available. www.lesker.com
Wide Range Gauge Tubes & Controls for 1500 Torr to 10-3 Torr
The Kurt J. Lesker “Wide Range” vacuum gauge covers a dynamic range  of over 10-6 in the higher end of the vacuum range by integrating two sensors into one housing: a fast response diaphragm manometer, for accurate measurements between 1500 and 2 Torr; and a low temperature (125°C) Pirani gauge, for pressures between 2 Torr and 1 mTorr. The controller automatically selects the appropriate sensor as the pressure crosses the boundary value. This gauge is built to CSA requirements and is ideal for backfill operations such as lamp manufacturing. All controllers and indicators are shipped with a 10-foot sensor cable and a 6-foot line cord. www.lesker.com
Pirani Gauge Tubes & Controls for 20 Torr to 10-3 Torr
The Kurt J. Lesker Pirani gauges have many operational  advantages over thermocouple gauges and competitive Piranis. The platinum alloy element operates at approximately 100°C vs. 300°C of a thermocouple gauge’s filament, significantly reducing instabilities induced by carbonized oil vapors. The lower operating temperature increases the thermal stability, allowing the operator to use a unique temperature compensation circuit that reduces thermal drift to a very low level. The compensation circuit and factory-matched sensors/cables allow any gauge controller to operate any gauge tube without recalibration. Since gold is not used in the sensor, it is unaffected by hydrocarbon or mercury vapors. Response time is 0.3 seconds, or approximately 10 times faster than T/C gauges. Dynamic range approaches 10,000 for pressure measurement (compared to 1,000 for thermocouples). In fact, the pressure range covered by our Piranis is 20 Torr to 1 ×10-5 Torr, which is well beyond the capabilities of any T/C gauge.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Walt See
Tel: 1-800-245-1656 or 1-412-387-9200
E-Mail: pressure@lesker.com
DV-Series Thermocouple Instrumentation
MDC’s DV-Series Thermocouple Instrumentation provides  power to, and accurate readings from our line of TGT vacuum gauge tubes. These instruments feature a precision analog-todigital converter circuitry. This circuitry combined with the unit’s microchip, measures the output from the vacuum gauge tube and displays it as a digital reading on the front of the unit. The Digital Vacuum Meter (DVM) instrument includes two convenient front panel controls. The first is an adjustment pot which can be used to set the zero of the instrument. The second is a simple push button which is used at atmospheric pressure to set span. However, the instrument comes calibrated from the factory and adjustments on new units are rarely necessary. The Digital Vacuum Controller (DVC) Instrument features the same convenient front panel controls as the DVM. Additionally, the DVC has set point adjustments with LED indicators for each and an override button that allows for set point pressure to be displayed. Both the DVM & DVC models are offered as either the 4000 Series (0-20 Torr) or the 6000 Series (0-1000 mTorr) models. Both are designed to provide years of trouble-free service and minimal maintenance. www.mdc-vacuum.com
TGT Thermocouple Gauge Tubes
MDC’s Thermocouple Gauge Tubes (TGT) are  designed to offer fast and reliable vacuum measurement and are extremely reliable vacuum measuring sensors. These devices are built with advanced precision fabrication techniques to deliver unsurpassed tube-to-tube repeatability. Rugged all-metal enclosures are compatible with a wide range of environments. TC gauge tubes are offered in a variety of end connections to accommodate easy installation.
