Gas Delivery & Diagnostics
June. '08 Digital Edition
Gas Delivery & Diagnostics
Mar. '08 Digital Edition
Gas Delivery & Diagnostics
Nov. '07 Digital Edition
Gas Delivery & Diagnostics
Sep '07 Digital Edition
|
|
|
Article
|
Gas Analytical Systems
This product showcase addresses gas analytical instrumentation that is applicable in various production, R&D and other vacuum applications.
Compiled by Terrence Thompson, Contributing Editor
Vacuum systems often require the use of sophisticated gas analytical systems include mass spectrometers, gas chromatography systems and RGAs to verify process or test integrity. Vacuum pumps and systems remove the ambient atmospheric so that precise gas mixtures may be introduced to meet a specific application’s requirements.
Product Descriptions
In these product descriptions, vendors make pragmatic distinctions to focus on specific intended applications so direct comparisons are difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or use the telephone numbers to call and discuss your specific application requirements.
Adixen 2000 Series Vacuum Gauges
Alcatel Vacuum Products, Inc. has  developed a new line of vacuum instrumentation, the Adixen 2000 series of vacuum gauges. These instruments are accurate, affordable, easy to specify, and easy to use. These are intelligent gauges that can be used either stand alone or with a panel mount controller. Stand alone, they can be supplied with 15 to 30 VDC and return a 0 to 10V or RS485 output. In addition, set points are available directly on the gauge head. All sensors in this series use the same pin outs on a Dsub 9 pin connector, so the wiring is easy. Alternatively, an Adixen ACS2000 single channel or ACM2000 3 channel controller can be used to display the pressures and power the gauges. These controllers come standard with 2 setpoints per channel, 0 to 10v outputs, and RS232 communication. Any gauge can be plugged into either controller and the controller will automatically recognize the gauge type and correctly display the pressure. The 2000 gauge series includes hot cathode ion gauges, cold cathode ion gauges, pirani gauges and capacitance manometers and are capable of pressure measurements from atmosphere to 5 × 10-10 mbar. The gauges and controllers can give you more than just a simple pressure measurement, they can drive a production process or record a pressure trend. These gauges are appropriate for use in food packaging, cathode ray tube manufacturing, DVD production, cutting-edge electron microscopes, particle accelerators, semiconductor and almost all high vacuum applications. Product ranges are AP 2004 Pirani for 5 × 10-4 Torr to ATM, ACC 2009 Cold Cathode/Pirani for 5 × 10-9 to ATM, ACH 2010 Hot Cathode/ Crystal for 5 × 10-10 to ATM, ASd 2000 Capacitance Diaphragm for 5 ranges from ATM to 0.1 mTorr, ACS 2000 Single Gauge Controller, and ACM 2000 Three Gauge Controller. www.adixen-usa.com
ACC 2010 Hot Cathode/Crystal Gauge from Adixen
Alcatel Vacuum Products, Inc. has developed the ACH 2010 Hot Cathode/Crystal vacuum gauge covering the  range of 5 × 10-10 to atmospheric pressure. Using the combination of hot cathode in conjunction with a crystal gauge the ACH 2010 delivers pressure measurement with a single output to span the entire range between 5 × 10-1 and ATM pressure. The automatic range switching feature practically eliminates burning of the filament due to accidental venting. It is available in 2 versions, with an easy RS-485 protocol, or 0 to 10v output. TheAHC 2010 gauge is very easy to us, it features a push button span adjustment so there are no potentiometers to ‘tweak’. It can be used stand alone, just supply it with 15 to 30VDC and get a 0 to 10v output signal or RS-485 digital communication, and two set points come standard on the gauge head. Or use the gauge with an Adixen ACS2000 single gauge or ACM2000 three gauge controller to display the pressure. www.adixen-usa.com
ACS 2000 Single Channel Controller and ACM 2000 3 Channel Controller
Alcatel's new ACS2000 single channel gauge controller and ACM2000 3  channel gauge controllers are extremely easy to specify and and use. Either controller can be used with any of the Adixen 2000 series gauges, the controller will automatically recognize the gauge and display the proper pressure. There is no complicated part number to configure as they come standard with all popular features: Torr, mBar or Pascal units, RS-232 interface, 2 set points per channel, 0 to 10v output per channel, and can be powered by 220 or 110VAC. In addition, all gauges use the same type of cable, a straight through DB-9, so there is no complicated array of cables to wade through. These controllers can even be used with the Adixen 1000 series gauges (or visa versa) with a simple adapter. The 3 channel controller is very advanced. It can display any combination of Adixen 2000 series gauges, including capacitance gauges, in combination with ion or pirani gauges, and can also display a graphical trend of the pressure signal over time, a very valuable feature for monitoring system performance, pump down times or troubleshooting leaks or out gassing. www.adixen-usa.com
AP 2004 Pirani Gauge
Alcatel Vacuum Products, Inc. has the AP 2004 Pirani vacuum gauge.  This new gauge determines pressure by measuring the heat loss from a heated filament. When the gas pressure decreases, there are fewer gas molecules, resulting in a less convective heat transfer from the filament, which then gives a very accurate pressure measurement. The AP2004 uses a very long filament which results in a much more accurate gauge, the repeatability of this gauge is ± 2% over the range from .02 to 50 mbar. The AP2004 also has a very low internal volume for a very fast response time. The AP2004 gauge is easy to use with a push button span and zero adjustment so there are no potentiometers to ‘tweek’. It can be used stand alone, just supply it with 15 to 30VDC and get a 0 to 10v output signal or RS-485 digital communication. Two set points are available on the gauge head. Or if you prefer, you can use the gauge with an Adixen ACS2000 single gauge or ACM2000 three gauge controller to display the pressure. The Adixen Pirani gauge provides an excellent level of accuracy from 5 × 10-4 Torr to ATM. www.adixen-usa.com
ASD 2000 Capacitance Diaphragm Vacuum Gauge
Alcatel Vacuum Products, Inc. has the ASD 2000 series of  capacitance diaphragm vacuum gauges covering the range of 0.1mTorr to ATM in 4 ranges with ±0.5% accuracy. These gauges use a micro-machined silicon diaphragm which results in a very stable signal and low zero drift in spite of fluctuating temperatures and vibration. The ASD2000 series gauge are easy to use with a push button zero adjustment so there are no potentiometers to ‘tweek’. They can be used stand alone, just supply with 15 to 30VDC and get a 0 to 10v output signal. Or, if you prefer, use these gauges with an Adixen ACS2000 single gauge or ACM2000 three gauge controller to display the pressure. With the ACM2000 controller you can display capacitance manometer readings on the same display with ion or pirani gauges, it is as simple as just plugging them in.
Alcatel Vacuum Products, Inc.
Adixen Brand Name
Hingham, MA
www.adixen-usa.com
Contact: PaulYoung
Tel. 781.331.4200
E-mail: inquiry@adixen-usa.com or Paul.Young@adixen-usa.com
TA 7000R Reduction Gas Analyzers Provide Reliable Measurement Of Trace H2 and CO at Extremely Low Concentrations
The ta7000R Series gas chromatographs from AMETEK Process  Instruments are designed to monitor the purity of gas distributed to clean rooms and production tools in the latest semiconductor fabs. The units provide rapid and reproducible results at extremely low concentrations. The monitor incorporates many advanced features for the reliable detection of H2 and CO in the parts per trillion (ppt) range. The ta7000R platform includes a dedicated sample processing system, a single high sensitivity detector and on-board data analysis electronics. It is equipped with a Reduction Gas Detector for H2 and CO detection. The unit has a detection limit below 500 parts per trillion and is available for use on nitrogen, oxygen, helium and argon sample streams. The ta7000R Series is part of a family of trace analyzers from AMETEK for process instrumentation.
AMETEK Process Instruments
Newark, Delaware
www.ametekpi.com
Tel: 1-800-222-6789
E-mail: Jim.McKinley@ametek.com
Ultimate Residual Gas Analyzer Combines Pirani, Ion Gauge and Quadrupole Capabilities
Extorr’s ultimate residual gas analyzer combines  Pirani, ion gauge and quadrupole capabilities. The probe has an ionizer, quadrupole mass filter and detector. While adhering to the most stringent ultra high vacuum standards, the novel design optimizes RGA, Pirani and ion gauge performance. The rugged probe assembly mounts onto a standard 2-3/4-inch CF flange. The end of the probe extends 6.8 inches (173mm) from the mounting flange face. It requires no added vacuum extension nipple. The probe is designed using self-aligning parts and may be easily reassembled after cleaning. All data is recorded, protected and monitored with autoranging, high stability and high sensitivity. Each system comes complete with a multi-gauged quadrupole probe, a control and communications unit (CCU), and a real-time Windows software package. Sensitivity reaches below 10 femtotorr when the optional electron multiplier is applied.
