Hingham, MA

 STP, Magnetically Levitated Pumps BOC Edwards offers the STP turbomolecular pump range with a pumping performance range from 300 to 3500 liters per second. The use of magnetic bearings ensures virtually no risk of vacuum contamination; very low vibrations levels and the magnetic bearings do not require maintenance. BOC Edwards STP turbo pumps offer optimal performance and reliability which allows for a three year warranty for most general vacuum applications. Our development team in Yachiyo-City, Japan has over 400 cumulative man-years of experience in the design and manufacture of high reliability, high speed rotating equipment. There are over 70,000 STP pumps installed worldwide, the majority of them demonstrating exceptional levels of reliability and performance with low running costs.www.bocedwards.com  HT20B™ Diffusion Pump Added to Vapor Pump Technology Lineup BOC Edwards has launched the new HT20B™ diffusion pump, for light and heavy-duty industrial applications. The robust HT20B diffusion pump provides consistent, long-term performance and users will benefit from the highest throughput (up to 19 mbar ls-1for nitrogen) of any comparably sized pump. The new pump gives a high pumping speed of up to 8000 ls-1 and is ideal for processes involving large quantities of gases, such as furnaces and coaters. The HT20B diffusion pump has a machined, cast aluminum interior for exceptional pumping stability and a stainless steel body to prevent corrosion and ensure process cleanliness. It is simple to operate and requires minimum maintenance: the heaters and oil can be changed easily. The design of the interior and boiler assembly enables the pump's performance and ultimate vacuum to be maintained between oil changes. It features a large sight glass to allow operators to easily check the oil level, without disturbing the integrity of the vacuum system, whether the pump is running or not. It also has three power modes enabling the power consumption to be reduced when the pump is on standby or lightly loaded, and rapidly switched to full power for processing. As a result, users are able to reduce their running costs.  Tel: 1-800-848-9800   BLDC Diaphragm Pump Features High Suction Speed in Low Vacuum KNF's latest oil-free diaphragm pump, the Model N940.5APP features excellent suction speed at low absolute pressures in a compact, 4-stage package. A series of technical innovations include a diaphragm stabilization system, adjustable flow rate via potentiometer or external controller, and multiple-voltage power capability. Rated at 50 LPM free-flow, it can achieve 1.5 mbar absolute end vacuum, with exceptional flow at lower pressures. This pump is very quiet and cool running, utilizing either an IP-54 AC motor, or an efficient brushless DC motor that features remote speed control capability. This allows instrumentation to determine pump performance based on demand or other criterion. A high level of gastightness is achieved, approximately 6 × 10-3 mbar × L/s. Typical applications are in the fields of analytical chemistry, medicine and production technologies. The N940 also supports turbomolecular systems as roughing pumps.   Compact BLDC Oil-Free Diaphragm Pump for Backing  This modified version of KNF's popular, oil-free N84.4ANDC miniature backing pump is an example of the customizing capabilities of the company. An aerospace customer wanted an extremely reliable version of KNF's standard 4-stage pump for use in outer space. KNF's own heavy-duty, speed-controlled brushless DC motor, driven by their BLDC motor controller, was selected to provide the desired lifetime and low EMI/RFI. The controller's logic controls were integrated into the customer's instrument control system. Rugged and leaktight 316 stainless steel tubing and fittings were chosen to replace the standard flexible tubing. The standard performance rating of 4.8 LPM freeflow, generating an end vacuum of 2 mbar/1.5 Torr was specified. This pump is available with a variety of material and motor options for use as a backing pump in compact, turbomolecular vacuum systems.  Brushless DC Diaphragm Pump Features Controllable Performance KNF’s oil-free diaphragm pump Model N814 is designed for vacuum or pressure requirements. Combining KNF's structured diaphragm and multi-port liquidtolerant valves with an efficient brushless DC motor, the resulting package is lightweight and 25% smaller than existing units. The BLDC controller features remote speed control that allows an instrument's logic circuits to determine pump performance. The BLDC motor is compact, eliminates EMI/RFI, and has no brushes to wear, making it ideal for portable applications. This smooth-runnin pump provides 12 L/min. flowrate, achieves 23-inches Hg (180 Torr) or 30 psig pressure. Chemical resistant versions, other flowrates and motor types are available. They are ideal for portable medical instruments, analyzers or wherever performance and lowmaintenance is required.   KNF Neuberger, Inc.   Scroll Pumps  The Kurt J. Lesker Company’s Ultimate Vacuum Series (ULVAC) of Dry Scroll vacuum pumps require no sealing fluid or lubricant thereby providing a completely oil-free pumping environment. The innovative “double wrap” scroll design ensures that the pump occupies minimal space while providing a dynamically stable, low vibration and low noise solution. Overall pump performance, maintenance interval, and particulate and water vapor handling capability are remarkably improved by the use of the ballast device and unique shaft seal system. These features are standard on each pump. The Kurt J. Lesker Company offers singlestage (industrial versions for greater continuous inlet pressures and improved vapor handling) and two-stage (for improved ultimate pressures) models with pumping speeds from 3.8 cfm to 21.2 cfm and ultimate pressures as low as 7.5 milliTorr.www.lesker.com  Diaphragm Pumps The Kurt J. Lesker Company’s Ultimate Vacuum Series (ULVAC) of Dry Diaphragm vacuum pumps is an extensive line of dry diaphragm pumping solutions. Models range from tiny OEM models designed for integration into a manufactured tool or system, to large industrial models perfect for vacuum chuck, packaging equipment, and other manufacturing and medical solutions. The minimal maintenance, high reliability, excellent ultimate vacuum and impressive pumping speeds make our diaphragm pumps the choice solution for many dry pumping applications. Our anti-corrosive Teflon series are perfect for corrosive or organic solvent applications and are often used to back turbomolecular pumps. With pumping speeds from 0.18 cfm up to 14 cfm and ultimate pressures as low as 2 Torr, we have the dry pump solution for you.www.lesker.com   Rotary Vane Pumps  The Kurt J. Lesker Company’s Ultimate Vacuum Series (ULVAC) of Rotary Vane vacuum pumps are superior, high performance, low vibration, and low noise oil-sealed rotary vane pumps. These pumps offer premium features such as gas ballast, forced-oil supply, anti-suckback device, and low temperature operation at an economical price. Models range from pumping speeds of 1.7 cfm to 12 cfm and an ultimate pressure of 0.5 milliTorr. Equivalent corrosive-resistant designs for applications involving toxic or corrosive gases are available. Pump performance is impressive and these affordable pumps offer an excellent value for the vacuum user.www.lesker.com   LION™ Series Ion Pumps  The Kurt J. Lesker Company LION™ Series Ion Pumps are one of the most extensive ion pump offerings in the industry. Nineteen standard models range in size from 3 L/s through 800 L/s and include tall and low profile versions able to fit into just about any footprint. The standard Diode and Noble Diode elements are complemented by the Noble 30 option. The Noble 30 combines the low-cost benefits of a Diode pumping element with the noble gas capabilities of the Noble Diode. Three controllers complete the offering with RS232 as standard and the ability to control up to four pumps simultaneously at no additional cost. The KJLC pumps and controllers can even be configured to be compatible with Varian ion pumps!www.lesker.com  212, 412, 615, and 1722 Stokes Replacement Series of Pumps The Kurt J. Lesker Company's 212, 412, 615, and 1722 Stokes Replacement Series of pumps offer the performance and reliability of their Stokes® counterparts, but at a fraction of the cost. The 615 blower and 1722 booster package feature as standard a bypass valve that permits the booster to start at atmosphere. Even the internal parts are drop-in replacements and equivalents for the Stokes pumps. The performance and quality of these pumps allow KJLC to back them with a 2-year warranty. Kurt J. Lesker Company Tel: 1-412-387-9200 or 1-800-245-1656    High Vacuum Diffusion Vacuum Pumps DIP Diffusion Pumps are the successor to Oerlikon Leybold Vacuum’s highly reliable DI Diffusion Pump line. Available in pumping speeds ranging from 3,000 to 50,000 L/s with possible end vacuum to 0.75 × 10-8 Torr, these oil entrainment pumps have been manufactured by Leybold for many decades and are successfully installed in the application areas of Industrial Furnace, Metallurgy and Coating. Com-bined with oil-sealed forevacuum pumps systems and boosters, gauging, hardware, valves and electrical controls, Leybold can provide a total high vacuum system solution.   