MDC Vacuum Products Corporation
Hayward, California
www.mdc-vacuum.com
Contact: Ken Allen
Tel: 1-510-265-3500 or Toll Free 1-800-443-8817
E-mail: Kallen@mdcvacuum.com
Ethernet-enabled Pressure Manometer for Real-Time Diagnostics
MKS Instruments, Inc., a leading provider of process  control technologies for improving productivity in semiconductor and other advanced manufacturing processes, is pleased to introduce the 600C eBaratron® Capacitance Manometer, specially designed for networking with Ethernet communications devices for real-time diagnostics. The new all-digital pressure manometer incorporates MKS’s well-known Baratron capacitance technology to deliver highly accurate, reliable, stable pressure measurements to many critical semiconductor and other advanced manufacturing processes. Now equipped with Ethernet communications, the new eBaratron manometer enables diagnostics on a real-time basis during processing, allowing users to quickly and easily perform system analysis and troubleshooting, significantly improving system uptime and process repeatability. The advanced manometer can be either digitally networked or used as a standalone vacuum monitor in virtually any process or application. An embedded Internet web browser provides communications with a Windows® -based PC. With a rapid datalogger (100 ms), the 600C eBaratron manometer performs quick, detailed self-diagnostics and simplifies the troubleshooting of other system components. Models can be heated to either 45°C or 100°C for use in harsh semiconductor and display manufacturing, as well as biopharmaceutical processes. Accuracy is better than 0.10% of Reading, while full scale ranges from 1000 to 0.02 Torr give the eBaratron manometer what is said to be the widest application range of any capacitance manometer on the market. Its standard all-metal, allwelded pressure sensor has exceptional corrosion resistance from aggressive process gases. Additionally, the manometer incorporates an MKS patented particle sump to prevent process by-products from condensing on the diaphragm and causing drift. www.mksinst.com
Series 901 Plus MicroPirani/Piezo Loadlock Transducer
Designed specifically for the loadlock  environment, the HPS Series 901 Plus (901P) loadlock transducer (LLT) combines Piezo and MicroPirani sensor technologies. The combined output provides significantly higher accuracy, stability, repeatability and a faster response time than conventional thermal conductivity gauges. Functionality of three sensors in a single transducer provides space savings and a wide measurement range. Accurate absolute pressure measurement is from 1,000 to 10-5 Torr. Gas independent absolute pressure measurement is from 50 to 1,000 Torr. It has accurate atmospheric pressure reading, independent of gas type and barometric pressure changes. Fast, accurate and repeatable pressure measurements reduce process cycle times. Ease of operation is possible with analog output and digital communication. It is mountable in any position for easy installation. The MicroPirani solid state sensor is resistant to damage from air inrush or vibration and has three setpoints with fast response time for reliable process control. The 901P combines both absolute and differential pressure measurement technologies to provide superior performance and functionality. The 901P provides a patented, gas independent absolute pressure measurement from 50 to 1,000 Torr with increased accuracy over thermal conductivity sensors. Unlike traditional Pirani gauges, the element in the MicroPirani is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. As a result of the MicroPirani technology, the 901P can read pressures down to 10-5 Torr – two decades below a standard Pirani sensor. The design minimizes the effects of convection, therefore operation is possible in any position without compromising accuracy, for simplified installation. www.mksinst.com
Series 902 Absolute Piezo Transducer Compact Pressure Sensor
The MKS HPS® Low-cost sensor alternative  Compact system design has integrated electronics and sensor in one unit. Reduced process cycle time due to sensors’ fast, accurate and repeatable pressure measurements. Sensor is suitable for harsh processes due to clean, robust design and stainless steel construction Ease of operation with both analog output and digital communication Process control from setpoint relay with fast response time CE marked, compliant with EMC Directive 89/336/EEC The Series 902 has a simple modular design, high reliability, and low cost, making it attractive for a number of industries. These sectors and processes include semiconductor manufacturing, thin film coatings, freeze drying, lamps and light bulb production, medical devices, automotive and aerospace. Functions for the Series 902 include atmospheric and vacuum sensing, measuring fore and roughing pressures, warning alarm, monitoring backfill and venting and a system control relay for multi-sensor systems or system remote the control computer. The HPS Series 902 Piezo transducer combines the pressure measurement technology of a Piezo sensor with an integrated electronic control circuit. The 902 Piezo is an absolute direct reading sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range (10-1 to 1,000 Torr.) The robust sensor is constructed from stainless steel and aluminum, with only stainless steel exposed to the process. The construction materials and overpressure capability allow the Series 902 to be used in demanding environments. The digital communication allow for all adjustments and monitoring to be delivered real-time, via a host computer. The 902 includes RS485 communication as a standard feature. Analog output is also standard with a choice of 0 to 10 or 0 to 5 VDC linear output or logarithmic output. The analog output format is selectable via the digital communication lines. www.mksinst.com
Series 903 I-MAG™ Cold Cathode Transducer