Extorr Inc.
New Kensington, PA 15068
Tel: 1-724-337-3000
Process Gas Chromatograph for ppb Gas Analysis
GOW-MAC® Instrument Company introduces a new analyzer to an assortment of gas chromatographs. The new Series 200DID Gas Chromatograph is a process analyzer optimized explicitly for ppb analysis of non-corrosive and corrosive gases. This instrument employs GOW-MAC’s patented discharge ionization detector (DID) and offers application specific system configurations. The 19-inch rack mount compatible Series 200DID GC is computer-controlled using a keypad with vacuum fluorescence graphical display. The GC features continuous, unattended operation (24/7); packed or micro-packed columns; auto-zero; automated valve control; isolated, discrete 4 to 20 mA outputs; and two modes of operation: manual – used for method development and/or research; and auto- matic – used for process analysis. It is a self-contained instrument so chromatography software is not needed. Relevant applications include, but are not limited to: Grade 6 electronic gases, Grade 6 inerts; Grade 5 UHP quality gases: air, Ar, He, CO2, O2, N2, H2; high purity, gas mixtures for laser applications; certified trace gas mixtures; basic and applied research and process control.
Series 1200 Trace N2 in Argon Analyzer
GOW-MAC® Series 1200 gas analyzer measures trace amounts of nitrogen in argon. Two models cover different analytical ranges: Model 1200-A covers 0 to 2 and 0 to 20 ppm; Model 1200-B covers 0 to 20 and 0 to 200 ppm. Detection is based on spectral emission of argon plasma. High signal gain and improved noise rejection give the analyzer a guaranteed sensitivity of 10 parts-per-billion (ppb) for nitrogen.
GOW-MAC® Instrument Co.
Bethlehem, PA
Tel: 1-610-954-9000 Ext. 249
Versatile Residual Gas Analyzers
The Hiden Analytical family of residual gas analyzers features three system types optimized to accommodate applications from basic HV vacuum diagnostics through to precision gas analysis and fast-event UHV/XHV studies. The HALO system, a multipurpose spectrometer for HV/UHV vacuum applications, features partial pressure measurement to 10E-13 mbar together with exceptional low mass performance for high-sensitivity leak detection. Mass range options are 200 amu and 300 amu. Interchangeable gauge heads and control modules reduce operational costs and simplify post-sales service and maintenance. The 3F series with sophisticated triple mass filter technology offers precise analytical capability with superior contamination resistance, high abundance sensitivity and detection capability to 5 part-per-billion, together with mass range options of 300 amu and 500 amu. Application-specific ionization sources are available to enable system configurations for precision gas analysis, molecular beam and laser interaction studies, and UHV/XHV applications. The 3F PIC is ideal for fast event studies. Compatible with the full range of ionization sources in the 3F series and extends performance with a fast pulse counting detector capable of continuous measurement at rates to 500 samples per second and with a dynamic range from 1 c/s to 10E7 c/s. All three systems offer Hiden Analytical's Lifetime Service Support and are backed by a 3-year warranty.
Modular CATLAB
Hiden’s modular CATLAB offers a wide range of experimental tools for catalyst researchers, from rapid dynamic screening to fully automated precise investigations of active surface chemistry and optimization of catalytic activity. The CATLAB performs analysis using temperature-programmed methods such as TPR, TPO and TPD. Pulse chemisorption is also available with the CATLAB - PCS. The integrated QIC 20 mass spectrometer system provides for quantification of the adsorbed/desorbed species. Physical analyses such as metal surface area, catalyst dispersion and surface acidity/basicity are provided. All CATLAB and mass spectrometer sampling wetted surfaces are designed to have the widest possible compatibility for use with aggressive species. Hiden Analytical’s HPR-20 QIC mass spectrometer is available for coupling to existing catalyst reactors with integral analysis software available for TPD/TPR/TPO quantification.A range of specialized connectors and couplings optimise integration with the reactor vessel.
Hiden Analytical Inc.
Livonia, MI
Tel: 1-734-542-6666
Precise Sensitivity For Contamination Control with Transpector® 2 Gas Analysis System
The INFICON Transpector® 2 Gas Analysis System provides  accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection. In the Transpector 2, increased hydrogen sensitivity makes contaminants visible at sub-ppm levels. Low minimum detectable partial pressure for all gases means better contamination control, as well as faster and more stable scanning for maximum performance in today’s faster processes. Improved abundance sensitivity, superior peak position and amplitude stability contribute to the superior performance of this RGA. Combined with TWare 32 software, Transpector 2 is the ideal instrument for production process monitoring, data collection, and statistical process control. Firmware capability has been expanded in Transpector 2, and because it’s a smart sensor, you still have the flexibility of using your existing computer or choosing a PC from INFICON to run one or multiple gas analyzers. Transpector 2 is easily multiplexed to make multi-chamber systems simpler and more economical to operate.
INFICON
East Syracuse, NY
Tel: 1-315-434-1100
Mass Spectrometer for the Highest Sensitivity, Stability and Reliability
The Pfeiffer Vacuum HiQuad™ quadrupole mass  spectrometer provides proven MS technology for the highest sensitivity, stability and reliability, combined with next-generation Quadera™ software. It is four times faster than previous models providing high measurement speeds and exceptional sensitivity with a dy- namic range of 10 orders of magnitude. Mass ranges up to 2000 amu are available. The new, easy-to-use Quadera software permits analysis to be as simple or as complex as required. HiQuad is used in applications including: surface science, plasma research, isotope ratio MS, trace gas analysis, and desorption studies. The HiQuad Mass Spectrometer also features a built-in web server for remote operation and Ethernet communication for easy connectivity and networking. www.pfeiffer-vacuum.com
PrismaPlus™ Mass Spectrometer
The combination of high sensitivity, stability and intelligent operation  are the “Plus” in the Pfeiffer Vacuum PrismaPlus™ mass spectrometer. In qualitative and quantitative gas analysis and leak detection the user benefits from its robust, compact design, simple integration and from over 40 years of Pfeiffer Vacuum experience in mass spectrometry. With the ability to select different mass ranges (100, 200, 300amu), detectors, ion sources and interface options, it can be employed in many applications, such as: industrial, coatings, analytical, R&D and leak detection. The PrismaPlus is the optimum solution for applications ranging from quality assurance and residual gas analysis through to complex, quantitative tasks. The Prisma-Plus delivers precise and stable results down to a detection limit of 1×10-14 mbar. With available Faraday and SEM detectors, even low-level contamination in the vacuum system can be quickly identified. The Quadera® intelligent software is easy to operate and has an easy-to-read platform for capturing and displaying measured data. Using interfaces such as Ethernet, digital and analog I/O, integration in any system is simple. www.pfeiffer-vacuum.com
OmniStar™ Gas Analysis System
The Pfeiffer Vacuum OmniStar™ gas analysis system is a high performance, flexible quadrupole mass spectrometer in a compact benchtop package. OmniStar is capable of simultaneously monitoring up to 64 gasses from 100% to below 10ppb with available mass ranges of 1 to 100, 1 to 200 and 1 to 300 amu. Dual filaments are standard with the OmniStar for maximum uptime as well as a secondary electron multiplier detector for fast, low level measurements. Pressure is constantly monitored via a Pfeiffer Vacuum Full Range gauge and the filaments and detector are interlocked based on a user defined trip level. Integral bakeout and inlet heaters are included to reduce backgrounds and prevent condensation. The OmniStar allows for monitoring of gas purity at point-of-use or for accurate quantitative gas mixture measurements. Process control software is standard offering many options for interfacing to the gas handling system. In addition, it is available with protection for corrosive and explosive gas mixtures and can be used over a wide range of gas pressures with many inlet options. Powerful Quadstar™ software running on Windows XP™ , handles the analysis operation and data collection. Quadstar features matrix-inversion routines for quantitative analysis of gas mixtures even with overlapping masses as well as a macro programming module for automatic operation and programming of custom user interfaces. Serial and fiber optic LAN communication ports are included allowing operation of multiple units over long distances with immunity to electrical interference.
Pfeiffer Vacuum, Inc.