Dry Compressing Screw Vacuum Pump  Oerlikon Leybold Vacuum’s ScrewLine SP250 is the next model in the ScrewLine series of oil-free gas compression screw type vacuum pumps for use in industrial processes. The SP250 provides an environmentally friendly alternative to traditional oil-sealed piston vacuum pumps and is rated for a pumping speed of 195 cfm and 7.5 x 10-3 Torr vacuum. Along with the larger capacity SP630 rated for 371 cfm, ScrewLine can now support a wider spectrum of applications that require varying pumping speed capacities in the same industrial plant. ScrewLine major advantages include: no emissions or back oil migration; elimination of contaminated waste waters through air cooling; lower maintenance and disposal costs and less particle deflection and build-up with the screw compression stage. Also, in conjunction with Leybold’s Ruvac® line of boosters, the ScrewLine series can increase pumping speeds significantly while achieving oilfree gas compression in multiple vacuum pump stages. Typical uses for the ScrewLine are vacuum degassing applications in aerospace, automotive, coatings, drying, electrical industry, food processing, industrial furnaces / metallurgy and leak testing applications.   Turbomolecular Pumps—MAG  Oerlikon Leybold Vacuum has developed a line of Turbomolecular pumps with magnetically levitated rotors know as the MAG.DIGITAL line. The MAG.DIGITAL line provides superior vacuum performance with six models ranging in pumping speed from 830 L/s to 3200 L/s. The MAG.DIGITAL line has been optimized to meet the vigorous requirements of the Semiconductor industry, but is also commonly used in Analytical, R & D, Coating and any UHV application where pressures from 10-1 to 10-10 mbar is required. The main features of the MAG.DIGITAL line are: very low vibra- tion, high strength rotors in two versions (classic turbine, or compound design), corrosion proof coating on the rotors, automatic balancing, integrated temperature management system, purge gas valves and many more innovative features. The rugged design built into the MAG.DIGITAL line can withstand typical accidents and events that can occur in industrial environments such as shock venting, emergency shut downs, and external shocks without worry or maintenance for up to five years of continuous operation. All MAG.DIGITAL pumps are operated from one fully programmable MAG.DRIVE digital controller.   Single Stage Rotary Vane Vacuum Pumps  The Oerlikon Leybold Vacuum Sogevac series rotary vane vacuum pumps are designed to meet the requirements of general industrial vacuum applications where pumping speeds of between 11 cfm to 677 cfm and ultimate pressures up to 6 × 10-2 Torr are sufficient. Typical application areas include: central vacuum for industrial plants, industrial coating, industrial furnaces, leak detection, packaging and other general degassing applications. Sogevac features include continuous duty operation, standard automatic oil re-circulation with integral exhaust separation, NEMA rated multi-voltage dual-frequency motors, air cooling, standard anti-suckback protection valve to protect against oil migration, low vibration and simplified maintenance.   Rotary Lobe Vacuum Boosters  Oerlikon Leybold Vacuum’s RUVAC vacuum boosters have been manufactured for many decades. The dry compressor Roots principle has proven itself in many areas of vacuum technology. Combined with oil-sealed vacuum pumps such as the TRIVAC or SOGEVAC, RUVAC vacuum boosters are used to increase the pumping speed at low pressures, thus extending the operating pressure range. Additionally, RUVAC may be combined with drycompression forevacuum pumps such as Screwline where a total dry vacuum solution is desired. RUVAC vacuum boosters are manufactured in two series, both air cooled, with different motor drives. The RUVAC WA series uses a flangemounted standard three phase motor; the RUVAC WS series has a canned (rotor) motor. Each series consists of four different boosters covering carefully selected pumping speeds and are available with or without integrated bypass valve. RUVAC can be used in either vertical or horizontal position and has rugged bearings and highly efficient lubrication system enhances the boosters’ quiet running properties. RUVAC is used in almost all areas of vacuum technology and have been developed in such a way that the most diverse spectrum of requirements can be met.   Dual Stage Rotary Vane Vacuum Pump  Oerlikon Leybold Vacuum’s TRIVAC B family of twostage vacuum pumps consists of six basic models (D4/8/16/ 25/40/65B) provides pumping speeds from 3.4 to 53 cfm, with inlet pressures from atmospheric to an ultimate pressure of 0.75 × 10-4 Torr. A forced-feed oil system lubricates and seals the vanes and internal parts. Direct drive motors provide quiet and smooth operation. KF inlet and outlet ports can be quickly changed between vertical and horizontal orientations. All seals are Viton. An internal valve seals the inlet when the pump stops, protecting the vacuum pressure at the inlet. The TRIVAC family of rugged fore-vacuum pumps considered being the industrial standard provides years of continuous duty operation in many diverse industries. Pumps are made in USA.   Tel: 1-724-325-6565 CryoPlex Dual 10 System The Oxford Instruments’Austin Scientific CryoPlex Dual 10 System utilizes two CryoPlex 10 cryopumps powered by a single M600 Helium Compressor, reducing space, power and maintenance. This makes an ideal package for large chamber applications requiring multiple cryopumps. The CryoPlex Dual 10 also offers continuous pumping capabilities by alternately isolating via gate valve opposing cryopumps. The cryopumps are independently controlled with the M2200 and can be integrated into a vacuum systems PLC for seamless performance. The Dual 10 System is offered with standard inlet array configurations available as ANSI, ISO, Conflat® and full UHV. Generally considered the most efficient cryopump design the 10” ANSI / 14” OD Conflat achieves double the gas and water volume of the CP-8 cryopump, providing clean, oil free high vacuum pumping solutions. Oxford Instruments’ Austin Scientific Cryo-Plex cryopumps and compressors are fully compatible and interchangeable with the Helix Cryotorr® line of cryopumps and compressors making upgrades and repair exchanges seamless.  Model 2200 Cryopump Regeneration Control The model M2200 is the latest version of Oxford Instruments’Austin Scientific single pump automatic regeneration controller. It is a micro-processor based, fully programmable regeneration controller that takes the cryopump through a complete regeneration cycle from cold to cold. At the end of the cycle, the pump is down to temperature and ready for process. The last ten regeneration results are stored for easy analysis of pump performance. Compatibility means you can upgrade your CryoTorr or Cryo-Plex pumps to full regeneration management. The controller is compatible with both Austin Scientific CryoPlex and CTI CryoTorr models using diode temperature sensors. A single button regeneration initiation and clear digital display of cryopump condition make it ideal for laboratory or full production system environments. Single button regeneration initiation and clear digital display of cryopump condition make it ideal for laboratory or full production system environments. Remote regeneration is available to simplify interface to existing control systems. In addition to powering all the standard regeneration accessories the M2200 provides relay contacts for “At Temperature” and external interlock for hivac valve. All settings are configurable with front panel LCD display or with the remote windows based software. In addition to real time display of cryopump condition the M2200 automatically stores the last ten regeneration parameters to confirm operating performance.   