Using the inverted magnetron design principle, the  MKS HPS® Series 903 can operate at pressures much lower than a traditional cold cathode sensor, as low as 10-10 Torr. A unique design feature to the 903 is a second feedthrough for ion collection. The ion current from the cathode contributes to a measurement reading in the 903’s dual feedthrough design, ensuring accurate reading results. Since the 903 has no filament, it is resistant to vibration damage and is unaffected by sudden inrushes of air. Its rugged design and ability to efficiently operate in harsh environments provide fast, dependable, and stable pressure measurement. Features and benefits include: wide pressure measurement range from 3.0 × 10-10 to 5.0 × 10-3 to Torr for high vacuum applications; integrated electronics for space and cost savings; linearized analog output; isolated ion collector increases sensor's resistance to effects of contamination; high voltage can be deactivated at higher pressures to lessen the potential for sensor contamination; one set point with LED status indicator is standard for process control; sensor is interchangeable without calibration; no filament to burn out for low maintenance; gas-type sensitive; and CE marked Applications. With a wide measurement range of 3 × 10-10 to 5 × 10-3 to Torr, the MKS HPS® Series 903 is well-suited for high vacuum applications, including pressure measurement of high vacuum chambers and control or startup of high vacuum systems with its standard relay set point. It is useful as a complete pressure measurement and control system or as a module in more sophisticated pressure control environments, making it especially attractive to OEM equipment manufacturers. The Series 903 is suitable for industrial, process, and analytical applications such as high-energy physics, laser production, ion implantation, mass spectrometry, or PVD. www.mksinst.com
Series 909 & 909A Digital and Analog Hot Cathode Transducer
The MKS HPS® Series 909 and 909A are  hot cathode sensors with integrated electronics. The 909 features digital communications, and a setpoint for process control, while the 909A features analog controls. Features and benefits include: wide measurement range of 10-10 to 10-2 Torr for high vacuum process monitoring; pressure-controlled EB degas for automated degas without filament shut down; ease of operation with both analog and RS485 digital communication; reliable and repeatable pressure measurement for process stability; and CE marked, compliant with EMC Directive 89/336/EEC and Low Voltage Directive 73/23/EEC. The MKS HPS® Series 909 and 909A Mini Ion Transducers are the ideal measurement tools for high vacuum applications, including pressure measurement of high vacuum chambers and control or start-up of high vacuum systems. They can be used to measure base pressure, and the pressure of back-filled gases. Applications include semiconductor processing and analytical systems. www.mksinst.com
Series 910 DUALTRANS™ Micropirani/Absolute Piezo Transducer
The MKS HPS® Series 910 is a dual  sensor transducer, combining the pressure measurement technology of Pirani and Piezo with an integrated electronic control circuit. The transducer measurement range is 10-5 to 1,500 Torr. The Piezo is a direct-reading absolute pressure sensor, allowing the measurement to be gas independent. The sensor includes a unique temperature compensation, allowing for high accuracy over a wide measurement range. The Piezo will measure from 10-1 to 1,500 Torr. The MicroPirani performs an autozero function to the Piezo when pressure is below 10-2 Torr. Unlike traditional Pirani gauges, the element in the MicroPirani™ is made of a one millimeter square silicon chip, allowing the measurements to be made in a very small volume. A traditional Pirani sensor has a measuring range from 10-3 to about 100 Torr, rapidly losing sensitivity above 10 Torr. Because the size of the sensing portion of the MicroPirani™ is so small, it has a range down to 10-5 Torr. The design minimizes the effects of convection, so operation is possible in any position without compromising accuracy, for simplified installation. The digital communication allows for all adjustments and monitoring to be delivered real-time, via a host computer. The 910 includes RS485 or RS232 communication as a standard feature.
MKS Instruments, Inc.
Andover, MA
www.mksinst.com
Contact: MKS Applications Engineering
Tel: 1-800-227-8766 (USA only) or 1-978-284-4000 (Worldwide)
E-mail: mks@mksinst.com
GT-430 Thermistor Digital Display Gauge with Trend Sensing™ technology
The new Myers Vacuum 430 THERMISTOR TYPE GAUGE  provides a digital readout from atmosphere to 1 ×10-3 Torr and indicates which pressure is going. Myers Vacuum has designed a unique feature into their thermistor gauge that allows the user to see which direction pressure is going. No more trying to watch digits flash and getting mixed up when the gauge switches scales. This will increase the operator’s awareness and help them make faster, more reliable decisions. The thermistor sensor, which uses an encapsulated resistor bead that changes resistance as it is heated, is by design more rugged than a thermocouple sensor that uses fine wires joined to form a bead. Trend sensing™ also enhances the vacuum leak detection function by increasing the sensitivity at the desired pressure range so that the operator can use solvent to locate vacuum leaks. www.myers-vacuum.com
GTC-390 Thermocouple Vacuum Gauge
The Myers Vacuum GTC-390 Thermocouple Vacuum Gauge is a dual station  thermal conductivity type controller housed in a DIN-style case. The unit uses the rugged and proven GTC-036 sensor. Two 40-segment bar graphs simultaneously display a pressure range of 1 mTorr to 5000 mTorr. GTC 390 thermocouple bar graph gauge provides simultaneous reading and comparison of two pressures. Each station includes a relay set point that can be set within the range of the gauge. The relay set point for each station may be viewed by pressing the “View” buttons on the front panel. Front panel potentiometers allow set point adjustment. An LED displays the output status of each relay control output.