Nashua, NH
www.pfeiffer-vacuum.com
Contact: Steve Foster, Product Manager
Tel: 1-603-578-6500
E-mail: Sfoster@pfeiffer-vacuum.com
High Performance GC/MS
Shimadzu Scientific Instruments’GCMS-QP2010 sets an industry standard for speed and  sensitivity. This new instrument has a scan sensitivity over 60/1 for 1 pg of octafluoronaphthalene (OFN) and provides acquisition speeds to 50 scans per second. Coupled with the capability to use virtually any type of column, in EI, CI or NCI mode with a variety of inert reproducible injection systems, the GCMS-QP2010 is the most versatile, accurate, and dependable GC/MS system for any analysis. The GCMS-QP2010 features an extended mass range to 1024 Daltons (amu). Design innovations include post quadrupole focusing lenses, redesigned ion optics and front access for easy maintenance. GC-2010 features include 20 temperature ranges and patented constant linear velocity to achieve optimum separations. A range of accessories includes Shimadzu's AOC-20i Auto Injector, AOC-5000 Injection System, and PY2020 D Pyrolyzer.
Shimadzu Scientific Instruments, Inc.
Columbia, MD
Tel: 1-800-477-1227
UGA Series Universal Gas Analyzers
The Stanford Research Systems, Inc. UGA Series Gas Analyzers operate from atmospheric pressure to UHV, with a mass range of up to 300 amu. Standard features include electron multiplier, built-in system heaters, dual-diaphragm pumps, and a multicapillary input (opt.). The UGA Windows software allows complex graphing and data analysis, as well as complete system control. Three models are available: UGA100,; UGA200 and UGA300.
Stanford Research Systems, Inc.
Sunnyvale, CA
www.thinkSRS.com
Tel: 1-408-744-9040
E-mail: info@thinkSRS.com
Qulee Quadrupole Mass Spectrometer
The compact ULVAC Qulee quadrupole mass spectrometer features integrated measurement display and control electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Pascal, Torr or mbar of He, H2O, N2, O2, O2/N2 ratio, and a user selectable channel from mass ranges of 1 to 50, 100 and 200 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. The built in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software enable Qulee to be used for leak detection, RGA and process gas monitoring in PVD systems. A maximum operating pressure of 2 Pa can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 × 10-10 Pa. Optional differential pumping is available for applications that require it.
ULVAC Technologies, Inc.
Methuen, MA 01844
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@ulvac.com
MS-40 - Portable Dual Sector Mass Spectrometer Helium Leak Detector
VIC’s MS-40 series portable leak detectors are fully automatic, easy to  use, and highly accurate, these advanced design leak detectors are ideal for a broad range of applications including clean, oil-free testing. The MS-40 allows testing for the smallest leaks at the highest pressures because of their dual magnetic sector, high- resolution mass spectrometry. VIC leak detectors are able to test for the smallest leaks at the highest pressures. Gross testing begins immediately at atmospheric pressure Fine leak testing begins at 7.5 Torr. www.vicleakdetection.com
MS-50 Series - Console High Speed Production Leak Detection
VIC’s MS-50 series of console high-speed production leak detectors offers unmatched accuracy, reliability and ease of use, with simple one-button power-up and fastest time-to-test. Available in a variety of ergonomically designed CE-compliant models and configurations, the MS-50 is ideal for a broad range of application-specific testing. Because it offers a choice of three flow modes, the MS-50 adapts to many leak testing applications. Reverse flow offers the fastest time to test for large to fine leaks. Direct flow provides the fastest response time for the smallest of leaks. A combination mode that enables the system tow switch dynamically between modes provides optimum performance. This unique flexibility of flow modes allows the MS-50 to test for leaks in many applications for industries that require any level of leak tightness. The MS-50 series also available in dual port, high sensitivity, dry and argon configurations. www.vicleakdetection.com
The Smart Charge III™
The VIC Smart Charge III™ is a fully  automatic, custom-configurable gas evacuation and backfill system with built-in grossleak test used to pre-charge products under test with gas for leak detection or for any gas charging application that requires evacuation and subsequent pressurization of the test product. The system’s new features include the industry’s first user selectable cumulative leak site integration feature to distinguish if each individual leak site is an accept or a reject and to determine if the accumulated leak measurements exceeds the specified leak reject limit; parts can either reject on one leak site or the accumulation of multiple sites. Other features include built-in gross leak test capability to eliminate tracer gas contamination; up to 10 part specific recipes each with up to 10 leak sites, with user configurable dwell time at each site; barcode scanner input; serial printer output; and remote monitoring over an Ethernet connection; PLC control allowing for flexible configuration. The Smart Charge III can be readily integrated with VIC’s MD-490S “Real Sniffer” portable dry industrial helium leak detector for tracer gas charging of products prior to fine leak testing. Gas recovery and mixing options are also offered by VIC to create a completely integrated gas handling and test system.
Vacuum Instrument Corporation — VIC
Ronkonkoma, NY
www.vicleakdetection.com
Contact: Rod Sano, Marketing Coordinator
Tel: 1-631-737-0900, Ext. 113
E-mail: rsano@vicleakdetection.com
Vacuum Valves, Flanges and Fittings for Processes and Systems
Compiled by Terrence Thompson, Contributing Editor
Vacuum systems have many uses for vacuum chambers, pumps, lines, valves and monitoring instruments for a given vacuum process or experiment. Vacuum valves are precise mechanisms that regulate the flow of gases. They typically are started, stopped and/or regulated by a moving part that permits or obstructs gas flow in a passage. They do, however, usually need flanges and fittings to work.
In vacuum systems, valves are used to provide fine control of gas streams entering the vacuum chamber. The vacuum in a vacuum system is often controlled by means of relatively large butterfly or shutter-type throttling valves that determine the rate at which gas is evacuated from the system by a vacuum pump. For use in vacuum systems, valves should have good outgassing characteristics. They may also be required to withstand vacuum bakeout temperatures. When intended for applications with, and/or, within vacuum systems, valves are available that can withstand cryogenic temperatures or, at the other extreme, that can operate at very-high temperatures.
Vacuum pumps are the heart of any vacuum system and numerous components and accessories are required to interconnect the pumps to the equipment needing vacuum. Valves of many types (poppet, gate, butterfly, ball, pendulum, etc.) are combined with either mechanical or electrical gauges, monitors, controllers, filters, traps, flanges and fittings to achieve the desired configurations. However, valves, flanges and fittings are the focus of this product roundup.
Product Descriptions
In these product descriptions, vendors make pragmatic distinctions to focus on specific intended applications so direct comparisons are difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
Quick Clamp/Metal Seal Flange System
A&N Corporation’s ULRIC™ Vacuum Flange  System combines the temperature and pressure functionality of a traditional copper seal (CF) vacuum flange with the quick installation feature of an ISO clamp system. The ULRIC™ flange system also provides reusable vacuum seals available in stainless steel, copper, or elastomer. The ULRIC™ flange system is a quick clamp assembled, ultra-high vacuum capable flange system. The vacuum seal can be created in two ways—through the compression of a metallic sealing ring onto a “protected knife-edge” or through the compression of a captured elastomer o-ring. ULRIC™ flanges provide a complete range of fittings to mount with tubing sized ¾ inch up to 4 inches in diameter. The flange system consists of two sexless, infinitely rotatable flanges, a re-usable sealing ring that also provides alignment, and a fastener to compress the seal between the two flanges. The flanges are made of 304L grade stainless steel; metal seals are made of copper or stainless steel; elastomer seals are made of Viton® , Buna or silicone; and clamps are available in stainless steel or aluminum. A&N offers a complete line of flanges, fittings,valves, traps, chambers and accessories with ULRIC™ connections that can be used to create a complete vacuum system or pumping line. www.ancorp.com
Poppet, Gate and Ball Vacuum Shut-Off Valves
A&N Corporation offers three types of vacuum shutoff valves: Poppet  Valves, Gate Valves, and Ball Valves. These valves are designed to regulate gas flow through your system with simple open or closed commands. Poppet Valves are made of a body, actuator and internal poppet and are available in three body styles: 90< Angle, In-Line and Angle In-Line. The actuator transports the poppet toward the top of the valve opening the internal body cavity to the system allowing unimpeded flow. When the poppet is actuated to the bottom of the valve, an elastomer-sealing ring is compressed onto a sealing surface creating a vacuum tight seal and stopping flow. Gate Valves offer unimpeded flow with minimal space required for the valve body. A central carriage, or gate, is raised and lowered by the actuator within the body. In the open position, the gate retracts completely from the tube aperture allowing unimpeded flow. In the closed position, an elastomer-sealing ring is compressed against a sealing surface inside the body ports. Ball Valves are robust valves offering unimpeded flow, but are less sensitive to particulate contamination than the other valve types. Ball valves are made of a body, stem, ball and end caps. The ball is compressed in the body by end caps creating a vacuum tight cavity. A hole in the ball provides unobstructed flow in the open position. The sweeping action of the ball against the body seals when actuated clean the ball as it is opened and closed providing a consistent seal.
A&N Corporation
Williston, FL
www.ancorp.com.