M600 CE Helium Compressor  The Oxford Instruments’Austin Scientific M600 CE helium compressor has recently seen huge success in the replacement of older CTI compressors in the US. Now fully CE Marked, it is available for sale in Europe, through dedicated distributors. Contact us on  The M600 provides 60 SCFM of helium to drive up to 48 inch cryopumps, Two 10 inch cryopumps or a single 16 inch cryopump. Standard cryopump drive circuit compatible with CTI CryoTorr™ pumps and standard 1/2” aeroquip connectors for plug and play simplicity. OnBoard™ compatible drive circuits are available with CE approval soon to be completed. Helium compressors are at the heart of the cryogenic pumping system, providing ultra high purity helium to single or multiple pumps. Based on proven scroll compressor technology, Oxford Instruments’ Austin Scientific M600 air or water cooled helium compressors are highly versatile, with particular focus on ease of installation and maintenance. Prices are highly competitive, and offered with flexible configurations.   Oxford Instruments – Austin Scientific Austin, TX Tel.: 1-512-441-6893 Magnetically Levitated Turbopumps Pfeiffer Vacuum has expanded its line of magnetically levitated, maintenance-free turbopumps with integrated drive electronics to include the HiMag 3400. Like the HiMag 2400, the larger HiMag 3400 provides especially high pumping speeds, high compression and high gas throughput. It’s IP 54 protection class against environmental dust and water spray makes the HiMag 3400 especially robust and suitable for industrial applications, coating processes, research and development and the semiconductor industry, where particulate contamination, high gas loads and corrosive gases are common. Constant rotor monitoring through a system of sensors supports safe and stable operation under all conditions. The low vibration of the HiMag 3400 pump permits use in applications requiring minimum vibration in the low frequency range. The HiMag pumps integrated drive electronics eliminate the need for costly, cumbersome cabling and the need for rack space. The combination venting and sealing gas valve enables the pump to be stopped in a fraction of the time of other maglev pumps, and also affords reliable control of sealing gas when operated with corrosive or aggressive media.www.pfeiffer-vacuum.com   $4950 Dry Turbo Pumping Station  Pfeiffer Vacuum, one of the world’s leading producers of vacuum products and services, introduces a complete dry turbomolecular vacuum pump station for only $4950. This plug and play vacuum station includes a turbo and dry diaphragm pump and is available with 63 CF or 63 ISO flange sizes. The E- Station is ideal for R&D and vacuum applications that require hydrocarbonfree vacuum. Pfeiffer Vacuum’s bench-top E-Station has a high pumping speed of 60 l/s, an ultimate pressure of <10-8 mbar and is low on energy consumption. This dry vacuum unit is easy to service with a DCU that allows control and diagnostics of pumping station. The pump is always in stock and can be purchased using Visa or MasterCard. Info email: e-station@pfeiffer-vacuum.com.www.pfeiffer-vacuum.com  High Pumping Speed, Ultra-Clean Rotary Vane Pump Eliminates Oil Leaks  The Pfeiffer Vacuum single-stage UNO 30M rotary vane pump with magnetic coupling maximizes uptime performance and virtually eliminates oil leaks. The compact, high capacity delivers a pumping speed of 35m3 /hr at 60 Hz and comes standard with a single phase motor for easy electrical connection. The pump is ideal for analytical equipment manufacturers for use in LC-MS, FT-MS and ICP-MS instruments. In addition, UNO 30M is used in laboratory vacuum applications, as a backing pump for conventional turbo pumps, in pumping stations, and applications in the rough and medium vacuum range. The UNO 30M is part of the proven “M” series of rotary vane pumps, which feature a magnetic coupling that results in less pump wear. The magnetic coupling eliminates radial safety seals increasing pump life and makes the pump repairs easier if service is necessary. The pumps are hermetically sealed resulting in a negligible leak rate of <1E-5 mbar 1/sec. The integrity of the users vacuum process is protected by an integrated hydraulically controlled, high speed, high vacuum safety valve. Compact and extremely quiet in operation, the “M” series of pumps offers an excellent price-to-performance ratio.www.pfeiffer-vacuum.com  The OnTool™ Booster Pump – The First Turbo Pump that goes from Atmosphere to High Vacuum  The OnTool™ Booster pump from Pfeiffer Vacuum is the first turbo pump that goes from atmosphere to high vacuum. The OnTool™ Booster pump is ideal for clean applications that operate without any particulate matter, corrosive gases or condensation. Its applications range from load locks in the semiconductor industry to industrial coatings and research and development. In addition, this pump can be used as a standalone pump or as a backing pump for turbopumps. Until now, achieving high vacuum for many applications required a combination of high-vacuum pump and a backing pump. The OnTool™ Booster pump is a one-pump solution that eliminates the need for a backing pump. This is due to its extremely high pumping speed of 130 m3 /h and an ultimate pressure of < 1 x 10–5 mbar. The OnTool™ Booster pump has a low vibration level that prevents wafer or critical parts movement and a compact size the permits direct mounting to tool. All these features add up to a high performance vacuum pump with a low facilitation cost. Info e-Mail: boost-er@pfeiffer-vacuum.com www.pfeiffer-vacuum.com Vacuum Pump for Clean and Reliable Vacuum. The XtraDry™ dry vacuum pump is designed for all medium vacuum applications down to 10-1 mbar where there is a need to pump dry, inert and nonreactive gases. Operated as either a stand-alone or backing pump, XtraDry™ operates free of hydrocarbons and particulate matter which prevents contamination of the process or the environment. The pump’s operating characteristics make it well-suited for use in semiconductor applications such as load locks and differential seals, as well as a backing pump for turbo pumps in high vacuum systems. XtraDry™ has been designed for exceptional performance, long service life, ease of maintenance and low cost. A unique seal design prevents gas backstreaming within the pumping system, enabling gases to be pumped regardless of their molecular weight. An automatic standby mode reduces the speed of the pump by more than 30% during operation near ultimate pressure, saving energy and increasing service life.   Marathon® CP Cryopumps Sumitomo (SHI) Cryogenics of America, Inc., a manufacturer of cryopumps and a recognized leader in cryogenic technology introduces its line of high performance Marathon® CP cryopumps. Available in a wide variety of sizes and configurations, the Marathon CP cryopump provides the same superior performance in pumping speeds, gas capacity and reliability for which Marathon cryopumps are renowned. The unsurpassed reliability of the Marathon CP cryopump lies in its unique pneumatic design which provides for in-situ maintenance which provides the ability to service the cryopump while it is still on the chamber allowing for less downtime and more productivity for your chamber. Sumitomo (SHI) Cryogenics of America, Inc. product portfolio makes it possible to specify flange type, configuration and power option to provide the optimum solution to your application.www.shicryogenics.com   SHI-APD Cryogenics’ High Vacuum Cryopumps  Sumitomo (SHI) Cryogenics of America, Inc. is a world class manufacturer of cryopumps. Our cryopumps are market leaders in the vacuum coating industry. The high speed, extremely durable cryopumps are designed to meet the demanding pumping requirements of every vacuum chamber. The unequaled hydrogen capacity of APD Cryopumps allows for a reduction in the number of regenerations required annually, thereby increasing your available production time. The large refrigeration capacity enables the process engineer to cross over at higher pressures, reducing pump-down time. The unique twostage expander has only two moving parts and was developed in conjunction with an overall engineering objective aimed at customer ease of use. The result is a cryopump which can have maintenance performed without the time consuming requirement of completely removing the pump or breaking vacuum. Sumitomo (SHI) Cryogenics of America, Inc.’s product portfolio presents distinct cryopump styles that make it possible to specify flange type, configuration and power option to provide the optimum solution to your application.Sumitomo (SHI) Cryogenics of America, Inc.   