Myers Vacuum Repair Services, Inc.
Kittanning, PA
www.myers-vacuum.com
Contact: David Casilio
Tel: 1-724-545-8331
E-mail: dcasilio@myers-vacuum.com
CMR/CCR Vacuum Gauges
Pfeiffer Vacuum’s ActiveLine CMR/CCR capacitive transmitters  offer compact and rugged vacuum measurement to cover applications from 10-5 to 1100 mbar. The CMR/CCR vacuum gauges feature a new ceramic technology sensor, which prevents memory effect, provides greater resistance to corrosive gases, excellent temperature compensation and better wear properties. These transmitters operate independently of the type of gas that is being employed. The output signal, which ranges from 0 to 10 volts, features an integral error signal, which guarantees secure and reliable measurement. The robust ceramic diaphragm design is less sensitive to process induced effects and can withstand millions of atmosphere cycles and bursts. Innovative signal processing produces an optimized measurement limit down to the smallest possible measured value of 10-5 mbar with high stability of the measured values. The CMR/CCR gauges can be operated with any Pfeiffer Vacuum ActiveLine controller and can be used as drop-in replacement for older gauges. www.pfeiffer-vacuum.com
Radioactive and Electromagnetic Compatible Vacuum Gauges
Pfeiffer Vacuum’s ModulLine vacuum gauges are tolerant of  electromagnetic fields and radioactivity making them ideal for use in accelerators, UHV, high temperature and areas with radiation. They feature a rugged, proven design with automatic switchover from Pirani to cold cathode sensor. ModulLine is available with metal-sealed sensors for UHV applications. Designed for exceptional interface and control flexibility, ModulLine™ permits operation with remote electronics from the gauge head and has four different interface options including RS232, RS485, and Profibus. www.pfeiffer-vacuum.com
DigiLine™ Digital Vacuum Gauges
Pfeiffer Vacuum, Inc. offers a complete line of digital vacuum  gauges to meet the most demanding pressure measurement and process control requirements. The DigiLine digital gauge line features the most inclusive connectivity capabilities including RS 232, RS 485, Profibus, and Device Net compatibility. By combining rough and high vacuum gauge technologies into single, compact packages, Pfeiffer Vacuum offers the unique ability to easily measure a wide range of pressures from atmosphere to 1.0E-9 Torr. DigiLine gauges contain integrated electronics, presenting the ability to monitor vacuum pressure without the use of a controller. For additional control flexibility, Pfeiffer also offers a line of DigiLine controllers, providing control relays, simple calibration, and a digital readout of the vacuum level. DigiLine is available in Piezo, Pirani, Piezo/Pirani, or Bayard-Alpert/Pirani digital gauges.
Pfeiffer Vacuum Inc
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-603-578-6500
E-mail: gauges@pfeiffer-vacuum.com
PG105U All-Metal, Convection-Enhanced Pirani Gauge
The Stanford Research Systems PG105U is an all-metal, convection-enhanced Pirani gauge, featuring a knife-edge copper gasket seal. The gauge has a bakeout range from 110 °C to 250 °C allowing complete compatibility with UHV environments. Its measurement range is 1.0 × 10-4 to 1000 Torr. The materials exposed to vacuum are stainless steel, nickel “52” alloy, glass-alumina ceramic, gold and copper. The sensor is gold-plated tungsten with sensor temperature (nominal) of 120°C. Reproducibility is 5 % at constant temperature and bakeout temperature is 250°C (non-operating). Operating temperature is 0°C to 50°C with temperature compensation in the 10°C to 40°C range. The gauge tube axis must be horizontal for pressure measurements above 1 Torr. Connection standard is 0.5 inch diameter side tube terminated in 1 /8” NPT thread. Options include NW16F, NW25KF, 1.33” CF, and 2.75" CF, and 1 /4” VCR. It is not intended for use in explosive atmospheres, do not use in the presence of fluorine and mercury containing vapors. The calibration gases are N2/air with an internal volume of 28 cm3 .
Stanford Research Systems, Inc.
