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Article | Vacuum Valves, Flanges and Fittings for Processes and Systems
Compiled by Terrence Thompson, Contributing Editor
Vacuum systems have many uses vacuum chambers, pumps, lines, valves and monitoring instruments for a given vacuum process or experiment. Vacuum valves are precise mechanisms that regulate the flow of gases. They typically are started, stopped and/or regulated by a moving part which permits or obstructs gas flow in a passage. They do, however, usually need flanges and fittings to work.
In vacuum systems, valves are used to provide fine control of gas streams entering the vacuum chamber. The vacuum in a vacuum system is often controlled by means of rel-atively large butterfly or shutter-type throttling valves that determine the rate at which gas is evacuated from the system by a vacuum pump. For use in vacuum systems, valves should have good out-gassing characteristics. They may also be required to withstand vacuum bakeout temperatures. When intended for applications with, and/or, within vacuum systems, valves are available that can withstand cryogenic temperatures or, at the other extreme, that can operate at very-high temperatures.
Vacuum pumps are the heart of any vacuum system and numerous components and acces-sories are required to interconnect the pumps to the equipment requiring vacuum. Valves of many types (poppet, gate, butterfly, ball, pendulum, etc.) are combined with either mechan-ical or electrical gauges, monitors, controllers, filters, traps, flanges and fittings to achieve the desired configu-rations. Valves, flanges and fittings, however, are the focus of this product roundup.
Product Descripitions
In these product descriptions, vendors make pragmatic distinctions to focus on specific intended applications so direct comparisons are difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling for additional details or telephone numbers for calling to discuss your specific application requirements.Quick Clamp/Metal Seal Flange System A&N Corporation’s ULRIC™ Vacuum Flange System combines the temperature and pressure functionality of a traditional copper seal (CF) vacuum flange with the quick installation feature of an ISO clamp system. The ULRIC™ flange system also provides reusable vacuum seals available in stainless steel, copper, or elastomer. The ULRIC™ flange system is a quick clamp assembled, ultra-high vacuum capable flange system. The vacuum seal can be created in two ways—through the compression of a metallic sealing ring onto a “protected knife-edge” or through the compression of a captured elastomer o- ring. ULRIC™ flanges provide a complete range of fittings to mount with tubing sized 3 /4 inch up to 4 inches in diameter. The flange system consists of two sexless, infinitely rotatable flanges, a re-usable sealing ring which also provides alignment, and a fastener to compress the seal between the two flanges. The flanges are made of 304L grade stainless steel; metal seals are made of copper or stainless steel; elastomer seals are made of Viton® , Buna or silicone; and clamps are available in stainless steel or aluminum. A&N offers a complete line of flanges, fittings, valves, traps, chambers and accessories with ULRIC™ connections that can be used to create a complete vacuum system or pumping line. www.ancorp.com
Poppet, Gate and Ball Vacuum Shut-Off Valves A&N Corporation offers three types of vacuum shut-off valves: Poppet Valves, Gate Valves, and Ball Valves. These valves are designed to regulate gas flow through your system with simple open or closed commands. Poppet Valves are made of a body, actuator and internal poppet and are available in three body styles: 90°Angle, In-Line and Angle In-Line. The actuator transports the poppet toward the top of the valve opening the internal body cavity to the system allowing unimpeded flow. When the poppet is actuated to the bottom of the valve, an elastomer-sealing ring is compressed onto a sealing surface creating a vacuum tight seal and stopping flow. Gate Valves offer unimpeded flow with minimal space required for the valve body.
A central carriage, or gate, is raised and lowered by the actuator within the body. In the open position, the gate retracts completely from the tube aperture allowing unimpeded flow.  In the closed position, an elastomer-sealing ring is compressed against a sealing surface inside the body ports. Ball Valves are robust valves offering unimpeded flow, but are less sensitive to particulate contamination than the other valve types. Ball valves are made of a body, stem, ball and end caps. The ball is compressed in the body by end caps creating a vacuum tight cavity. A hole in the ball provides unobstructed flow in the open position. The sweeping action of the ball against the body seals when actuated clean the ball as it is opened and closed providing a consistent seal. A&N Corporation Williston, FL www.ancorp.com. Tel: 1-352-528-4100 E-mail: info@ancorp.com
A Broad Range of Adixen TM Vacuum Valve Components Alcatel offers a broad range of Adixen brand valves for every application.  Variations by type: each type of valve (Gate, Butterfly, Angle) is available in different versions, offering different materials, flanges, actuators, etc. to provide the most appropriate solution to any of a wide range of demands. Special valves: a variety of special vacuum valves (vent valves, 3 way valves, leak valves, throttling valves) complements the Alcatel offering. All vacuum valves have the following common specifications: guaranteed tightness, individually tested, standard flanges, high conductance, high reliability, and operation in all positions. www.adixen.usa.com