Power Saving Attachment for Dry Pumps ULVAC's Eco-Shock is a clever dry pump accessory that can be connected to any existing dry pump to achieve great savings in electrical power consumption. This award winning product (Japan Vacuum IndustryAssociation/Japan Industrial Chairman's Award and Chairman's Award, Japan Machinery Federation's 23rd Award for Outstanding Environmental Machinery), is easy to install and greatly reduces dry pump power consumption without any reduction in pumping speed. For example, in EBARA and ULVAC dry pumps, Eco-Shock has reduced power consumption by up to 70%. Energy reduction is greatest in pumps that run for long periods at their ultimate vacuum level and in pumps used to evacuate non-reactive and non-corrosive gasses, such as in PVD, Sputtering or load lock chambers.www.ulvac.com   High Durability Dry Pumps for Harsh Applications  ULVAC's dry pumps are highly durable in harsh semiconductor processes such as CVD and etching. ULVAC's temperature uniformity technology and aluminum alloy construction dissipates heat evenly throughout the pump, eliminating hot or cold spots. Uniform pump temperature prevents condensable process gas by-products from building up inside the pump. The sublimates are exhausted in a gaseous state. The HR series dry pumps feature noise reduction and will withstand power interruptions of up to 500 ms duration. Five models are available from 80 to 1000 m3/hr pumping speeds at 60 Hz. The LR dry pump series is designed for light processes where uniformity of low temperature distribution is important. Approximately 70% of electric power consumption can be cut by having the Eco-Shock power saving device attached to the pump. It is the optimum pump for the evacuation of Load Lock chambers and PVD processes where reduction of exhaust time is important for increasing production throughput. In addition, the LR dry pump series is used for evacuation of inert gases in evaporation and heat treatment processes, and as a backing pump for turbomolecular pumps and mechanical booster pumps. Seven models are available from 80 to 1800 m3/hr pumping speeds at 60 Hz.www.ulvac.com  Large Rotary Piston Vacuum Pumps Ulvac’s PKS Series of large oil rotary piston vacuum pumps are extremely durable with very stable pumping evacuation characteristics. They currently are used in applications ranging from metal and automotive to chemical, pharmaceutical and food industries. These single stage pumps are designed with high-grade cast metal, which provides excellent corrosion and abrasion resistance. The PKS Series is available in pumping speeds from 96 to 420 m3 /h and a final pressure of 2.7 Pa. Disassembly and reassembly for maintenance and exhaust valve inspection is extremely easy.www.ulvac.com   Compact Oil Rotary Vacuum Pump  Ulvac’s D-240DK Series of compact oil rotary vacuum pumps with direct-drive motors are designed for use in a broad range of applications including production processes, laboratory ex-periments and R&D. These pumps feature a forced oil circulation system that provides stable evacuation speeds over a wide range with low noise and vibration levels for sensitive work environments. The 240DK series is available in pumping speeds from 240 to 290 (l/min) with an ultimate pressure of .067 Pa. A carrying handle makes this compact pump easy to transport.www.ulvac.com   YM Mechanical Booster Pumps  Ulvac’s YM Series of mechanical booster pump units contain an oil-sealed rotary vacuum pump and a mechanical booster pump on compact platforms with connection piping and control panels. These pumps are used in a wide variety of applications including: evaporation, sputtering, and ion plating; vacuum packing, transport, and casting; vacuum furnaces, sintering furnaces, and blazing furnaces; vacuum drying, freeze drying, and air removal; gas substitution/supply, vacuum insulation and leak test equipment. The YM mechanical booster pumps are available in pumping speeds of 95 to 1000 m3/h with an ultimate pressure of 0.4 Pa.   ULVAC Technologies, Inc.  Oil Free Diaphragm Vacuum Pumps Vacuubrand offers a wide range of modern oil free diaphragm pumps. These are often the best overall vacuum technology in the atmosphere to 0.3 Torr range and are outstanding as backing pumps for modern wide-range turbo pumps. The illustrated MD pumps are very compact 1.1 Torr, three stage, totally oil free mechanical pumps. The precision guided planar diaphragms and valves provide outstanding performance at low pressure with long term ultimate vacuum stability. Low vibration, low noise and exceptional diaphragm life, typically greater than 10,000 hours, characterize this new generation of pumps. Features include: continuous (24/7) oil free pumping, minimal and simple maintenance, flexible mounting in any position, available with 100 to 240V, 50/60 Hz or electronically controlled 24V motors.www.vacuubrand.net  VARIO Diaphragm Pumps for OEM Applications Vacuubrand variable speed VARIO pumps provide precise adaptive process control using a single set point. The 100% oil free pumps maintain optimal flow rates and vacuum levels to less than 0.5 Torr as they automatically adapt to the process requirements. The user gets a fast initial pump down plus efficient very low speed operation when gas flow demands are minimal. The easy to use integrated controller provides a digital vacuum readout and an RS232C interface (we also offer interface software, Vacuu•Control, for optional external PC control). The extended diaphragm life (>10,000 hours) of these units keep operational and maintenance costs at a minimum; high reliability variable speed! These high tech VARIO pumps are available in aluminum/Viton and PTFE chemical vapor versions with flow rates up to 167 L/min. The 0.2 Torr MV 2 Vario is illustrated. Vacuubrand, Inc. Tel: 1-860-767-5341 or Toll Free: 1-888-882-6730   Dry Vacuum Pumps  The Vacuum Research Limited long life dry vacuum pumps can operate more than 2 years without maintenance or adjustment. These easy to rebuild pumps have been in production for 20 years and have proven their reliability in 24/7 operations around the world. Ultimate pressure is 20 milliTorr (2.6 Pa) and several models are available with capacities from 6 CFM to 16 CFM (10 to 28 m3 /hour). Single stage pumps are available for vacuum drying and solvent removal. Ultimate pressure for single stage is 700 mTorr (90 Pa). When used with turbo pumps customers often select the optional VRL Soft Start & Speed Control. This low cost option automatically slows the pump when gas loads are small and immediately increases speed if the pressure starts to rise. Other options such as explosion proof motors, and complete vacuum instrumentation and controls may be ordered.www.vacuumresearch.com  Smart Dry Pumps Vacuum Research Limited’s Smart Dry Pump™ for roughing of ion or cryo pumps and backing of turbo pumps. Because the new Smart Pump™ switches piston operation from parallel for roughing to series operation for high vacuum; this new pump provides the proven reliability of our piston style pumps at 30 % lower cost per cubic foot of pumping speed and a 30% smaller footprint. Like all VRL Dry Pumps, the Smart Dry Pump™ needs no cooling water or purge gas, and of course, there is absolutely no oil or pump fluid to monitor or dispose of. The high capacity and low ultimate pressure of the smart pump is accomplished by operating the pistons in parallel from atmosphere to 1 Torr and then automatically switching them to series operation to give the 20 mTorr ultimate pressure. The crossover is controlled with a VRL Pirani gauge vacuum switch and even more savings can be accomplished with the VRL Soft Start & Speed Control added to your Smart Dry Pump.