Sunnyvale, CA
www.thinkSRS.com
Tel: 1-408-744-9040
E-mail: info@thinkSRS.com
8-Decade Vacuum Gauge
The ULVAC OCTIE wide-range vacuum gauge is a highly accurate and  corrosion resistant single gauge that measures eight decades of pressure, from atmosphere to 10-3 Pa (10-5 mbar). This wide range of pressure measurement and corrosion resistance makes the OCTIE an excellent low cost single gauge for monitoring process vacuum levels in etching systems, sputtering systems, and high vacuum evaporators. The gauge head is compatible with conventional capacitance manometers and connectors, making drop-in substitution quick and easy. ULVAC’s OCTIE uses a thermocouple-based measurement principal, which yields high accuracy and precision over broad pressure ranges, even when cycling repeatedly from atmosphere to vacuum. Insensitive to thermal fluctuations, the sensor head can be baked and operated normally at temperatures up to 150°C. OCTIE is available with a choice of flange styles, transmitter electronics, and display units.
ULVAC Technologies, Inc.
Methuen, MA 01844
www.ulvac.com
Tel: 1-978-686-7550
sales@ulvac.com
VAP5 Pirani Vacuum Gauge
The VACUUBRAND® VAP5 is a  fully electronic, versatile vacuum gauge using Pirani thermal conductivity for measurements in the range from atmospheric pressure down to 10-3 mbar. The combined digital and analog display provides both precise readouts and quick trend detection. It can be used as a desktop unit, or can be mounted to a support rod. The VAP5 is suitable for many general purpose lab applications in the fine vacuum range, and is suitable for use with rotary vane vacuum pumps. Additional information available at www.vacuubrand.com
Absolute Pressure Vacuum Gauge
The new VACUUBRAND® DCP3000 is a fully  electronic absolute pressure vacuum gauge for rough and fine vacuum (1080 – 0.1 mbar). The external capacitive pressure gauge head measures gas independently, is very corrosion resistant, and has an outstanding measuring accuracy and long-term stability. A combined digital and analog display provides both accurate results and quick trend indication. The RS232 port allows process validation for GLP/GMP/ISO regulations. Separate vent and on/off buttons provide ready access, while a “turn-and-push” jogwheel and menu-driven software allows easy control of all functions. VACUU•BUS™ “plug-and-play” technology allows the addition of up to three additional pressure transducers, or two additional transducers and an external vent valve, for monitoring of up to four different pressures from a single display. The DCP3000 is suitable for many general purpose lab applications.
VACUUBRAND, Inc.
www.vacuubrand.com and www.vacuubrand.com/en-Home.php
Contact: Peter G. Coffey
Tel: 1-860-767-5341 ext.118
E-mail: pcoffey@vacuubrand.net
Pirani, Thermocouple and Diaphragm Indicators and Dual Set Point Control Instruments
VRL's Pirani, thermocouple, and diaphragm indicators and dual set  point control instruments for pressures from 10-5 to 1500 Torr. Gauges can be provided with displays and analog outputs reading directly in Pascal or mBar. Inexpensive vacuum switch instruments are also available with Diaphragm or Pirani sensors with any style and size of flange. The Wide Range Diaphragm Manometer has a fast response sensor provides high accuracy measurements that are unaffected by gas composition. The Diaphragm Manometers for 0.5 to 1200 Torr and 1 to 1500 Torr measurements have stainless steel or pure silicon diaphragms. Response time is less than 400 milliseconds full scale. The High Vacuum Pirani Gauges in ranges from 10–5 to 20 Torr. Easy to read backlit displays. Linear 0 to 2.0 VDC output, 4 to 20 mA output optional. The Convection Gauges have digital and analog display models for 1 mTorr to atmosphere. Single sensor covers entire range. The Thermocouple Gauges are Varian 531 and Hastings DV-6 replacements. No Plastic is used. Stainless steel is standard. Indicators and controllers for 1 to 2000 mTorr and 1 to 1000 mTorr.
Vacuum Research Corp.