Adixen TM Flanges & Fittings In order to address the vacuum industries requirements, Alcatel offers a large range of Adixen brand accessories based on the three most popular standards used in vacuum technology: ISO-KF Flanges and Fittings; ISO-K Flanges and Fittings; and CF Flanges and Fittings. For each standard, Alcatel offers the normalized nominal diameters generally used. Moreover Alcatel offers other diameters historically used in the vacuum industry. This offer includes a large range of accessories for each standard such as elbows, tees, 4-way crosses, flexible couplings, reducers and also some special adapters from one standard to another.  According to the working pressure, the tightness and the conductance required, fittings will be made with one of the appropiate standards. Alcatel Vacuum Products, Inc. Adixen TM Brand Name Hingham, MA www.adixen.usa.comTel: 1-781-331-4200 E-mail: inquiry@adixen-usa.com
BGV Stainless Steel Gate Valve The BOC Edwards BGV Basement Gate Valves are a range of stainless-steel, bellows-sealed basement isolation valves.  They have been designed to enable pumps to be kept running during fore-line maintenance in order to maximize the reliability and up-time of pumps operating on harsh processes. These valves were developed for BOC Edwards, a world leader in dry vacuum pumps, in a joint collaboration with VAT, a worldwide leader in vacuum valves, and are available with manual or pneumatic actuation. www.bocedwards.com
GVA/AVA Aluminum Valves  BOC Edwards introduces a new line of lightweight aluminum gate and angle valves. The GVA and AVA series valves are designed for high vacuum service and are well suited for isolation of roughing lines and forelines in a vacuum process where high conductance is required. An optional position indicator is available, which is activated by a magnet inside the pneumatic actuator providing closure for the open and closed positions. Easy removal of the actuator allows ease-ofservicing while the valve body remains in situ. A minimum number of spares are required for servicing. The GVA/AVA valves provide an operating pressure down to 8 x 10 -9 torr. www.bocedwards.com
IBV Series Vacuum Ball Valves BOC Edwards ball valves are popular in applications where fast action and full bore pumping are needed.  The new BOC Edwards IBV series valves combine these practical everyday features plus ease of use and economy in a high specification design. Manufactured in 316L stainless steel with PTFE seats they deliver robust performance in a wide variety of vacuum duties. The precision engineered ball and PTFE cups contribute to reliable flow control in a high quality construction. This makes them ideal for applications spanning simple vacuum pump isolation to vacuum control in a production, OEM, or industrial laboratory environment. O-ring sealed NW flanged models, used with the unique BOC Edwards co-seal, are rated for pressure duties up to 7 bar absolute. Threaded versions are also available for easy connection into rough vacuum applications. www.bocedwards.com
Industrial Quarter Swing Butterfly Valves Manual & Pneumatic BOC Edwards quarter swing butterfly valves (QVA) are  ideal for industrial vacuum operations where conventional vacuum valves fail through particulate contamination or corrosive attack. Unlike conventional vacuum butterfly valves where the seal is fixed to the rim of the valve disc, the QV valves have a sealing liner fixed to the internal valve bore. The valve disc is an all-metal blade with no o-ring that can roll of the blade rim in dusty conditions. This design approach provides a reliable self-cleaning seal system optimized to reduce seal liner scuffing. As the blade slides over the seal, it pushes debris aside and firmly squeezes the liner into making a vacuum-tight seal against the blade edge. www.bocedwards.com
PV Series Vacuum Valves Manual, Pneumatic & Electromagnetic BOC Edwards PV series isolation valves are ideal for traditional clean high vacuum applications where reliability and performance are a necessity. The PV valves are designed to operate down to 10 -9 mbar and up to pressures of up to 2,100 mbar. The bellows are constructed of 316L stainless steel and are 100% grease free while the bodies are available in either HE30TF aluminum or AISI 304L stainless steel. In addition to manual, pneumatic or electromagnetic operation, the PV valves are available in either right angle or inline configurations with flange sizes ranging from NW10 to NW50 except the PVEK version which is available from NW10 to NW40. BOC Edwards Wilmington, MA www.bocedwards.comTel: 1-800-848-9800 toll free E-mail: info@bocedwards.com
INFICON DN 16 - 40 ISO-KF Angle & Inline Valves INFICON offers a new line of rugged and compact valves, well suited for all general high vacuum and semiconductor processes. The line includes manual, pneumatic, electropneumatic and electromagnetic actuated valves. All have extremely long-lasting bellows feedthroughs, are equipped with high quality FPM seals, and are factory tested for a leak rate of <10 -9 mbar. This new line is designed for high conductance, fast opening/closing time, high differential pressure resistance and long, low-maintenance operation.  Manually actuated valves have a conv e n i e n t knob for opening the valve with one quick turn or with soft continuous variable actuation for controlled venting/ pumping. The drive locks securely in the open/ close position protecting against unintended operation. A visual position indicator clearly indicates valve status. The pneumatic and electro-pneumatic actuated valves have an “All-in-One” design. One connector for the integrated pilot valve and position indicator guarantees easy, time saving “plug and play” installation and eliminates extra cables. The intelligent design-concept results in a valve that provides optimum uptime. A wide range of maintenance-free pilot valve coils is available, also. The compact electromagnetic valve operates within a voltage range of 90 – 264V. The valve is equipped with durable bellows feedthroughs. The operating mode, remote control or local operation, is selectable. Electrical and visual (LED) position indicators are standard. www.inficon.com
INFICON ISO-K Angle Valves INFICON ISO-K valves are available manually actuated from DN 063 up to 100 in aluminium and stainless steel, and  pneumatically or electropneumatically actuated up to DN 250. Angle valves up to DN 1000 are available on request. The manually actuated ISO-K valve provides a smooth, effortless means of opening and closing the valve. The visual position indicator is clearly visible. The “All-in-One” design concept of the pneumatic and electropneumatic actuated ISO-K valves, with integrated pilot valve and position indicator, provide fast and easy plug-and-play installation. www.inficon.com