™ Smart Dry Pump™ is a trademark of Vacuum Research Ltd.www.vacuumresearch.com   Oil Sealed Roughing Pumps  Vacuum Research Limited’s Rotary Vane Vacuum Pumps provide quiet and reliable service in applications such as backing turbo pumps, vacuum ovens and furnaces, electron microscopes, freeze dryers, load locks, and sputter and deposition systems. Five pump models are available: Model 100-3.5 with pumping speed of 100 L/min. (3.5 CFM, 6 m3/hour); Model 200-7 with pumping speed of 200 L/min. (7 CFM, 12 m3 /hr); Model 400-14 with pumping speed of 400 L/min. (14 CFM, 24 m3 /hour); Model 600-21 with pumping speed of 600 L/min. (21 CFM, 36 m3 /hour); and Model 800-28 with pumping speed of 800 L/min. (28 CFM, 48 m3 /hr). The Vacuum Research Pumps are extremely quiet, virtually vibration free and use an anti suck-back design which guarantees vacuum integrity by preventing air or oil leakage into the vacuum chamber. Motors can be provided for any voltage. Soft starting and PID capacity control are optional. Substantial discounts are available for OEMs and distributors.   Vacuum Research Limited Tel: 1-800-426-9340 or 1-412-261-7630   IDP-3 Dry Scroll Vacuum Pump The Varian IDP-3 is a compact, high performance dry pump that provides affordable oil-free vacuum and easy system integration, and is suitable for a wide variety of applications. The IDP-3 employs an innovative hermetic design in which the motor and bearings are outside the vacuum space, allowing full isolation of all pumped gases. Delivering a robust pumping speed of 60 l/m and a very low base pressure of less than 250 milliTorr, the IDP-3 provides all the advantages of Varian’s patented scroll pump technology in a compact, lightweight, cost-effective package.www.varianinc.com  SH-110 Dry Scroll Roughing Pumps  Varian’s SH-110 Hermetic Single Scroll Pumps are designed to provide reliable, dry vacuum in a small, economical package. The pump is ideally suited for many applications including Analytical Instruments and Research and Development. This simple, reliable design utilizes proven TriScroll™ seal technology for longer demonstrated maintenance intervals. The SH-110 conforms to CE, UL/CUL, and SEMI S2-0200 requirements.www.varianinc.com  TriScroll Series Multi-Stage Dry Vacuum Pumps Varian’s TriScroll™ dry primary pumps are multi-stage dry vacuum pumps designed and manufactured by Varian Inc. The pumps produce oil-free vacuum at high speed and low ultimate pressure. The unique, patented TriScroll design features proven reliability and durability resulting in superior cost of ownership and consistent performance. Key features include a unique and efficient TriScroll design, a bearing purge port and an automotive ballast port.www.varianinc.com  Frequency Inverter Driven TriScroll Pumps The application of innovative frequency inverter technology to Varian’s TriScroll Dry Scroll Pumps provides several significant advantages over conventional vacuum pumps. Inverter driven TriScroll 300 and 600 pumps deliver optimal and consistent performance throughout the worldwide range of voltage and frequency conditions. Operating with low power requirements, the microprocessor-controlled frequency inverter is an efficient driving unit capable of delivering high starting torque and constant pump performance.www.varianinc.com   DS Series Rotary Vane Mechanical Pumps Designed to meet the demanding requirements of industrial and scientific applications, Varian’s reliable DS Series ensure high pumping stability for light gases, low noise, minimal oil backstreaming, and long operating life. These pumps conform to CE requirements, and all pump motors are UL and CSA approv-ed. Key features include: dual stages; auto suck back valve along with a built-in oil shield and gas ballast valve; forced oil circulation to ensure long life; and forced air ventilation for cooler operation.www.varianinc.com  Turbo-V Turbomolecular High-Vacuum Pumps Varian, as part of its total vacuum solution, offers a complete line of turbomolecular pumps and controllers, with pumping capabilities ranging from 40 to 6,000 L/s nitrogen. These pumps are optimized for specific applications and are widely used in industrial production, semiconductor manufacturing, scientific instruments, and general UHV research. Performing at the highest speed/compression-ratio in the smallest envelope, they are truly maintenancefree, wide-range pumps, capable of operating at higher foreline pressures than standard turbomolecular pumps. Varian offers further customization by providing multi-inlet pumping systems that are compact and reliable.www.varianinc.com  Turbo-V 2K-G Series Pumps Varian’s Turbo-V 2K-G is designed as an “application specific” pump for vacuum coating applications. The pump is optimized for high gas loads, with pump rotor and stators ruggedly designed to operate with high argon gas loads. The pump can also be installed at any orientation, eliminating design restrictions. The integrated system includes the turbo pump, controller, and universal power supply all as part of the pump, enabling simple hookup and eliminating controller rack space. Varian’s MoniTorr preventive maintenance diagnostic capabilities are available as options.www.varianinc.com  Turbo-V 3K-T System  The V 3K-T from Varian is a versatile 2000 L/s class turbo system offering the highest performance in a unique compact design, with innovative features including integrated electronics, real-time thermal overload protection and intelligent MoniTorr technology. Designed for demanding high gas load or light gas pumping and high compression UHV applications, the integrated package includes turbomolecular pump, drive electronics, power supply, MoniTorr technology and communication, and versatile electronics interface with easy-to-use T-Plus Software.www.varianinc.com  Diffusion Pumps  As a worldwide diffusion pump market leader, Varian produces the most comprehensive family of pumps ranging from 2 to 35 inches in diameter. Varian’s diffusion pumps are recognized as the industry standard and are known for high throughput, high pumping speeds, low ultimate pressure, and long service life.www.varianinc.com  Very-High-Vacuum Ion Pumps Varian manufactures a family of ion pumps, controllers, options, and accessories designed to provide solutions for every application. To accommodate the extensive range of application requirements—such as operating pressure, the mixture of pumped gases, and maximum starting pressure—and to achieve the best performance for each, Varian offers a wide range of ion pump types and sizes. Varian’s VacIon Plus family includes Diode, Noble Diode, and StarCell® pumps and in order to provide a selection of power levels and interfaces, Varian also offers MiniVac, Dual, and MidiVac Ion Pump controllers.   Varian, Inc.

Thin-Film Thickness, Flatness and Hardness Metrology Equipment Supplier

Compiled by Terrence Thompson, Contributing Editor
 This Vacuum Technology & Coating product showcase includes many of instruments and equipment used to quantify thin film thickness, flatness and hardness of most deposited materials.  For precise thin film thickness, flatness and hardness measurement instruments, there are numerous choices for measuring existing films. Metrology for coating thickness or thin-film measurements may involve ellipsometry and scanning spectrophotometry as well as non-contact surface roughness and surface profiling measurements. Surface profilers are very sophisticated and can measure surface profiles and/or roughness with sub-micron resolutions. Decisions, Decisions

 After you determine exactly what needs to be measured, check the most logical technologies. There may be a trade-off between cost and performance. Simpler methodologies often do the job for less demanding applications while the more exotic instruments are needed for very demanding applications where tolerances are tight. If you are checking wafer fabricated ICs or MEMS devices, tolerances are very tight. With optical coatings, thickness and material uniformity are essential. Many solutions exist for measuring thin film properties and more than one will likely meet your requirements.