Tel: 1-352-528-4100
E-mail: info@ancorp.com
A Broad Range of Adixen™ Vacuum Valve Components
Alcatel has a broad range of Adixen brand valves for virtually  every application. Variations by type: each type of valve (gate, butterfly, angle) is available in different versions, offering different materials, flanges, actuators, etc. to provide the most appropriate solution to any of a wide range of demands. Special valves include a variety of special vacuum valves (vent valves, 3-way valves, leak valves, throttling valves) complements the standard valves. All vacuum valves have the following common specifications: guaranteed tightness, individually tested, standard flanges, high conductance, high reliability, and operation in all positions. www.adixen-usa.com
Adixen™ Flanges & Fittings
To address the vacuum industries requirements,  Alcatel offers a large range of Adixen brand accessories based on the three most popular standards used in vacuum technology: ISO-KF Flanges and Fittings; ISO-K Flanges and Fittings; and CF Flanges and Fittings. For each standard, Alcatel offers the normalized nominal diameters generally used. Moreover Alcatel offers other diameters historically used in the vacuum industry. This offer includes a large range of accessories for each standard such as elbows, tees, 4-way crosses, flexible couplings, reducers and also some special adapters from one standard to another. According to the working pressure, the tightness and the conductance required, fittings will be made with one of the appropriate standards.
Adixen™ by
Alcatel Vacuum Products, Inc.
Hingham, MA
www.adixen-usa.com
Tel: 1-781-331-4200
E-mail: inquiry@adixen-usa.com
BGV Stainless Steel Gate Valve
The Edwards BGV Basement Gate Valves are a range of stainless  steel, bellows-sealed basement isolation valves. They enable pumps to be kept running during fore-line maintenance to maximize the reliability and up-time of pumps operating on harsh processes. These valves were developed for BOC Edwards, a world leader in dry vacuum pumps, in a joint collaboration with VAT, a worldwide leader in vacuum valves, and are available with manual or pneumatic actuation. www.edwardsvacuum.com
GVA/AVA Aluminum Valves
Edwards lightweight aluminum gate and angle valves are the GVA and AVA  series. These valves are designed for high vacuum service and are suited for isolation of roughing lines and forelines in a vacuum process where high conductance is required. An optional position indicator is available, which is activated by a magnet inside the pneumatic actuator providing closure for the open and closed positions. Easy removal of the actuator allows ease-of-servicing while the valve body remains in situ. A minimum number of spares are required for servicing. The GVA/AVA valves provide an operating pressure down to 8 ×10-9 Torr. www.edwardsvacuum.com
IBV Series Vacuum Ball Valves
Edwards ball valves are used in applications where fast  action and full bore pumping are needed. The new BOC Edwards IBV series valves combine these practical everyday features plus ease of use and economy in a high specification design. Manufactured in 316L stainless steel with PTFE seats they deliver robust performance in a wide variety of vacuum duties. The precision engineered ball and PTFE cups contribute to reliable flow control in a high quality construction. This makes them ideal for applications spanning simple vacuum pump isolation to vacuum control in a production, OEM, or industrial laboratory environment. O-ring sealed NW flanged models, used with the unique BOC Edwards co-seal, are rated for pressure duties up to 7 bar absolute. Threaded versions are also available for easy connection into rough vacuum applications. www.edwardsvacuum.com
Industrial Quarter Swing
Edwards quarter swing butterfly valves (QVA) are used for industrial vacuum operations where  conventional vacuum valves fail through particulate contamination or corrosive attack. Unlike conventional vacuum butterfly valves where the seal is fixed to the rim of the valve disc, the QV valves have a sealing liner fixed to the internal valve bore. The valve disc is an all-metal blade with no oring that can roll of the blade rim in dusty conditions. This design approach provides a reliable selfcleaning seal system optimized to reduce seal liner scuffing. As the blade slides over the seal, it pushes debris aside and firmly squeezes the liner into making a vacuum-tight seal against the blade edge. www.edwardsvacuum.com
PV Series Vacuum Valves Manual, Pneumatic & Electromagnetic
Edwards PV series isolation valves are used for traditional clean high-vacuum applications where reliability and performance are a necessity. The PV valves are designed to operate down to 10-9 mbar and up to pressures of up to 2,100 mbar. The bellows are constructed of 316L stainless steel and are 100% grease free while the bodies are available in either HE30TF aluminum or AISI 304L stainless steel. In addition to manual, pneumatic or electromagnetic operation, the PV valves are available in either right angle or inline configurations with flange sizes ranging from NW10 to NW50 except the PVEK version which is available from NW10 to NW40.
Edwards
Wilmington, MA
www.edwardsvacuum.com
Tel: 1-800-848-9800
E-mail: info@edwardsvacuum.com
Huntington Bakeable All-Metal Valves
A reliable bonnet seal even after bakeout and re-torquing, is assured with Huntington’s patented “Tri-Flange” design for All-Metal Bakeable Valves. The Huntington “Tri-Flange” valves use malleable OFHC® copper bonnet and poppet seals that can be easily replaced. A coaxial shaft with a hand knob attached to an outer fast-advance shaft allows the user to rapidly open and close the valve actuator by hand. The hex nut attached to the fine pitch threaded inner shaft accomplishes the final sealing force with the help of a torque wrench. Ball bearings separate the shaft from the poppet bellows assembly to prevent twisting of bellows as sealing contact is achieved. The entire unit is bakeable. The sealing integrity of Huntington’s patented all-metal valves is not affected by bakeout temperatures to 450°C. When baked, the valves must be under vacuum on both sides to prevent scaling particles from dropping into the seat area. Features include: a patented tri-flange design provides high integrity bonnet seal even after bakeout; torque nut; bonnet torque flange bolts (takes all reactive forces when torqued closed); Tri-Flange design (Patented) (no bonnet leak after torque down); Acme/Coaxial Shaft (fast close/high integrity seal); welded bellows; thrust-bearing supported poppet (longer cycle life) ; radiused poppet gasket (long gasket life) ; conical sealing seat (no ledges to trap contaminants); poppet seal screw (easy gasket removal); unibody design, no welds (no virtual leaks); bonnet gasket; bonnet seal flange bolts (no reactive force to cause leaks); and hand knob (fast open/close).
Right-Angle, In-Line and Straight-Through High Vacuum Isolation Valves for High Conductance
Huntington Mechanical Laboratories, Inc. manufactures vacuum  valves for equipment manufacturers and research facilities. They include right-angle, inline and straight-through high vacuum isolation valves, which are full-opening for high conductance. Manual rightangle metal seal valves provide bakeable UHV isolation. Huntington offers wide size range of butterfly valves. Gate valves provide chamber and pump isolation, and like most of our valves, are available with manual or pneumatic actuators, position indicators, solenoids and other options. A complete range of sizes and flanges are available to suit all vacuum applications. Modified or custom valves are available.
Huntington Mechanical Laboratories, Inc.