Dosing Valves and Gas Dosing Systems INFICON offers a full line of Gas Dosing valves and systems. The manually operated fine gas dosing needle valve is equipped with a digital display, has optimal control characteristics and an excellent reproducible gas flow. For added control, the valve can be closed securely without changing the flow setting. INFICON offers two upstream automatic Gas Dosing and pressure control systems.  The system controls the absolute pressure of the vacuum system using the 0-10 V output of a reference vacuum gauge. The control unit has a wide variety of preprogrammed INFICON pressure gauges and the auto or PID control mode adjusts the output signal to the control valve compensating for deviations from a pre-determined set point. The control valve VDE016-X has integrated motor drive electronics, which transform the control signal into a defined valve position. The valve is controlled via analog voltage, integrated interface or an optional RS232 interface and provides a broad control range, excellent reproducibility and withstands corrosive gases. The control valve VDM005A-X offers fast and reproducible upstream pressure control. The unique solenoid control mechanism provides smooth control and delivers excellent repeatability and reproducibility. An ALL-Metal Dosing valve system for UHV applications is also available. www.inficon.com
Valves, HV-Fittings, Feedthroughs and UHV-Components For maximum convenience, INFICON offers a wide range of valves, including mini valves, butterfly valves, and all metal valves. Our selection of HV-fittings, feedthroughs and UHV-fittings meet your requirements for reliability and availability.  Expert advice for standard and customized installations ensures a dependable solution for every vacuum engineering application in production or research. INFICON East Syracuse, NY www.inficon.comTel: 1-315-434-1234 E-mail: info@inficon.com
Angle Valves Kurt J. Lesker Company’s stainless steel right angle valves are reliable, economical, general-purpose components for HV and UHV applications  that require cleanliness and corrosion resistance. These welded stainless steel b e l l o w s - s e a l e d valves offer longlife operation (up to 1,000,000 cycles), and are available with QF, ISO, or Conflat ® flanges. Standard tube ends or custom configurations are available for compatibility with existing equipment. These high quality valves are designed for vacuum pressures to 1 × 10 -9 Torr, and can withstand baking to 150°C. Copper bonnet seals are available on the Conflat ® flanged valves for applications demanding UHV pressures, and temperatures up to 200°C. Both manual and pneumatic versions are available. www.lesker.com
In-line Valves Kurt J. Lesker Company’s stainless steel in-line valves are reliable, economical, general-purpose components for HV and UHV applications that require cleanliness and corrosion resistance. These welded stainless steel bellows-sealed valves offer long-life operation (up to 1,000,000 cycles), and are available with QF, ISO, or Conflat ® flanges. Standard tube ends or custom  configurations are available for compatibility with existing equipment. These high quality valves are designed for vacuum pressures to 1 × 10 -9 Torr, and can withstand baking to 150°C. Copper bonnet seals are available on the Conflat“ flanged valves for applications demanding UHV pressures, and temperatures up to 200°C. Both manual and pneumatic versions are available. www.lesker.com
CF, KF/ISO, and ASA Flanges, Components and Hardware Kurt J. Lesker Company’s comprehensive vacuum component offering includes all of the common flanges and fittings you need. Strategic inventories of CF, KF/ISO, and ASA flanges, components, and hardware are available at competitive  prices for same-day shipment. Our selection provides a reliable and economical source for high-end components for both HV and UHV applications. Kurt J. Lesker Company is focused on our customers’ supply chain requirements and we’ve created new tools to make doing business easier. VacuCAD SM is our free downloadable drawing program with 1000s of 3D and 2D product drawings of Kurt J. Lesker Company manufactured products available. Go to the Downloads section at to register for this invaluable tool. Kurt J. Lesker Company Clairton, PA www.lesker.comContact: Mike Kelley Tel: 1-412-387-9000 or 1-800-245-1656 toll free E-mail: hardware@lesker.com
Vacuum Valves Oerlikon Leybold Vacuum has extensive experience in vacuum technology and this is reflected in the design of our vacuum valves and fittings used in a wide variety of applications. The Oerlikon Leybold Vacuum family of valves and fittings are engineered for high reliability and extended life with select valves exceeding 10 million actuations. The latest manufacturing techniques and modular design allow for the highest quality product at a price equal to lesser designs. The valve and fittings product family in-cludes: Right-angle and straight-through valves in the flange range of 16 to 40mm (ISO-KF16 to ISOKF40); Right-angle valves in the flange range of 63 to 1000mm (ISO-K63 clamp flanged to ISO-F1000 bolt flanged); Gate  valves in the flange size 16 to 250mm available with various flanges; Electro-magnetic, electro-pneumatic or manual operation; Visual and remote position indicators; Corrosive gas series; Specialty valves – precision leak valves, safety venting valves and vacuum locks also are available; Array of connection fittings and flange types ISO-KF, ISO-K, ISO-F and CF type; and Low leak rates. Oerlikon Leybold Vacuum Export, PA www.leyboldvacuum.com Contact: Mike Ridenour, Product Support Manager, Gauges, Valves & Fittings Tel: 1-724-325-6593 E-mail: mridenour@leyboldvacuum.com