 

Product Descriptions

In the following product descriptions, vendors make distinctions to focus on specific intended applications so direct comparisons may be difficult. For more infomation, go to Vacuum Technology & Coating magazine’s home page at www.vactechmag.com and click on the advertiser links for additional details or telephone numbers for calling for additional details or telephone numbers for calling to discuss your specific application requirements.

 

Model 54-4 Four Channel Transmissometer with Transmitter, Receiver, Projector and Collector Accessories The DYN-OPTICS™ Model 54-4 Four Channel Transmis-someter has measuring heads within the vacuum chamber and measures transmission of various coatings on flexible film in a continuous coating application. The four channels can be located across the film to measure uniformity of coating. Alternative-ly, one channel can measure transmission of an initial coating and the other three channels can measure uniformity across the film after a coating. In some applications, a computer can correct the desired transmission of the final coating to compensate for variations in the pre-coat. The instrument can measure the film in air or by means of fiber optics that can measure the transmission in a vacuum chamber. Transmissometers have been made with the number of channels varying from one to fourteen. Dyn-Optics  F50 Automated Thin-Film Thickness Mapping SystemFilmetrics’ F50 measures thin-film thickness and n and k are mapped quickly and easily based upon our advanced spectral reflectance system. The motorized R-Q stage moves automatically to selected measurement points and provides thickness measurements in seconds. Choose one of the dozens of predefined polar, rectangular, or linear map patterns, or create your own with no limit on the number of measurement points. The entire desktop system is set up in minutes and easily used by anyone with basic computer skills.www.filmetrics.com  F20 Thickness and Optical Constants Measurement System Filmetrics’ F20 measures film thickness, optical constants, reflectance, and transmission using non-contact optical technology. Film thickness ranges 30 angstroms to 450 microns. Affordable and easy-to-use, the F20 is a spectrometerbased system with wavelength ranges from 200 to 1700 nm. Spectral analysis of reflections from the top and bottom interfaces of the thin-film provides thickness and optical constants (n and k) in seconds. Virtually any smooth, translucent or lightly absorbing film can be measured, including semiconductor process films, III-V compounds, AR coatings, and polymers. Substrates should be smooth and reflecting. Example substrates include silicon, glass, metals, and polymer films. Options are available to make measurement of films on curved surfaces easy.www.filmetrics.com  F40 Thickness and Optical Constants Measurement System Filmetrics’ F40 “Converts your Microscope into a Thin Film Thickness Measuring Tool.” Film thicknesses are measured quickly and easily with Filmetrics advanced spectrometry systems. Spectral analysis of reflections from the top and bottom of the thin film provides thickness in seconds. For measurements on patterned surfaces and other applications that require a spot size as small as 10 microns, just add the model F40 to your microscope. For common microscopes, the F40 is a simple bolt-on attachment, complete with a c-mount for a CCD camera. Filmetrics, Inc. Tel: 1-858-573-9300    NIR MicroHR Spectrometer  The Optical Spectroscopy Division of Jobin Yvon released the NIR MicroHR spectrometer. The NIR MicroHR is a 140 mm focal length Czerny-Turner spectrometer featuring gold optics (for increased throughput in the NIR) and interchangeable gold gratings for optimization of optical components and wavelength range selection. A completely manual spectrometer, the NIR MicroHR allows full flexibility of wavelength selection with no electronic thermal emissions. Other features include fixed or micrometer adjustable slits, a high precision wavelength counter, and a mechanical shutter for true dark subtraction. In combination with a Symphony STE or LN2 InGaAs Arrays, the NIR MicroHR is the perfect instrument for NIR spectroscopy, laser characterization, NIR fluorescence, absorption, and NIR filter characterization.www.jobinyvon.com/usadivisions/TFilms/  Automated MicroHR—A High Performance Short Focal Length Spectrometer The Optical Spectroscopy Division of HORIBA Jobin Yvon Inc. automated MicroHR is a versatile short focal length spectrometer that is used as an imaging spectrograph (with a CCD) or a scanning monochromator for fluorescence, Photolumin-escence, or many other spectroscopic applications. The MicroHR features a 140 mm focal length, a 150 nm to 15 µm wavelength range (depending on the grating and detector used), and 0.25µm spectral resolution. Toroidal optics provide high imaging quality. Other features include fixed or micrometer slits, a high precision drive, an automated dual grating turret, and a USB 2.0 interface. Available options include a side exit port (for dual detector mounting) and an internal filter wheel.www.jobinyvon.com/usadivisions/TFilms/  MM-16 Competitively Priced Spectroscopic Ellipsometer The HORIBA Jobin Yvon MM-16 is a competitively priced spectroscopic ellipsometer that extends the capabilities of classical ellipsometry for the characterization of thin film thickness and optical properties with exceptionally high accuracy. The MM-16 is unique in its ability to collect full spectral ellpsometric data (2048 points) at high resolution and calculate the complete 16-element Mueller Matrix in < 2 seconds. This allows simple characterization of complex birefringent materials, and also simplifies the investigation of samples exhibiting depolarization effects. These unique capabilities fulfill the requirements for standard thin film metrology as well as many emerging applications using complex materials and structures in the display, biotechnology, packaging and semiconductor areas. The MM-16 is controlled from the DeltaPsi2 integrated software package to provide turnkey operation for a wide range of industrial and research applications.www.jobinyvon.com/usadivisions/TFilms/  FHR Spectrometers for a Unique Combination of High Speed, Precision, and High Resolution The Optical Spectroscopy Division of HORIBA Jobin Yvon Inc. FHR spectrometers offer a unique combination of high speed, precision, and high resolution, making them the ideal long focal length spectrometers for performing fast acquisitions with quality results. With a 640 mm or 1000 mm focal length, FHR spectrometers are fully automated, equipped with an auto-calibrating precision wavelength drive system and an auto-calibrating grating system. The motorized slits are continually adjustable from 0 to 2 mm in 2 µm steps. Kinematically mounted 110 × 110 mm gratings are designed for easy interchange. Controlled via RS232 or IEEE-488 interfaces, both instruments are operational with SynerJY® software and LabView VIs. FHR spectrometers are compatible with HORIBA Jobin Yvon’s CCDs, InGaAs arrays, PMTs, IR detectors, data acquisition systems and spectroscopic accessories. The FHR 640 and FHR 1000 are available in a variety of configurations for Raman, Emission, or High Resolution Spectroscopy. HORIBA Jobin Yvon   2nd Generation VUV-VASE® Spectroscopic EllipsometerThe J. A. Woollam Company VUV-VASE has expanded spectroscopic ellipsometry down to 140 nm, to the vacuum ultraviolet (VUV) by using an innovative dry nitrogen purge system. Now the J. A. Woollam company presents the next generation VUV-VASE. This new ellipsometer in the VUV line offers a larger sample stage to accommodate 300mm samples along with optional translation and mapping. These new options make the 2nd Generation VUV-VASE even more capable and able meet industry needs than the original. The wide spectral range of the VUV-VASE gives it an incredible versatility to characterize all type of materials: semiconductors, dielectrics, polymers, metals, multilayers, and more. Because the VUV-VASE ellipsometer is able to measure such short wavelengths, it is sensitive to ultra-thin films and it’s able to measure accurate n and k values at lithography exposure lines (157 nm, 193 nm, and 248 nm). This tool is based on the DUVVASE (190 to 1700 nm) technology. A Deuterium source