Pittsburgh, PA
www.vacuumresearch.com
Contact: John Hartnett
Tel: 1-800-426-9340 or 1-412-261-7630
E-mail: VRL@vacuumresearch.com
ConvecTorr Active Vacuum Gauge
The Varian ConvecTorr Active Vacuum Gauge is a self-contained rough-vacuum  gauge that needs no separate controller. It integrates a Varian ConvecTorr transducer with controller electronics into one compact housing. This stand-alone package is ideal for applications requiring minimum use of space or direct integration with PLCs. The ConvecTorr technology produces a wider range of pressure measurement, 1×10-3 Torr to atmospheric pressure, with faster response than thermocouple gauges. A digital display of pressure and digital serial communications are options. The compact design results in savings on cost and space and it has remote calibration. The set point for process control is digitally adjusted. The pressure range: 1×10-3 Torr to atmospheric pressure and analog pressure output is 1 volt per decade, log-linear. Power input range is 20V DC to 27V DC. Electrical connection is through a 9-pin D-subminiature connector. The vacuum connection is either a NW16 or NW25 KF flange. On-board digital pressure readout is available as is RS-232/RS-485 digital communications. The power supply/signal breakout box is available separately. www.varianinc.com
CT-100 Active Vacuum Gauge
Varian’s CT-100 Active Vacuum Gauge delivers Pirani gauge  performance, at lower cost, in a simple, durable design. Piranilike rapid response time of 0.2 seconds makes the CT-100 ideal for high productivity applications where process steps are critically time-dependent. Rapid response time enables fast-acting valves to protect turbo pumps from sudden inrush of gas. Two user-defined set points per gauge can trigger multiple process steps, alarms, or other pressure-related conditions. A selectable pressure range offers accurate and repeatable readings precisely where it is most critical to the user. The CT-100 operates over the full rough pressure spectrum, 1×10-4 Torr up to 100 Torr or 20 mTorr to atmosphere. Onboard LEDs give quick visual indication of vacuum status. The robust sensing element is three times thicker than typical gauges, minimizing sensitivity to process vibration, shock, and condensables, providing longer life and higher repeatability than traditional Pirani gauges. A single point calibration feature maintains gauge accuracy over time. The CT-100 is ideal for mass spectrometers and surface analysis equipment. For load locks, rapid 0.2-second response time and excellent repeatability make the CT-100 the ideal choice. Vacuum connection is a 1 /8-inch NPT threaded pipe (KF adapter may be ordered separately) or a welded-on NW16 KF Flange. www.varianinc.com
Mini-IMG Active Vacuum Gauge
The Varian Mini-IMG Active Vacuum Gauge is based on the proven  inverted magnetron gauge, providing reliable measurement of pressures from 1×10-3 Torr down to 1×10-9 Torr, even in corrosive or dirty environments. It is self-contained, needing no separate controller. The gauge tube may be easily cleaned or replaced if necessary. Like traditional coldcathode gauges, the Mini-IMG Gauge has no hot filaments, which burn out over time. Unlike traditional cold-cathode gauge designs, the Varian Mini-IMG Gauge features fast starting, even under highvacuum conditions. The gauge can also be turned on or off remotely via a DC voltage signal. It has onboard LEDs to indicate the status of the gauge. On-board control electronics do not need an external controller. It has rugged, all stainless steel construction. No elastomers or O-rings are used in the gauge housing, which resists corrosion and dirt. The compact size saves on space and cost. Output signal is 0.5 to +8.5V DC log-linear, 1 volt per decade. Electrical connection uses a 15-pin D-subminiature connector. Vacuum connection is either a NW16 or NW25 KF flange. www.varianinc.com
Mini-B/A Active Vacuum Gauge
The Varian Mini-B/A Active Vacuum Gauge is a self-contained Bayard-Alpert  transducer that does not need a separate controller. This stand-alone package is ideal for applications requiring minimum use of space or direct integration with PLCs and digital communications. The measurement range of the Mini-B/A is 10 mTorr to 2×10-9 Torr, and the transducer can be operated remotely via analog or digital logic. The pressure reading is available from the optional on-board LED display, a one-volt- perdecade analog signal, or digitally through the optional RS-232/RS-485 interface. In addition, two SPST set points may be used for process control and easy integration with a PLC. E-beam degas is a standard feature. The small footprint results in savings on cost and space. The LED display, with digital numeric display, is available, eliminates the need for panel-mounted electronics. Remote calibration through the digital interface is fast and operator-independent. Remotely operated degassing maintains sensor performance. Power input is 24V DC nominal @ 0.5 amps with a filament choice of tungsten or thoria-coated iridium. Vacuum connection is either NW16 or NW25 KF flange. Electrical connection uses a 15-pin D-subminiature connector. The power supply/signal breakout box may be ordered separately.
Varian, Inc., Vacuum Technologies
Lexington, MA
www.varianinc.com
Contact: Walter Stevenson Palmer (Steve), Manager, Marketing and Merchandising, North America Vacuum Technologies
Tel: 1-781-860-5426
E-mail: steve.palmer@varianinc.com
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Vacuum Technology & Coating