MC+ 300mm Transfer Valve MDC’s MC+ 300mm Transfer Valve High Vacuum Series of 150° C Viton ® O-Ring Sealed Bonnets feature: 2 million Cycles between maintenance; Bellows sealed actuator; virtually particle and vibration-free; double acting pneumatic actuator with position indicators; aluminum body and Gate maintain status in the event of power failure; pneumatically locked in the closed position; and LCD counter for tracking cycles. Specifications are:  materials—body and gate aluminum; bellows AM-350 ss; bolts 300 Series ss; seals bonnet Viton ®; gate Viton ® ; with options Different sealing materials on request. They have an electropneumatic actuator; air pressure 70 to 100 psig; air control valve Humphrey 3 position, 4 way solenoid valve; solenoid voltage 24 VDC, 120 VAC, 240 VAC; power loss valve maintains status; position indicators are Solid state, NPN Sensors; closing and opening time < 1 sec; a Vacuum Range 1 × 10 -8 Torr and a Leak Test 2 × 10 -10 cc/sec of He. www.mdcvacuum.com
1 Million Cycles 1.5 Inch Gate Valve MDC’s high cycle 1.5 inch gate valve is designed for HV and UHV application. Performance reliability and  value are the main characteristics of this new and improved valve. It has the same multiple port connections and options as MDC's standard Gate Valve Line for customer convenience. The key features and advantages of this new valve are: 1,000,000+ cycles with minimal m a i n t e n a n c e ; reduced vibration for quieter operation; mechanically locked in the closed position; direct shaft-gate assembly connection for faster actuation; and low particle generation due to reduced internal parts. www.mdcvacuum.com
Gate Valve Assemblies MDC Gate Valve assemblies consist of three key components: an actuator, a carriage/gate and a valve body. The actuator provides the power to position or transport the valve’s carriage/gate. The actuator is attached to the valve’s body via a rectangular bonnet flange. The gate closes or opens one of the valve’s body ports. The valve body is a vacuum tight chamber that is screwed, flanged or welded into a larger vacuum vessel or system. MDC stainless steel vacuum gate valves incorporate patented  C - L o c ™ and Uni-Loc ™ gate v a l v e l o c k i n g m e c h a - nisms. No contact is m a d e between a v a l v e ’s body and the locking mechanism, a f e a t u r e w h i c h markedly decreases vibration and insures smooth valve operation. MDC gate valves require about half the number of moving parts found in comparable competitor valves. This reduction in moving components minimizes wear and particulate generation which in turn provides valves of superior performance and reliability. The valves’ low outgassing characteristics can be attributed to a fusion welded 300 series stainless steel body, welded AM-350 stainless steel nesting bellows as well as small crosssection O-rings and the elimination of blind internal cavities. MDC gate valves are offered in various sizes ranging from 0.625-inch to 12-inch port diameters. Standard port mounts include: Del-Seal ™ CF metal seal flanges, which are recommended for ultrahigh vacuum service; ISO Kwik-Flange ™ and ISO Large-Flange ™ fast make and break elastomer sealed flanges, ideal for high vacuum applications requiring frequent assembly and disassembly; and ANSI ASA elastomer seal port flanges for use in high vacuum applications where ANSI standards are specified. Gate valve actuation is available in both manual and electropneumatic configurations. Custom designed valves are available on request. Options include modular Electromechanical position indicators, air control solenoid valves for 240 VAC and 24 VDC service, valve body roughing ports, and high temperature 250°C Kalrez ® elastomer gate seals. www.mdcvacuum.com
Stainless Steel Vacuum Gate Valves MDC’s new line of EZ-Lock Gate Valves is engineered for performance reliability and value. They have the same envelope dimensions, allowing for a direct replacement of the standard MDC Gate Valves. The key features and advantages of this new line of valves are: shock free locking mechanism; low vibration, quiet operation; remains closed in case of loss of power or air; low particle generation; and aluminum or Stainless Steel Gate Assembly option for customer convenience. www.mdcvacuum.com
MDC EZ-lock Gate Valves MDC’s vacuum angle and inline valves are devices that regulate the flow of gases, fluids or materials through a structure or aperture by opening, closing or obstructing a port or passageway. MDC stainless steel vacuum angle and inline valves have been designed for maximum conductance and minimum size for easy installation. These valves are ideally suited for systems requiring high reliability and low outgassing. The valves’ low outgassing characteristics can be attributed to a fusion welded 304 stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section elastomers and the elimination of blind internal cavities. MDC angle and inline valves are offered in various sizes ranging from 0.25 to 10 inches port diameters. Standard port mounts include: Del-Seal ™ CF metal seal flanges, recommended for ultrahigh vacuum service; ISO Kwik-Flange ™ and ISO Large-Flange ™ fast-make and fast-break elastomer seal flanges, ideal for high vacuum applications requiring frequent assembly and disassembly. Optional Features include electromechanical position indicator; magnetic reed switch position indicators; air control solenoid valves for 240 VAC and 24 VDC service; and a high temperature 250°C Kalrez ® elastomer poppet seal. www.mdcvacuum.com