and a PMT detector have been added to the existing Xe source and photodiode detector to increase short wavelength capabilities. This also provides a boost in signal to noise in the deep UV which is beneficial for the 193 nm lithography line. Light is strongly absorbed by air and water vapors in the VUV; therefore, the entire system must be purged with dry nitrogen. A loadlock allows convenient access to the sample chamber without introducing water vapor and oxygen back into the system. The system comes standard with a double chamber HS-190TM monochromator for superior stray-light rejection in addition to our patented AutoRetarder™ . It has a very large spectral range: 140 to 1700 nm, covering most lithography exposure wavelengths. It has a wide angle range with a high precision, computer controlled angle of incidence of 10 to 90°.www.jawoollam.com   IR-VASE  J. A. Woollam Co.’s Variable Angle Spectroscopic Ellipsometry (VASE) covers the spectrum from the vacuum ultraviolet to the far infrared. This serves a large variety of hightech markets involved with thin film materials. Among them are researchers and engineers in semiconductor, flat-panel display, optical coatings, telecommunications, and data storage industries; university engineering, physics, and chemistry labs; and government research facilities. The IR VASE is an automated Variable Angle Spectroscopic Ellipsometers (VASE) covering 300 to 6000 wave numbers. Nondestructive materials characterization of multilayer thicknesses, optical properties (complex dielectric function), composition, anisotropy, doping concentration, and much more. Real-time Process Control with low-cost, simple to-use, multiwavelength ellipsometers (M-44f and M-2000® ). In situ applications include monitor and control of Sputter Deposition, MBE, CVD, e-beam Evaporation, Plasma Etching and more.www.jawoollam.com    VUV-VASE J. A. Woollam Co., Inc.’s VUV-VASE vacuum ultraviolet specific version of the Variable Angle Spectroscopic Ellipsometry (VASE), covering the spectrum from the vacuum ultraviolet range. This serves a large variety of high-tech markets involved with thin film materials. Among them are researchers and engineers in semiconductor, flat-panel display, optical coatings, telecommunications, and data storage industries; university engineering, physics, and chemistry labs; and government research facilities.   Layer Thickness Measurement Package The m·u·t GmbH’s Layer Thickness Measurement Package consists of the TRISTAN® , a special reading head and our new Software. The system is able to measure transparent layers with a thickness of 0.1 µm to 20 µm under the pre-condition, that the base material is transparent or intense reflective. Then it is also able to detect up to three different layers on one sample. The reading head can be adopted to special customer needs (e.g. shape, handling, etc.). We also offer a special table for desktop measurements of layer thicknesses. This system is in already use by companies from the plastics industry, where it is used for quality control of layers on plastic windows.   m·u·t GmbH Tel.: +49-0-4103-9308-0 1500-D Analyzer Accurately Measures Thickness of Diamond-Like Coatings (DLC) on Perpendicular Recording Media for Next Generation Disk Drives n&k Technology, Inc., a manufacturer of proven, production-worthy systems for accurate, and precise thin film measurement for data storage, has a software module that adds the capability to the n&k 1500-D Analyzer of characterizing DLC on perpendicular recording media. The software package enables the n&k 1500-D Analyzer user to effectively characterize the latest magnetic media that are substantially more complex than older generation media and allow much higher recording densities. The data storage industry is rapidly moving to significantly higher recording densities in response to competition from FLASH memory and an increased penetration of the consumer market with such products as game boxes, DVR, in-car navigation, and various music and video players. Combined with the n&k 1500-D Analyzer that is used to characterize the latest Giant Magnetoresistive (GMR) heads, these solutions address next generation disk drive metrology. Santa Clara, CA   Atlas® Advanced Metrology System The Nanometrics Atlas metrology system accommodates both 200- or 300-mm wafer metrology. The system incorporates a dual-arm robot, high-precision stage and high-speed focus system. The Atlas also features robust pattern recognition, improved thickness reproducibility and superior SR (135 WPH for five-site measurement) and SE (90 WPH for fivesite measurement) throughput. The N2000 software interface and advanced automation are compliant with standards adopted by SEMI and other organizations. The NanoNet feature, a network component of Nanometrics’ N2000 Analysis Platform software provides system-to-system matching and seamless recipe transferability. The Nanometrics Atlas system can be configured with any combination of the following metrology modules: Spectroscopic reflectometer (SR); Spectroscopic ellipsometer (SE); Optical critical dimension (OCD); Diffraction based overlay (DBO); and Wafer stress/bow. n&k Analyzer solutions are distinguished by an excellent signal-to-noise ratio over the entire deep-UV to near-IR (190 to 1,000 nm) wavelength range. This is a result of our patented all-reflective optics design and is essential for many applications. Metrology tools with a limited wavelength range, or increased noise suffer in terms of capabilities and measurement stability. Nanometrics, Inc. Tel: 1-408-435-9600   MetaPULSE-III 300™ On-product Metrology for 45 nm Processes and Below with Low Cost of Ownership Rudolph Technologies, Inc., announces the new MetaPULSE-III 300™ that is designed specifically to meet semiconductor manufacturers’ metal thin-film metrology requirements at the 45 nm technology node and beyond. The MetaPULSE-III can lower cost of ownership by up to 40 percent over the previous-generation system with industry-leading production throughput of over 100 WPH. The modular design of the MetaPULSE-III offers the latest advances in Rudolph’s patented PULSE Technology™ , which has been deployed in over 200 installations for production monitoring of aluminum and copper processes. In addition, since the MetaPULSE-III is built on the new VANGUARD-II™ platform, it can be combined with other metrology technologies to characterize a wide range of advanced processes. Applications of the MetaPULSE-III include measurement and characterization of metal gates, elastic modulus, ultrathin films, advanced copper barriers, copper shunt, electroplated copper, copper CMP thickness and surface profile, advanced silicides, silicon on insulator, SiGe, thermal conductivity, and low-k dielectric adhesion. During process research and development, the metrology requirements for these and other advanced applications may evolve rapidly, requiring a metrology tool with a wide range of capabilities that can quickly generate results. The MetaPULSE-III offers a solution with its modular platform; EASy™ expert system software capable of combining data from multiple technologies into fast, user-friendly results; and sophisticated applications support based on years of in-fab experience. As the process ramps to high-volume production, the MetaPULSE-III will offer the high throughput, industry-leading repeatability, and tool-to-tool matching required for 24/7 process control.  