Mountain View, CA
Tel: 1-800-227-8059
Semiconductor Process Valve
New from Kurt J. Lesker Company, their unique  Protection Vacuum Gate Valve’s fast action (<0.3 sec. to close) protects products that are ‘in-process’ in the event of a vacuum pump failure. This bellows - sealed, pneumatically-actuated, SS valve system monitors up to four pumps with local or remote control and LCD status display. The patented internal mechanism has a low particle generation design and is shielded, in open and closed positions, against particulate accumulation—leading to long life under adverse process conditions. The protection valve is available in two models: 100 ISO-K or a 160 ISO-K flange. www.lesker.com
Angle Valves
Kurt J. Lesker Company’s stainless steel right angle valves are  reliable, economical, general-purpose components for HV and UHV applications that require cleanliness and corrosion resistance. These welded stainless steel bellows-sealed valves offer long-life operation (up to 1,000,000 cycles), and are available with QF, ISO, or Conflat® flanges. Standard tube ends or custom configurations are available for compatibility with existing equipment. These high quality valves are designed for vacuum pressures to 1 × 10- 9 Torr, and can withstand baking to 150°C. Copper bonnet seals are available on the Conflat® flanged valves for applications demanding UHV pressures, and temperatures up to 200°C. Both manual and pneumatic versions are available. www.lesker.com
In-line Valves
Kurt J. Lesker Company’s stainless steel in-line valves are  reliable, economical, general-purpose components for HV and UHV applications that require cleanliness and corrosion resistance. These welded stainless steel bellows-sealed valves offer long-life operation (up to 1,000,000 cycles), and are available with QF, ISO, or Conflat® flanges. Standard tube ends or custom configurations are available for compatibility with existing equipment. These high quality valves are designed for vacuum pressures to 1 × 10-9 Torr, and can withstand baking to 150°C. Copper bonnet seals are available on the Conflat® flanged valves for applications demanding UHV pressures, and temperatures up to 200°C. Both manual and pneumatic versions are available. www.lesker.com
CF, KF/ISO, and ASA Flanges, Components and Hardware
Kurt J. Lesker Company’s comprehensive vacuum component offering  includes all of the common flanges and fittings you need. Strategic inventories of CF, KF/ISO, and ASA flanges, components, and hardware are available at competitive prices for same-day shipment. Our selection provides a reliable and economical source for high-end components for both HV and UHV applications. Kurt J. Lesker Company is focused on our customers’ supply chain requirements and we’ve created new tools to make doing business easier. VacuCADSM is our free downloadable drawing program with 1000s of 3D and 2D product drawings of Kurt J. Lesker Company manufactured products available. Go to the Downloads section at to register for this invaluable tool.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Ray Pokorny
Tel: 1-412-387-9200
E-Mail: raymondp@lesker.com
MC+ 300mm Transfer Valve
MDC’s MC+ 300mm Transfer Valve High Vacuum Series of 150°C Viton® O-Ring Sealed Bonnets  feature: 2 million Cycles between maintenance; Bellows sealed actuator; virtually particle and vibration-free; double acting pneumatic actuator with position indicators; aluminum body and Gate maintain status in the event of power failure; pneumatically locked in the closed position; and LCD counter for tracking cycles. Specifications are: materials—body & gate aluminum; bellows AM-350 ss; bolts 300 Series ss; seals bonnet Viton® ; gate Viton® ; with options Different sealing materials on request. They have an electropneumatic actuator; air pressure 70 to 100 psig; air control valve Humphrey 3 position, 4 way solenoid valve; solenoid voltage 24 VDC, 120 VAC, 240 VAC; power loss valve maintains status; position indicators are Solid state, NPN Sensors; closing and opening time < 1 sec; a Vacuum Range 1×10-8 Torr and a Leak Test 2×10-10 cc/sec of He. www.mdcvacuum.com
1 Million Cycles 1.5 Inch Gate Valve
MDC’s high cycle 1.5 inch gate valve is designed for  HV and UHV application. Performance reliability and value are the main characteristics of this new and improved valve. It has the same multiple port connections and options as MDC's standard Gate Valve Line for customer convenience. The key features and advantages of this new valve are: 1,000,000+ cycles with minimal maintenance; reduced vibration for quieter operation; mechanically locked in the closed position; direct shaft-gate assembly connection for faster actuation; and low particle generation due to reduced internal parts. www.mdcvacuum.com
Gate Valve Assemblies
MDC Gate Valve assemblies consist of three key  components: an actuator, a carriage/gate and a valve body. The actuator provides the power to position or transport the valve’s carriage/gate. The actuator is attached to the valve’s body via a rectangular bonnet flange. The gate closes or opens one of the valve’s body ports. The valve body is a vacuum tight chamber that is screwed, flanged or welded into a larger vacuum vessel or system. MDC stainless steel vacuum gate valves incorporate patented C-Loc™ and Uni-Loc™ gate valve locking mechanisms. No contact is made between a valve’s body and the locking mechanism, a feature that markedly decreases vibration and insures smooth valve operation. MDC gate valves require about half the number of moving parts found in comparable competitor valves. This reduction in moving components minimizes wear and particulate generation which in turn provides valves of superior performance and reliability. The valves’ low outgassing characteristics can be attributed to a fusion welded 300 series stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section O-rings and the elimination of blind internal cavities. MDC gate valves are offered in various sizes ranging from 0.625-inch to 12-inch port diameters. Standard port mounts include: Del-Seal™ CF metal seal flanges, which are recommended for ultrahigh vacuum service; ISO Kwik-Flange™ and ISO Large-Flange™ fast make and break elastomer sealed flanges, ideal for high vacuum applications requiring frequent assembly and disassembly; and ANSI ASA elastomer seal port flanges for use in high vacuum applications where ANSI standards are specified. Gate valve actuation is available in both manual and electropneumatic configurations. Custom designed valves are available on request. Options include modular Electromechanical position indicators, air control solenoid valves for 240 VAC and 24 VDC service, valve body roughing ports, and high temperature 250°C Kalrez® elastomer gate seals. www.mdcvacuum.com
Stainless Steel Vacuum Gate Valves
MDC’s new line of EZ-Lock Gate Valves is engineered for performance reliability and value. They have the same envelope dimensions, allowing for a direct replacement of the standard MDC Gate Valves. The key features and advantages of this new line of valves are: shock free locking mechanism; low vibration, quiet operation; remains closed in case of loss of power or air; low particle generation; and aluminum or Stainless Steel Gate Assembly option for customer convenience. www.mdcvacuum.com
MDC EZ-lock gate valves
MDC’s vacuum angle and inline valves are devices that regulate the flow of gases, fluids or materials through a structure or aperture by opening, closing or obstructing a port or passageway. MDC stainless steel vacuum angle and inline valves have been designed for maximum conductance and minimum size for easy installation. These valves are ideally suited for systems requiring high reliability and low outgassing. The valves’ low outgassing characteristics can be attributed to a fusion welded 304 stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section elastomers and the elimination of blind internal cavities. MDC angle and inline valves are offered in various sizes ranging from 0.25 to 10 inches port diameters. Standard port mounts include: Del-Seal™ CF metal seal flanges, recommended for ultrahigh vacuum service; ISO Kwik-Flange™ and ISO Large-Flange™ fast-make and fast-break elastomer seal flanges, ideal for high vacuum applications requiring frequent assembly and disassembly. Optional Features include electromechanical position indicator; magnetic reed switch position indicators; air control solenoid valves for 240 VAC and 24 VDC service; and a high temperature 250°C Kalrez® elastomer poppet seal. www.mdcvacuum.com
All-Metal Angle & Inline Valves
MDC’s bakeable all-metal angle and inline valves are  designed for use in ultrahigh vacuum environments where elevated temperatures preclude the use of elastomers and low temperature gasket metals. These valves provide reliable high temperature seals from atmospheric pressures to below 10-11 Torr. Wherever possible, bonnet gasket seals have been eliminated in an effort to minimize the number of potential leak paths. Valves fitted with bonnet seals have been so designed to facilitate gasket replacement. The size and orientation of the valve body ports on bonnet fitted valves precludes gasket removal through its ports. When operated at ambient temperatures, all-metal valves provide hundreds of leak free cycles between routine poppet gasket replacements. In high temperature applications, life cycles are inversely proportional to the bakeout temperatures. When operated at the maximum bakeout temperature of 450°C, the poppet seal gasket life is reduced to approximately 50 open/close cycles. A vacuum seal is made by pressing the poppet OFE copper gasket onto a conical stainless steel knife edge seat as depicted in the diagram at top-right. The sealing pressure deforms the copper gasket, which conforms to the conical knifeedge seat. During thermal cycling the valve’s loading mechanism counteracts component differential expansion to maintain a uniform pressure necessary for seal integrity. Poppet gasket replacement for the 1- 1 /2 and 2- 1 /2 inches all-metal angle valves must be done by removing the valve from the system, as these two valves have welded bonnets. Once detached from the system, gasket replacement is easily accomplished by inserting a standard blade screwdriver into the bottom port and unscrewing the copper gasket, which is then extracted through the side port of the valve. The 3 /4 inches angle valve and all inline valves are fitted with bonnet seals and do not require complete removal from the system for gasket replacement. Gasket removal and replacement is performed by detaching the bonnet flange from the valve body. Once the bonnet has been opened the gasket is easily detached by unscrewing with a standard blade screw driver. The all-metal ULV series precision ultrahigh vacuum leak valves are designed to control gas admission into high and ultrahigh vacuum systems. They are manually actuated via a cantilever arm fitted with extra-fine pitch threads for precise adjustment. They are ideally suited for handling hot and corrosive gases commonly used in demanding research environments. The valve body is constructed of type 304 stainless steel and a replaceable OFE copper seat. The valve poppet is made of high purity sapphire and is also replaceable. ULV series precision leak valves are shipped in a leak-tight condition. Leak rates are controlled by relieving the pressure applied to the replaceable copper seat. Leak rates are adjustable down to a minimum of 1 × 10-10 Torr l/sec. www.mdcvacuum.com
MDC butterfly valves