All-Metal Angle and Inline Valves MDC’s bakeable all-metal angle and inline valves are designed for use in ultrahigh vacuum environments where elevated temperatures preclude the use of elastomers and low temperature gasket metals. These valves provide reliable high temperature seals from atmospheric pressures to below 10 -11 Torr. Wherever possible, bonnet gasket seals have been eliminated in an effort to minimize the number of potential leak paths. Valves fitted with bonnet seals have been so designed to facilitate gasket replacement.  The size and orientation of the valve body ports on bonnet fitted valves precludes gasket removal through its ports. When operated at ambient temperatures, all-metal valves provide hundreds of leak free cycles between routine poppet gasket replacements. In high temperature applications, life cycles are inversely proportional to the bakeout temperatures. When operated at the maximum bakeout temperature of 450°C, the poppet seal gasket life is reduced to approximately 50 open/close cycles. A vacuum seal is made by pressing the poppet OFE copper gasket onto a conical stainless steel knife edge seat as depicted in the diagram at top-right. The sealing pressure deforms the copper gasket, which conforms to the conical knife-edge seat. During thermal cycling the valve’s loading mechanism counteracts component differential expansion to maintain a uniform pressure necessary for seal integrity. Poppet gasket replacement for the 1- 1 /2 and 2- 1 /2 inches all-metal angle valves must be done by removing the valve from the system, as these two valves have welded bonnets. Once detached from the system, gasket replacement is easily accomplished by inserting a standard blade screw driver into the bottom port and unscrewing the copper gasket, which is then extracted through the side port of the valve. The 3/4 inches angle valve and all inline valves are fitted with bonnet seals and do not require complete removal from the system for gasket replacement. Gasket removal and replacement is performed by detaching the bonnet flange from the valve body. Once the bonnet has been opened the gasket is easily detached by unscrewing with a standard blade screw driver. The all-metal ULV series precision ultrahigh vacuum leak valves are designed to control gas admission into high and ultrahigh vacuum systems. They are manually actuated via a cantilever arm fitted with extra-fine pitch threads for precise adjustment. They are ideally suited for handling hot and corrosive gases commonly used in demanding research environments. The valve body is constructed of type 304 stainless steel and a replaceable OFE copper seat. The valve poppet is made of high purity sapphire and is also replaceable. ULV series precision leak valves are shipped in a leak-tight condition. Leak rates are controlled by relieving the pressure applied to the replaceable copper seat. Leak rates are adjustable down to a minimum of 1 × 10 -10 Torr l/sec. www.mdcvacuum.com
MDC Butterfly Valves MDC's Butterfly valves require only one-quarter turn rotation of the handle to go from fully open to the fully closed position. In the 1- 1 /3 inches Mini Del-Seal ™ CF flange series, a spring loaded ball bearing becomes seated in an indent providing a positive mechanical stop. All other size valves employ a roll pin stop method. These quick-acting Butterfly Valves feature an improved sealing action. The opening in the body of the valve has been machined at a slight angle to the plane of the flapper. The flapper is set to rotate slightly off-center. On closure, this causes the sealing pressure to be applied more uniformly all around the O-ring. A reliable, positive seal is made and the tendency of previous designs to roughen the surface of the O-ring and eject it from its groove is eliminated. MDC Butterfly Valves are low outgassing. All internal surfaces are machined from solid stainless steel bar stock. The handle is made of aluminum. A small O-ring on the stem prevents shaft leakage. The valves are offered with a choice of Del-Seal ™ CF ultrahigh vacuum metal-seal flanges or ISO Kwik-Flange ™ O-ring seal flanges. MDC Vacuum Products Corporation, LLC Hayward, CA www.mdcvacuum.comContact: Neli Ulea, Product Manager, Valves & Motion Tel: 1-510-265-3544 E-mail: nulea@mdcvacuum.com
Vari-Q Throttle Valves MeiVac, Inc. is the originator of, and has been manufacturing, Vari-Q throttling valves for more than twenty years. These valves are standard equipment on MeiVac/Comptech Sputtering systems used in the Magnetic Storage industry. Vari-Q throttle valves are part of the MeiVac Component Division, which include the recently acquired US division Sputter Sources, Deposition Power Supplies and Substrate Heaters.  VQ ambient temperature valves represent the standard for linear, reproducible pressure control and process repeatability. Advanced process control is combined with excellent reliability that is provided by unique counter-rotating vanes. Vane drivers are available as pneumatic or servomotor actuation. Adaptability to commercially available pressure control systems provides ease of installation and integration. Recent improvements in controller technology have provided an integrated High Speed option with an actuation time of 1 /2 second. The smart technology of this controller provides a system learn function and an adaptive algorithm for mapping the response characteristics of your unique vacuum system. Flange sizes for the VQ range from 80 mm to 35 inch diameters. Flange types are available in ISO, JIS, CF and ASA versions. Process Control is offered in either Upstream or Downstream versions and easily upgradeable at a later time. MeiVac Incorporated San Jose, CA www.meivac.comContact: Todd Johnson Tel: 1-408-362-1000 E-mail: todd.johnson@meivac.com
Electromagnetic Cv TM Valve The MKS HPS ® Electromagnetic Cv ™ valve can be used in place of any existing MKS HPS Cv valve where electric actuation is preferred over pneumatic or manual actuation. The ECv valve is actuated by a direct current electric power supply, and consequently, does not require the use of a pneumatic system. The ECv valve’s actuation system is retrofitable in any current HPS Cv valve. The valve has a low profile, linear solenoid mounted to the top of the valve, that serves  as the valve actuator. When power is applied to the solenoid, the solenoid is energized, causing the valve to open or close, depending on the configuration. Each valve includes a coil saver circuit integrated with the input power cable. The coil saver circuit offers a more efficient solenoid coil operation by limiting the power usage of the coil, once the valve has been actuated. This in turn allows the valve to operate without excessive heat generation, remaining safe to the touch. options are available in either 12 VDC or 24 VDC. The valve is offered in the angle and inline configurations with multiple fitting options. The body is comprised of high grade, corrosion resistant, non-magnetic 304 stainless steel. The formed bellows assembly is made of 321 corrosion resistant stainless steel. Metal bonnet seals of either nickel or copper are available as standard options. Kalrez, Silicone, Viton and Chemraz are also options for both the bonnet seal and nose piece. For remote indication of valve position, a limit switch option can be specified within the part number ordering system. While the ECv valve is primarily used as a gauge or system isolation valve, its high conductance, low vibration design, and low temperature operation, make it the most versatile solution to your compact and economical valve requirements. www.mksinst.com