Ultra-II CD Metrology System Combines Focused Beam Ellipsometry and Scatterometry to Offer Thin Film and CD Metrology in a Single Tool Rudolph Technologies, Inc., provider of process control equipment for thin film measurement and macro defect inspection during integrated circuit manufacturing, has the ultra-II CD™ system for optical critical dimension (OCD) and thin film metrology in a single tool. The ultra-II eliminates the need for separate CD and film thickness tools, and therefore can offer low cost of ownership, reduce transport delays, and provide rapid notification of yield excursions for deposition, lithography, and etch processes without compromising industry-leading performance. The ultra-II CD introduced Rudolph’s new Simul-taneous Multi-angle LASER (SiMuLASE™ ) Scatterometry, a CD measurement technique based on its highperformance patented Focused Beam Ellipsometry (FBE) technology. The combination of FBE and SiMuLASE Scatterometry™ provides high-speed, nondestructive CD metrology, as well as thickness and optical property measurements for transparent films–all with superior accuracy, repeatability, and toolto-tool matching. Focused Beam technology, based on the simultaneous collection of data at multiple wavelengths and multiple angles, provides for unsurpassed performance in both CD and film thickness measurement applications. FBE capability has been extended to patterned structures that manufacturers are increasingly adopting to more closely represent how a process will perform on active die. Its OCD capabilities have been specifically developed in collaboration with semiconductor manufacturers to meet process control requirements at the 65 nm node and beyond for advanced transistor formation processes, including shallow trench isolation, poly-gates, and sidewall spacers. The ultra-II optical system provides film thickness measurements with long-term repeatability of 0.03 Å. The small spot size of the ultra-II CD permits measurements on shrinking test structures–as small as 50 × 50 mm–within the scribe line or active die region to meet current and future process requirements. The ultra-II CD system is available immediately. Rudolph Technologies, Inc.   ScalarGauge™ Series Fluorescence Coating Measurement Systems OK ONLINE  The ScalarGauge™ Fluorescence system is unique. It has been designed to measure, both off-line and in-line, films and coatings as thin as 1 millionth of a millimeter. The system is ideally suited to clear coatings and clear substrates, an area which competitive technology has traditionally found difficult. The ScalarGauge™ Fluorescence system can be used to measure previously immeasurable coatings, especially ultra thin coatings, such as wax release coatings used in the Hot Stamping Foil and Holographic sectors. Difficult to measure Silicon release coatings are also measured with ease. ScalarGauge™ excels in those polymer film coatings that existing techniques find so much difficulty in handling. Advanced electro-optics techniques are used to fluoresce the coating and the resulting fluorescence is collected and processed. State of the art technology ensures that ScalarGauge™ is safe to operate and ideal for harsh environments such as high solvent conditions. Measured thickness data are collected and processed by the ScalarGauge™ software. The user-friendly software is simple to use and presents measurements of the coating thickness across and down the web, stores trends and provides you with a wide range of useful information. Scalar Technologies Limited Tel: +44 (0)1506 414806    FilmTek™ 4000EM-DUV 300mm Optical Thin-Film Metrology System for Advanced Thin Films  The Scientific Computing International FilmTek™ 4000EM-DUV leverages the combination of new proprietary Multi-Angle Differential Polarimetry (MADP) technology with SCI’s patented Differential Power Spectral Density (DPSD) technology to provide an optical thin-film metrology tool with the best resolution, accuracy, and repeatability in the industry. By providing superior precision and accuracy, FilmTek™ 4000EM-DUV enables tighter thin-film process control during production of the latest-generation IC’s to increase overall device yield and performance. In addition to providing tighter thin-film process control, FilmTek™ 4000EM-DUV enables chip manufacturers to accelerate their transition to future technology nodes through characterization and accurate measurement of advanced thin films. Manufacturing advanced IC devices at sub-130nm design rules requires the use of complex films that must be highly uniform. To maintain tight control over the processes used to build these films requires metrology systems that can monitor extremely thin films that are often within a multi-layer film stack (e.g., high-k and oxide-nitrideoxide films). Additionally, some processes result in gradients through the thickness of the film that must be monitored for optimum device performance (e.g., implant damage and low-k films). Existing metrology tools that rely on conventional ellipsometry or reflectometry techniques are limited in their ability to detect film changes for these applications. The FilmTek™ 4000EM-DUV enables high-precision thickness and material characterization measurements for accurately monitoring advanced thin films such as high-k film stacks, oxidenitride-oxide (ONO), lowk films, 193nm photoresist, 193nm antireflective coatings (ARC and BARC), thick and thin silicon-on-insulator (SOI), silicon germanium (SiGe), and amorphous carbon films. In addition to measuring film thickness and index of refraction, the FilmTek™ 4000EM-DUV can simultaneously determine extinction coefficients, surface roughness and damage, porosity, crystallinity, birefringence and stress, and energy band gap. Scientific Computing International Tel: 1-760-634-3822   S-MAT 2000 Metrology Tool The S-MAT 2000 is the evolution of the S-MAT 200. This tool offers greater automation, S2/S8 and CE certification and enormous flexibility is configuring a tool to address 200mm production needs. The S-MAT 2000 is a metrology tool designed to accurately measure thin films, without standards. Advanced x-ray reflectivity (XRR) measure single and multi-layers stacks with ease and a repeatability of 0.1%. Designed as a daily monitor the SMAT 2000 can rapidly and reliably handle 200mm production requirements. Measure thickness and density of metal films (Ti, Cr, Al, Co, Pt, Cu, Ir and others), measure Nitride films (TiN (PVD or MOCVD and organic CVD), SiN, WN, and others), measure Oxide Films (SiO2, PZT, IrO2 and others), measure Silicide Films (WSi, TiSi2, and others) and measure Multilayer Stacks: (Ti/TiN, SOI). The S-MAT 2000 is a cost effective solution with low CoO, fab friendly software, and 200mm automation. It's a great solution for pilot lines, or trailing edge fabrication. Technos International Tel: 1-866-832-4666   High Resolution Film Thickness Analysis  Manufacturers have long relied on Wyko Optical Profilers for accurate, non-contact, 3D surface topography and film thickness measurements. New software extends the utility of these tools for measuring the thickness of transparent and semi-transparent films as well. Wyko Vision® analysis software, included with all Wyko Optical Profilers, measures interference from both the substrate and the top of a transparent film, to charac- terize thickness up to over 100 microns. The new Film Thickness analysis option adds the ability to measure through semi-transparent resists, coatings and other films, for accurate and repeatable thickness measurement without a step to the substrate. Unlike other thickness instruments, Wyko Optical Profilers characterize a wide surface area in a single measurement, highlighting local variations and defects that other systems do not identify. The topography of the upper and lower film surfaces is automatically determined as well, highlighting the coating’s effect on surface quality. With a unique combination of speed, accuracy, range and repeatability, Wyko Optical Profilers provide comprehensive, detailed film metrology data for process development and control.www.veeco.com    New Dektak 150 Surface Profiler Aids State-of-the-Art Solar Cell Manufacturing  Veeco Instruments Inc.’s Dektak® 150 Surface Profiler delivers increased resolution for measuring thin films to 10 nanometers and below to meet the evolving requirements of today's photovoltaic cell applications. The Dektak is a superb tool to monitor thin films as well as critical surface roughness, key for optimal absorption of photons, and thus efficiency. The new robust design of the Dektak 150 incorporates a cast-aluminum frame and several vibration and noise reduction features to provide the lowest possible noise floor for measuring extremely thin films. In addition, the Dektak 150 is able to measure thin film stress with longer scan lengths up to 55 millimeters and a larger vertical range up to 1 millimeter. The thin film stress measurement software automatically calculates compressive or tensile stress. The Dektak 150 offers 3D imaging capabilities to map a user-defined surface area to perform in-depth analysis of surface defects and area roughness with Veeco’s exclusive Vision® 3D analysis software. Veeco Instruments Inc.