MDC's Butterfly valves require only one-quarter turn rotation of the handle to go from fully open to the fully closed position. In the 1- 1 /3 inches Mini Del-Seal™ CF flange series, a spring loaded ball bearing becomes seated in an indent providing a positive mechanical stop. All other size valves employ a roll pin stop method. These quick-acting Butterfly Valves feature an improved sealing action. The opening in the body of the valve has been machined at a slight angle to the plane of the flapper. The flapper is set to rotate slightly off-center. On closure, this causes the sealing pressure to be applied more uniformly all around the O-ring. A reliable, positive seal is made and the tendency of previous designs to roughen the surface of the O-ring and eject it from its groove is eliminated. MDC Butterfly Valves are low outgassing. All internal surfaces are machined from solid stainless steel bar stock. The handle is made of aluminum. A small O-ring on the stem prevents shaft leakage. The valves are offered with a choice of Del-Seal™ CF ultrahigh vacuum metal-seal flanges or ISO Kwik-Flange™ O-ring seal flanges. www.mdcvacuum.com
Stainless Steel Vacuum Angle and Inline Valves
MDC’s stainless steel angle and inline valves have been designed for  maximum conductance and minimum size for easy installation. These valves are ideally suited for systems requiring high reliability and low outgassing. The valves’ low outgassing characteristics can be attributed to a fusion welded 304 stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section elastomers and the elimination of blind internal cavities. The angle and inline valves are offered in various sizes ranging from 0.25 to 10-inch port diameters. Standard port mounts include: Del-Seal™ CF metal seal flanges, recommended for ultrahigh vacuum service; ISO Kwik-Flange™ and ISO Large-Flange™ fast-make and fastbreak elastomer seal flanges, ideal for high vacuum applications requiring frequent assembly and disassembly. www.mdcvacuum.com
Bakeable All-Metal Angle and Inline Valves
MDC’s bakeable all-metal angle and inline valves are designed for use in ultrahigh vacuum environments where elevated temperatures preclude the use of elastomers and low  temperature gasket metals. These valves provide reliable high temperature seals from atmospheric pressures to below 10-11 Torr. Wherever possible, bonnet gasket seals have been eliminated in an effort to minimize the number of potential leak paths. Valves fitted with bonnet seals have been so designed to facilitate gasket replacement. The size and orientation of the valve body ports on bonnet fitted valves precludes gasket removal through its ports. When operated at ambient temperatures, all-metal valves provide hundreds of leak free cycles between routine poppet gasket replacements. In high temperature applications, life cycles are inversely proportional to the bakeout temperatures. When operated at the maximum bakeout temperature of 450°C, the poppet seal gasket life is reduced to approximately 50 open/close cycles. www.mdcvacuum.com
Soft-Start Angle Valve
MDC’s Soft-Start angle valves provides a smooth pressure transition gradient from atmosphere to  vacuum. A small 0.062-inch diameter adjustable aperture is activated independently from the main valve opening. Regulation of air flow through the bypass valve is made using an adjustment screw and observing the pressure change. Once the correct setting has been empirically determined, the adjustment screw is held in place with a knurled lock nut to assure consistent and repetitive air flow. The softstart is activated first through a solenoid valve. The main valve may be activated automatically through a set point controller. The soft-start feature provides a smooth pressure change where an abrupt or turbulent flow would disrupt delicate processes or instrumentation in the vacuum chamber. MDC angle valves with a Soft-Start bypass valve are offered in various sizes ranging from 1- to 2-inch port diameters.
MDC Vacuum Products Corporation
Hayward, CA
www.mdcvacuum.com
Tel: 1-510-265-3544
E-mail: Kallen@mdcvacuum.com
Vari-Q Throttle Valves
MeiVac, Inc. Vari-Q throttling valves are standard equipment on MeiVac/Comptech Sputtering systems  used in the Magnetic Storage industry. Vari-Q throttle valves are part of the MeiVac Component Division, which include the recently acquired U.S. division Sputter Sources, Deposition Power Supplies and Substrate Heaters. VQ ambient temperature valves represent the standard for linear, reproducible pressure control and process repeatability. Advanced process control is combined with excellent reliability that is provided by unique counter-rotating vanes. Vane drivers are available as pneumatic or servomotor actuation. Adaptability to commercially available pressure control systems provides ease of installation and integration. Recent improvements in controller technology have provided an integrated High Speed option with an actuation time of ½ second. The smart technology of this controller provides a system learn function and an adaptive algorithm for mapping the response characteristics of your unique vacuum system. Flange sizes for the VQ range from 80 mm to 35 inch diameters. Flange types are available in ISO, JIS, CF and ASA versions. Process Control is offered in either Upstream or Downstream versions and easily upgradeable at a later time.
MeiVac Incorporated
San Jose, CA
Tel: 1-408-362-1000
Electromagnetic Cv™ Valv
The MKS HPS® Electromagnetic Cv™ valve can be used in  place of any existing MKS HPS Cv valve where electric actuation is preferred over pneumatic or manual actuation. The ECv valve is actuated by a direct current electric power supply, and consequently, does not require the use of a pneumatic system. The ECv valve’s actuation system is retrofitable in any current HPS Cv valve. The valve has a low profile, linear solenoid mounted to the top of the valve, that serves as the valve actuator. When power is applied to the solenoid, the solenoid is energized, causing the valve to open or close, depending on the configuration. Each valve includes a coil saver circuit integrated with the input power cable. The coil saver circuit offers a more efficient solenoid coil operation by limiting the power usage of the coil, once the valve has been actuated. This in turn allows the valve to operate without excessive heat generation, remaining safe to the touch. options are available in either 12 VDC or 24 VDC. The valve is offered in the angle and inline configurations with multiple fitting options. The body is comprised of high grade, corrosion resistant, non-magnetic 304 stainless steel. The formed bellows assembly is made of 321 corrosion resistant stainless steel. Metal bonnet seals of either nickel or copper are available as standard options. Kalrez, Silicone, Viton and Chemraz are also options for both the bonnet seal and nose piece. For remote indication of valve position, a limit switch option can be specified within the part number ordering system. While the ECv valve is primarily used as a gauge or system isolation valve, its high conductance, low vibration design, and low temperature operation, make it the most versatile solution to your compact and economical valve requirements. www.mksinst.com
Integrated LoPro™ (ILP) Two Stage Poppet Valve
Vacuum systems often require a slow initial evacuation of the  roughing or loadlock area of the system. This process is called soft start or soft pumpdown. The soft start process reduces turbulent flow during initial system evacuation, diminishing product contamination and damage. Often a bypass line is used to soft start a system, which utilizes system space and can clog, requiring frequent cleaning and maintenance. The MKS HPS® Integrated LoPro™ Two-Stage (ILP) has been designed to replace the bypass line. The ILP accommodates the space constraints found on vacuum applications like loadlock and transfer chambers specifically in semiconductor or optical processing for which a cleaner environment is necessary. A heater jacket is available for processes with condensable materials. The ILP is a pneumatically-actuated poppet valve with a bypass valve combined into a single unit. The main valve is a normally closed bellows sealed valve. The bypass valve is a spring to close, o-ring sealed valve located within the main stage. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed. www.mksinst.com
Multiple Stage Valves
MKS Instruments’realizes that vacuum systems often require a slow initial evacuation (called a soft start) of the roughing or loadlock area of the   system. The soft start process reduces turbulent flow during initial system evacuation, diminishing product contamination and damage. Often a bypass line is used to soft start a system, which utilizes system space and can clog, requiring frequent cleaning and maintenance. The MKS HPS® Multiple Stage Valves have been designed to replace the bypass line. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed. The main valve is a normally closed bellows sealed valve. Formed bellows within the main valve make it resistant to particle damage. The angle and inline configurations are available in 1 to 4 inches sizes. These valves can be tailored to the users needs with options available in flanges, seals, solenoids, bypass configurations and a limit switch. Heated models are available for processes with condensable materials. The available HPS models are the Two-Stage Valve; LoPro® Two-Stage Valve; Integrated LoPro Two-Stage Valves; and Jalapeno Two-Stage Valves. www.mksinst.com
Heated Valves
MKS Instruments’knows many processes create by-products that can solidify within a vacuum  system on the walls of components. These by-products clog the system and can flake off and backstream, damaging product. The systems are subject to frequent downtime for maintenance. By heating critical components, like valves, the by-products stay in a gaseous state and can move through the system for trapping or other disposal. MKS HPS® heated valves are specifically designed for use in such systems. The heater jackets are molded to match the shape of the valve they are intended to heat. Each valve heater is designed for optimal temperature distribution and uniformity. MKS HPS angle and inline heated valves are available with single or multiple stages and standard or low profile bodies. They range in size from NW 25 to NW 100 (1 to 4 inches). The valves include choices of seals, solenoids, bypass configurations (for the two-stage models) and limit switches. The available HPS models are Jalapeno Valves; Jalapeno Two-Stage Valves; Jalapeno LoPro Valves; and Series 170/180 Valves. www.mksinst.com
Sensor Isolation and Leak Test Port Valves
MKS HPS® has developed two compact vacuum valves  for gauge isolation and leak check ports. The Cv Valve is an extremely compact single stage poppet valve. It is ideal for isolating sensors on a system or closing off leak check ports. It is available in angle or inline models, ¾ or 1 inches port sizes, pneumatic, toggle manual or knob manual actuation. There is a choice of seals, flanges, solenoids and a limit switch option. The IDA Valve is a three port, dual body valve used in vacuum gauge isolation. The IDA Valve consists of a pneumatic primary valve and a manual secondary valve. It isolates Baratrons and other sensors from the vacuum system while providing good conductance to the sensor. The third port allows for in-situ calibration of sensors, increasing system production though increased uptime. By installing an IDA valve, calibration time can be reduced from 8 hours to under an hour. Available HPS models are the Cv Valves and IDA Valves.