Integrated LoPro TM (ILP) Two Stage Poppet Valve Vacuum systems often require a slow initial evacuation of the roughing or loadlock area of the system. This process is called soft start or soft pumpdown. The soft start process reduces turbulent flow during initial system evacuation, diminishing product contamination and damage. Often a bypass line is used to soft start a system, which utilizes system space and can clog, requiring frequent cleaning and maintenance. The MKS HPS ® Integrated LoPro ™ Two-Stage (ILP) has been designed to replace the bypass line. The ILP accommodates the space constraints found on vacuum applications like loadlock and transfer chambers specifically in semiconductor or optical processing for which a cleaner environment is necessary. A heater jacket is  available for processes with condensable materials. The ILP is a pneumatically-actuated poppet valve with a bypass valve combined into a single unit. The main valve is a normally closed bellows sealed valve. The bypass valve is a spring to close, oring sealed valve located within the main stage. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed. www.mksinst.com
Single Stage Valves MKS HPS ® Single Stage valves are a line of bellows-sealed vacuum poppet valves. The angle and inline stainless steel  bodies range in size from 3 /4 to 6 inches with ISO-KF, ISOUniversal, CF flanges and weld stubs available. A choice of manual, pneumatic or electropneumatic actuation is available. Solenoid operation, seals materials and limit switch remote indication are available options. The HPS line includes standard, low profile or metal-sealed styles. Available HPS Series models are the 150/160 Valves; Series V100 Valves; LoPro Valves; and UHV Valves. www.mksinst.com
Multiple Stage Valves MKS Instruments’ realizes  that vacuum systems often require a slow initial evacuation (called a soft start) of the roughing or loadlock area of the system. The soft start process reduces turbulent flow during initial system evacuation, diminishing product contamination and damage. Often a bypass line is used to soft start a system, which utilizes system space and can clog, requiring frequent cleaning and maintenance.  The MKS HPS ® Multiple Stage Valves have been designed to replace the bypass line. In the first stage, the bypass valve pumps down slowly from atmospheric pressure to a preset vacuum pressure. In the second stage, the main valve opens, allowing use of full pumping speed. The main valve is a normally closed bellows sealed valve. Formed bellows within the main valve make it resistant to particle damage. The angle and inline configurations are available in 1 to 4 inches sizes. These valves can be tailored to the users needs with options available in flanges, seals, solenoids, bypass configurations and a limit switch. Heated models are available for processes with condensable materials. The available HPS models are the Two-Stage Valve; LoPro ® Two-Stage Valve; Integrated LoPro ® Two-Stage Valves; and Jalapeno Two-Stage Valves. www.mksinst.com
Heated Valves MKS Instruments’ knows many processes create by-products  that can solidify within a vacuum system on the walls of components. These byproducts clog the system and can flake off and backstream, damaging product. The systems are subject to frequent downtime for maintenance. By heating critical components, like valves, the by-products stay in a gaseous state and can move through the system for trapping or other disposal. MKS HPS ® heated valves are specifically designed for use in such systems. The heater jackets are molded to match the shape of the valve they are intended to heat. Each valve heater is designed for optimal temperature distribution and uniformity. MKS HPS ® angle and inline heated valves are available with single or multiple stages and standard or low profile bodies. They range in size from NW 25 to NW 100 (1 to 4 inches). The valves include choices of seals, solenoids, bypass configurations (for the two-stage models) and limit switches. The available HPS models are Jalapeno Valves; Jalapeno Two-Stage Valves; Jalapeno LoPro ® Valves; and Series 170/180 Valves. www.mksinst.com
Sensor Isolation and Leak Test Port Valves MKS HPS ® as developed two compact vacuum valves for gauge isolation and leak check ports. The Cv Valve is an extremely compact single stage poppet valve. It is ideal for isolating sensors on a system or closing off  leak check ports. It is available in angle or inline models, 3 /4 or 1 inches port sizes, pneumatic, toggle manual or knob manual actuation. There is a choice of seals, flanges, solenoids and a limit switch option.  The IDA Valve is a three port, dual body valve used in vacuum gauge isolation. The IDA Valve consists of a pneumatic primary valve and a manual s e c o n d a r y valve. It isolates Baratrons and other sensors from the vacuum system while providing good conductance to the sensor. The third port allows for in-situ calibration of sensors, increasing system production though increased uptime. By installing an IDA valve, calibration time can be reduced from 8 hours to under an hour. Available HPS models are the Cv Valves and IDA Valves. MKS Instruments Wilmington, MA www.mksinst.comContact: MKS HPS Applications Engineering Tel: 1-978-284-4000 E-mail: mks@mksinst.com
T3Bi Digital Exhaust Throttle Valve for DeviceNetNetworks The MKS Type T3Bi Intelligent Exhaust Throttle Valve is specifically designed for computer  integrated applications where a simple pressure control system is desired. The T3Bi integrates all control, communication, and driver circuits via a compact “add-on” electronics module onto a throttle valve assembly, thereby eliminating the need for mounting a separate pressure control electronics module. The self-tuning control algorithm drives the system to set point rapidly and with minimum overshoot, and ensures repeatable process recipes without operator involvement. The Type T3Bi valve operates in two modes: flapper positioning or pressure control, either of which can be user-activated through the DeviceNet ™ communications interface. All of the adjustable setup parameters, run time operation, and diagnostics information is available through this interface. The “intelligent instrument” concept results in valuable system space savings, improved noise immunity, and easy access to time-critical process and calibration information as well as on-board diagnostic functions. System design, installation, maintenance, and labor costs are reduced as compared to the traditional analog I/O. The valve driver provides high resolution pressure control. The robust, high torque motor provides extended uptime and reduces preventative maintenance cycles—a great advantage in demanding processes where just one hour of downtime can cost thousands of dollars. The valve is constructed of corrosion-resistant 316stainless steel for the toughest process gases and is available in a variety of standard flange styles and seals. www.mksinst.com
T3P Integrated High Speed Pendulum Valve and Controller MKS T3P Pendulum Valves have been designed for the most demanding semiconductor and thin film applications. T3P valves feature a wide control range and high valve speed to enable fast, precise and reliable pressure control for all etch, deposition and chamber clean process steps—including those with reduced flows or at high pressures. The ability to precisely control conductance over the entire valve stroke, including nearclosed positions, enables recipe pressures to be reached quickly and with minimal overshoot. With its advanced self-tuning control, the T3P valve  provides superior process stability and maximizes throughput. Combining wide dynamic range pressure control and isolation capabilities into a single unit, the T3P valve reduces cost and system complexity. An on-board digital controller supports multiple communication protocols—including DeviceNet ™ and RS232, adding the T3P to MKS’ portfolio of digitally controlled products. By combining the T3P with industry standard MKS Baratron ® capacitance manometers, MKS provides the optimal solution for pressure measurement and process control. The mechanical design features of the T3P include MKS’ patented CAM mechanism providing a symmetrical and linear control and a space-saving low profile design. A simple operating mechanism featuring a minimal number of moving parts and fewer wetted stainless steel components, provides virtually particle-free operation. MKS Instruments, Inc. Wilmington, MA www.mksinst.comContact: MKS Pressure Control Applications Engineering Tel: 1-978-284-4000 E-mail: mks@mksinst.com
Intellisys Pressure Control Nor-Cal Products offers unequalled performance with the Intellisys downstream pressure control system, providing measurable process benefits  through higher resolution, speed and reliability. The Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provide advanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps during pressure transition. A Digital Signal Processor (DSP) enables DeviceNet ™ communications protocol and programming flexibility for customer or process specific requirements. Intellisys motor control technology eliminates belts, gears and position switches, improving reliability, while increasing speed by at least a factor of twenty. High-torque geared drives are also available as an option. Standard sizes range from one to twelve inches. Substantial cost and space savings can be realized with the IQSeries butterfly valves. All the control electronics are incorporated on to the valve motor drive, resulting in a compact size that is easy to integrate on any system. Heated, non-heated and DeviceNet ™ compatible gauges are available with several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. Our Universal Valve Drive (UVD) easily replaces older drive technology found on other manufacturers' pressure control valves. When used with our APC, the universal valve drive can upgrade a competitive valve to approach Intellisys performance levels. www.n-c.com
New JV Series Vacuum Valves in KF 16-50 Sizes Nor-Cal Products, Inc.’s JV series valves are designed to meet the demanding high-cycle requirements of semiconductor equipment manufacturers, yet offer the researcher a cost-effective solution for UHV system roughing. In addition to pneumatic actuation, these valves offer a unique manual actuator for course throttling, which allows partial opening by specified and repeatable intervals. Electromagnetic actuators are available for portable or table-top systems that do not have compressed air available. Right-angle and in-line bodies are available in lowcost aluminum or stainless steel with KF 16, 25, 40 and 50 flanges.  Features include five million cycle rated, small footprint and a wide range of options. Actuation may be electromagnetic or pneumatic with manual course throttling. Body styles are right angle and in-line with either aluminum or stainless steel construction. Other options include position indicators, ”Snap-on” coils on the electromagnetic actuator. Special o-ring materials are available. www.n-c.com