MKS Instruments
Wilmington, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-978-284-4000
E-mail: mks@mksinst.com
T3Bi Digital Exhaust Throttle Valve for DeviceNet™ Networks
The MKS Type T3Bi Intelligent Exhaust Throttle Valve is specifically designed for computer integrated applications where a simple pressure control system is desired. The T3Bi integrates all control, communication, and driver circuits via a compact “add-on” electronics module onto a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The self-tuning control algorithm drives the system to set point rapidly and with minimum overshoot, and ensures repeatable process recipes without operator involvement. The Type T3Bi valve operates in two modes: flapper positioning or pressure control, either of which can be useractivated through the DeviceNet™ communications interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through this interface. The “intelligent instrument” concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. System design, installation, maintenance, and labor costs are reduced as compared to the traditional analog I/O. The valve driver provides high resolution pressure control. The robust, high torque motor provides extended uptime and reduces preventative maintenance cycles—a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The valve is constructed of corrosion-resistant 316stainless steel for the toughest process gases and is available in a variety of standard flange styles and seals. www.mksinst.com
T3P Integrated High Speed Pendulum Valve and Controller
MKS T3P Pendulum Valves have been designed for the most demanding semiconductor and thin  film applications. T3P valves feature a wide control range and high valve speed to enable fast, precise and reliable pressure control for all etch, deposition and chamber clean process steps—including those with reduced flows or at high pressures. The ability to precisely control conductance over the entire valve stroke, including near-closed positions, enables recipe pressures to be reached quickly and with minimal overshoot. With its advanced self-tuning control, the T3P valve provides superior process stability and maximizes throughput. Combining wide dynamic range pressure control and isolation capabilities into a single unit, the T3P valve reduces cost and system complexity. An on-board digital controller supports multiple communication protocols—including DeviceNet™ and RS232, adding the T3P to MKS’portfolio of digitally controlled products. By combining the T3P with industry standard MKS Baratron® capacitance manometers, MKS provides the optimal solution for pressure measurement and process control. The mechanical design features of the T3P include MKS’ patented CAM mechanism providing a symmetrical and linear control and a space-saving low profile design. A simple operating mechanism featuring a minimal number of moving parts and fewer wetted stainless steel components, provides virtually particlefree operation.
MKS Instruments, Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS Pressure Control Applications Engineering
Tel: 1-978-284-4000
E-mail: mks@mksinst.com
Intellisys Pressure Control
Nor-Cal Products offers unequalled performance with the Intellisys downstream pressure control system,  providing measurable process benefits through higher resolution, speed and reliability. The Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provide advanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps during pressure transition. A Digital Signal Processor (DSP) enables DeviceNetTM communications protocol and programming flexibility for customer or process specific requirements. Intellisys motor control technology eliminates belts, gears and position switches, improving reliability, while increasing speed by at least a factor of twenty. Hightorque geared drives are also available as an option. Standard sizes range from one to twelve inches. Substantial cost and space savings can be realized with the IQ-Series butterfly valves. All the control electronics are incorporated on to the valve motor drive, resulting in a compact size that is easy to integrate on any system. Heated, nonheated and DeviceNet™ compatible gauges are available with several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. Our Universal Valve Drive (UVD) easily replaces older drive technology found on other manufacturers' pressure control valves. When used with our APC, the universal valve drive can upgrade a competitive valve to approach Intellisys performance levels. www.n-c.com
New JV Series Vacuum Valves in KF 16-50 Sizes
Nor-Cal Products, Inc.’s JV series valves are  designed to meet the demanding high-cycle requirements of semiconductor equipment manufacturers, yet offer the researcher a cost-effective solution for UHV system roughing. In addition to pneumatic actuation, these valves offer a unique manual actuator for course throttling, which allows partial opening by specified and repeatable intervals. Electromagnetic actuators are available for portable or table-top systems that do not have compressed air available. Right-angle and inline bodies are available in low-cost aluminum or stainless steel with KF 16, 25, 40 and 50 flanges. Features include five million cycle rated, small footprint and a wide range of options. Actuation may be electromagnetic or pneumatic with manual course throttling. Body styles are right angle and in-line with either aluminum or stainless steel construction. Other options include position indicators, ”Snap-on” coils on the electromagnetic actuator. Special oring materials are available. www.n-c.com
EVAC Flange General Information OK Online
Nor-Cal Products stocks a complete line of EVAC chain clamps and aluminum metal seals for converting  elastomer seal NW (KF) and ISO flanges to UHV metal seals. They provide a number of benefits over elastomer seals: reduced outgassing, no permeation, no hydrocarbons, resistance to radiation and short half-life. EVAC seals are used in high-energy physics, other UHV applications and, in some circumstances, cryogenic applications. EVAC seals are reliable in high vibration or temperature cycling environments. EVAC chain clamps and tapered flanges are the standard vacuum flange for many Japanese semiconductor equipment manufacturers. The advantages over using the standard ISO flange are the time and space savings during assembly and the flexibility to form high vacuum or UHV seals. Nor-Cal Products stocks blank and bored NW-63 flanges that are compatible with other manufacturers’ KF-63 flanges made to the ISO 2861 specification. They can be used with EVAC chain clamps to form elastomer or aluminum metal seals. Elastomer seals are formed with ISO-63 centering ring/Oring assemblies and elastomer EVAC chain clamps. Metal seals are formed with EVAC aluminum seals and metal seal chain clamps. NW-63 flanges are made from 304 stainless steel for 2.5 inch OD tube size. Nor-Cal Products is the only authorized U.S. manufacturer of EVAC tapered flanges. These flanges are designed specifically for use with EVAC chain clamps for elastomer or aluminum metal seals. High vacuum seals are formed with a standard ISO centering ring/O- ring assembly and an elastomer seal EVAC chain clamp. UHV seals are formed with a metal seal chain clamp and an aluminum seal. Both blank and bored 304 stainless steel versions are available from stock in 80 and 100mm sizes for 3 and 4 inch OD tube sizes, respectively. Flanges for tube sizes up to 28 inches OD or metric tube sizes can be supplied upon request. www.n-c.com
NW Flange General Information OK Online
Nor-Cal Products NW flanges are designed to ISO 2681 specifications  for standard USA tube sizes from 3 /8 to 2 inches OD. They are compatible with other manufacturers’ ISO-KF style flanges. NW flanges utilize an aluminum clamp with a single wing nut fastener or a lock-over-center clamp allowing frequent disassembly without tools. The vacuum seal is effected by the application of uniform pressure from the clamp on the 15º surface of the 304 stainless steel flanges. The mating flange surfaces compress a Viton O-ring held in place by a centering ring. The resultant seal can be used in vacuum applications of up to 10-8 Torr and baked to 204ºC, however sustained baking above 150ºC may result in deterioration of Orings. Additionally, NW flanges allow components to be rotated before assembly for ease of component alignment. NW flanges are available on virtually all Nor-Cal components and fittings. Nor-Cal manufactures a full line of NW adapters so you can add to or build an entire system with NW components. NW flanges can also be used with EVAC chain clamps and aluminum seals to obtain a UHV seal bakeable to 150ºC. www.n-c.com
ISO Flange General Information OK Online
Nor-Cal Products ISO flanges and hardware are manufactured to the International  Standards Organization specification so they can be mated to other manufacturers’ ISO flanges. ISO flanges are made from Argon Oxygen Decarburization (AOD) 304 stainless steel. This material is certified to meet ASTM-240 and has less than 0.01% sulfur in order to prevent sulfur stringers. Grain size is 3 to 6 per ASTM E-112. Maximum inclusion size is 2.5 per ASTM E-45. Normally our standard material is in the low carbon range for 304 stainless steel. For increased corrosion resistance, some sizes are available from stock in 316L stainless steel. Optional fastener and nonrotatable ISO flanges are available from stock for 2- 1 /2 to 20 inch tube sizes. Both use a Viton O-ring, held in place by a centering ring, to effect a seal with a vacuum range of 10-8 Torr. ISO components can be baked to 204ºC. ISO flanges can also be used with standard clamps and aluminum seals to obtain a UHV seal bakeable to 150ºC. www.n-c.com
ASA Flange General Information OK online
Nor-Cal Products’ASA flanges are manufactured from specially treated 304 stainless  steel. These flanges mate with standard 150 lb. ASA flanges or 150 ANSI flanges. They are available from stock for standard tube sizes from 2 to 12 inches. Larger sizes are available upon request. Nuts and bolts are used to apply pressure between the mating flanges and a seal is effected when a Viton Oring is compressed. ASA flanges can be baked to 204AC and have a vacuum range of up to 10-8 Torr. Besides being sold separately, they are available as standards on nipples, adapters, tees, crosses, elbows and valves. When components of several systems are used interchangeably, use of rotatable flanges is recommended. Assembly is facilitated by rotation of mating flanges, to align bolt holes. Nonrotatable ASA flanges, unlike rotatable, contain both sealing surface and bolt holes in one unit rather than two. This makes the nonrotatable flange less expensive, and therefore the preferred choice when mating component orientation is not a concern. www.n-c.com
CF Flange General Information OK online
Nor-Cal Products CF flanges are compatible with other Conflat style  flanges and are available in sizes from 11 /3 to 161 /2 inch OD for 1 /4 to 14 inch tube diameters. Flanges 4- 1 /2inch OD and smaller are made from 304 electroslag remelt (ESR) bar stock. ESR is a refining process that produces stainless steel with higher purity, fewer inclusions and more uniform grain structure to eliminate microscopic leak paths. Larger CF flanges are made from Argon Oxygen Decarburization (AOD) 304 stainless steel. This material is certified to meet ASTM-240 and has less than 0.01% sulfur to prevent sulfur stringers. Grain size is 3 to 6 per ASTM E-112. Maximum inclusion size is 2.5 per ASTM E-45. Normally our standard CF material is in the low carbon range for 304 stainless steel. As specials 304L and 316L material can be supplied in AOD or roll-forged rings. Machining is consistent with good UHV practice. Machine coolant is sulfur free to reduce outgassing. State-of-the-art CNC machine centers are used to produce flanges with consistent high quality. Flanges are machine washed in approved aqueous detergent after machining. Chem-cleaning and clean room packaging are available. CF flanges utilize an OFHC copper gasket to produce a vacuum tight seal up to 10-13 Torr, even when baked repeatedly to 450ºC. When the copper gasket is compressed between the knife edges of CF flanges, its material flows laterally to fill surface imperfections. Nor-Cal offers CF flanges in rotatable as well as nonrotatable versions. Nonrotatable CF flanges, unlike rotatable, contain both sealing surface and bolt holes in one unit. This makes the nonrotatable flange less expensive, and therefore the preferred choice when mating component orientation is not a concern.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Contact: Jacquie Daniel
Tel: 1-800-824-4166 toll free or 1-530-841-9153
E-mail: jacquiedaniel@n-c.com
Vacuum Valves
Oerlikon Leybold Vacuum has extensive experience in vacuum  technology and this is reflected in the design of our vacuum valves and fittings used in a wide variety of applications. The Oerlikon Leybold Vacuum family of valves and fittings are engineered for high reliability and extended life with select valves exceeding 10 million actuations. The latest manufacturing techniques and modular design allow for the highest quality product at a price equal to lesser designs. The valve and fittings product family includes: Right-angle and straight-through valves in the flange range of 16 to 40mm (ISO-KF16 to ISO-KF40); Rightangle valves in the flange range of 63 to 1000mm (ISO-K63 clamp flanged to ISO-F1000 bolt flanged); Gate valves in the flange size 16 to 250mm available with various flanges; Electromagnetic, electro-pneumatic or manual operation; Visual and remote position indicators; Corrosive gas series; Specialty valves – precision leak valves, safety venting valves and vacuum locks also are available; Array of connection fittings and flange types ISOKF, ISO-K, ISO-F and CF type; and Low leak rates.
Oerlikon Leybold Vacuum
Export, PA
Contact: Mike Ridenour, Product Support Manager, Gauges, Valves & Fittings
Tel: 1-724-325-6593
E-mail: mridenour@leyboldvacuum.com
Angle and Inline Valves
Pfeiffer Vacuum introduces a new series of angle and inline valves  that are suitable for applications in the high vacuum range. The valves feature a robust design that is resistant to contamination, increases service life significantly, and makes them ideally suited for industrial applications. Pfeiffer Vacuum’s new valves are available in DN 16, 25 and 40 ISO-KF sizes. This new series of manually, electropneumatically and electromagnetically operated angle and inline valves feature improved conductivity, resistance to differential pressure and short response times. The electropneumatic and electromagnetic valve models are equipped with an integrated position indicator. The electromagnetic valve has the pressure pilot integrated into the case. www.pfeiffer-vacuum.com
CF UHV Components
Pfeiffer-Vacuum’s CF UHV components are convenient and offer great  flexibility in the design and construction of high and ultrahigh vacuum systems. Fittings such as connecting bolts and screws, copper and Viton seals, blanking and welding flanges, pipe components and bellows and adjusting components are some of the components offered. Most common parts are in stock and available for immediate delivery. CF flange components for UHV applications comply with standard ISO 3699 (Pneurop 6606). Standard Stainless steel components are made of steel 1.4306 (304L). CF flanges are available in steel 1.4429 (316LN). Flange components made of steel 1.4429 (316LN) have a very low magnetic permeability and have harder knife edges. The starting material is specially annealed in a low-hydrogen atmosphere. www.pfeiffer-vacuum.com
ISO-K Clamping Flange Connections
Pfeiffer-Vacuum’s ISO-K Clamping Flange Connections are an economical  system of reusable and interfacing stainless steel vacuum fittings. These flanges can operate in high vacuum environments and are ideally suited for applications requiring rapid and frequent assembly and disassembly. The Clamping flange components range from claw clamp and claw grip, centering and o-ring seals, blanking and welding flanges to pipe components including a 90B elbow, a Tpiece and a cross-piece. Most common parts are in stock and available for immediate delivery. ISO-K/F Clamping flange components comply with DIN 28404 or Pneurop 6606. www.pfeiffer-vacuum.com
ISO-KF Small Flange Connections
Pfeiffer-Vacuum’s ISO-KF Small Flange Connections are an economical system of reusable interfacing stainless steel vacuum fittings that can operate in high  vacuum environments. The small flange components are ideally suited for applications requiring rapid and frequent assembly and disassembly. The Small Flange components include reducing centering, mesh centering, O-ring, aluminum and indium seals as well as blanking flanges, short and long pipe socket flanges and a large assortment of pipe components including 45B and 90B configurations. Most common parts are in stock and available for immediate delivery. ISO-KF Small Flange components comply with DIN 28403 or Pneurop 6606.
Pfeiffer Vacuum Inc.
Nashua, NH
www.pfeiffer-vacuum.com
Tel: 1-603-578-6500
E-Mail: valves@pfeiffer-vacuum.com
Wide Range of Vacuum Valves
Vacuubrand offers a wide range of vacuum valves including manual   ball valves, diaphragm valves, right angle bellows valves and butterfly valves. Also offered are small manual and electronic air admittance and isolation valves for use in fine and rough vacuum applications. Complete specifications are available on request. Typical sizes are ISO KF NW 10, NW 16, NW25 and NW 40. The valves are manufactured in Germany of the highest quality materials, such as brass, stainless steel and aluminum, using state of the art CNC machinery. Complete specifications are available. Please call or e-mail.
Vacuubrand Inc.
Essex, CT
www.vacuubrand.net
Contact: Bob Freeman
Tel: 1-888-882-6730
E-mail: vbrand@vacuubrand.net
Roughing Angle Valves
Vacuum Research’s angle valves for roughing in sizes from NW to16 to NW to 50 are  available with aluminum or stainless steel bodies Both manual and electro pneumatic actuators are available and the shaft seal can be either welded bellows or O-rings. Optional features include electronic position indicators and gauge ports with VCR-4 or 1 /8 inch NPT threads. www.vacuumresearch.com
Large Vacuum Valves
Vacuum Research’s Gate and angle style valves with port  sizes up to ISO-600 or 24 inch ANSI. Available in aluminum or stainless steel with flanges to fit any cryo. turbo or diffusion pump. Pneumatic, electric motor and manual actuators are available. Optional features include gauge ports with NW flanges from 16 to 50 mm and roughing ports up to ISO-250 or ANSI 10 inch. www.vacuumresearch.com
Throttle Valve with Leak Tight Shut Off
The Vacuum Research Throttlemaster™ Valves with leak tight shut off  eliminates the need for separate throttle and isolation valves. Suitable for 3 position or full PID appli | | |