EVAC Flange Nor-Cal Products stocks a complete line of EVAC chain clamps and aluminum metal seals for converting elastomer seal NW (KF) and ISO flanges to UHV metal seals. They provide a number of benefits over elastomer seals: reduced outgassing, no permeation, no hydrocarbons, resistance to radiation and short halflife. EVAC seals are used in high-energy physics, other UHV applications and, in some circumstances, cryogenic applications. EVAC seals are reliable in high vibration or temperature cycling environments.  EVAC chain clamps and tapered flanges are the standard vacuum flange for many Japanese semiconductor equipment manufacturers. The advantages over using the standard ISO flange are the time and space savings during assembly and the flexibility to form high vacuum or UHV seals. Nor-Cal Products stocks blank and bored NW-63 flanges that are compatible with other manufacturers’ KF-63 flanges made to the ISO 2861 specification. They can be used with EVAC chain clamps to form elastomer or aluminum metal seals. Elastomer seals are formed with ISO-63 centering ring/O-ring assemblies and elastomer EVAC chain clamps. Metal seals are formed with EVAC aluminum seals and metal seal chain clamps. NW-63 flanges are made from 304 stainless steel for 2.5 inch OD tube size. Nor-Cal Products is the only authorized U.S. manufacturer of EVAC tapered flanges. These flanges are designed specifically for use with EVAC chain clamps for elastomer or aluminum metal seals. High vacuum seals are formed with a standard ISO centering ring/O- ring assembly and an elastomer seal EVAC chain clamp. UHV seals are formed with a metal seal chain clamp and an aluminum seal. Both blank and bored 304 stainless steel versions are available from stock in 80 and 100mm sizes for 3 and 4 inch OD tube sizes, respectively. Flanges for tube sizes up to 28 inches OD or metric tube sizes can be supplied upon request. www.n-c.com
NW Flange Nor-Cal Products NW flanges are designed to ISO 2681 specifications for standard USA tube sizes from 3/8 to 2 inches OD. They are compatible with other manufacturers’ ISO-KF style flanges.  NW flanges utilize an aluminum clamp with a single wing nut fastener or a l o c k - o v e rcenter clamp allowing frequent disassembly without tools. The vacuum seal is effected by the application of uniform pressure from the clamp on the 15° surface of the 304 stainless steel flanges. The mating flange surfaces compress a Viton O-ring held in place by a centering ring. The resultant seal can be used in vacuum applications of up to 10 -8 Torr and baked to 204°C, however sustained baking above 150°C may result in deterioration of O-rings. Additionally, NW flanges allow components to be rotated before assembly for ease of component alignment. NW flanges are available on virtually all Nor-Cal components and fittings. Nor-Cal manufactures a full line of NW adapters so you can add to or build an entire system with NW components. NW flanges can also be used with EVAC chain clamps and aluminum seals to obtain a UHV seal bakeable to 150°C. www.n-c.com
ISO Flange Nor-Cal Products ISO flanges and hardware are manufactured to the International Standards Organiza-tion specification so they can be mated to other manufacturers’ ISO flanges. ISO flanges are made from Argon Oxygen Decarburization (AOD)  304 stainless steel. This material is certified to meet ASTM-240 and has less than 0.01% sulfur in order to prevent sulfur stringers. Grain size is 3 to 6 per ASTM E-112. Maximum inclusion size is 2.5 per ASTM E- 45. Normally our standard material is in the low carbon range for 304 stainless steel. For increased corrosion resistance, some sizes are available from stock in 316L stainless steel. Optional fastener and nonrotatable ISO flanges are available from stock for 2- 1 /2 to 20 inch tube sizes. Both use a Viton Oring, held in place by a centering ring, to effect a seal with a vacuum range of 10 -8 Torr. ISO components can be baked to 204°C. ISO flanges can also be used with standard clamps and aluminum seals to obtain a UHV seal bakeable to 150°C. www.n-c.com
ASA Flange Nor-Cal Products’ASA flanges are manufactured from specially treated 304 stainless steel. These flanges mate with standard 150 lb. ASA flanges or 150 ANSI flanges. They are available from stock for standard tube sizes from 2 to 12 inches. Larger sizes are available upon request. Nuts and bolts are used to apply pressure between the mating flanges and a seal is effected when a Viton O-ring is compressed. ASA flanges can be baked to 204°C and have a vacuum range of up to 10 -8 Torr. Besides being sold separately, they are available as standards on nipples, adapters, tees, crosses, elbows and valves. When components of several systems are used interchangeably, use of  rotatable flanges is r e c o m - mended. Assembly is facilitated by rotation of m a t i n g flanges, to align bolt h o l e s . Nonrotatable ASA flanges, unlike rotatable, contain both sealing surface and bolt holes in one unit rather than two. This makes the nonrotatable flange less expensive, and therefore the preferred choice when mating component orientation is not a concern. www.n-c.com
CF Flange Nor-Cal Products CF flanges are compatible with other Conflat style flanges and are available in sizes from 1 1 /3 to 16 1 /2 inch OD for 1 /4 to 14 inch tube diameters. Flanges 4-1/2 inch OD and smaller are made from 304 electroslag remelt (ESR) bar stock. ESR is a refining process that produces stainless steel with higher purity, fewer inclusions and more uniform grain structure to eliminate microscopic leak paths. Larger CF flanges are made from Argon Oxygen Decarburization (AOD) 304 stainless steel. This material is certified to meet ASTM-240 and has less than 0.01% sulfur to prevent sulfur stringers. Grain size is 3 to 6 per ASTM E-112. Maximum inclusion size is 2.5 per ASTM E-45. Normally our standard CF material is in the low carbon range for 304 stainless steel. As specials 304L and 316L material can be supplied in AOD or roll-forged rings. Machining is consistent with good UHV practice. Machine  coolant is sulfur free to reduce outg a s s i n g . State-of-theart CNC machine centers are used to produce flanges with consistent high quality. Flanges are machine washed in approved aqueous detergent after machining. Chemcleaning and clean room packaging are available. CF flanges utilize an OFHC copper gasket to produce a vacuum tight seal up to 10 -13 Torr, even when baked repeatedly to 450°C. When the copper gasket is compressed between the knife edges of CF flanges, its material flows laterally to fill surface imperfections. Nor-Cal offers CF flanges in rotatable as well as nonrotatable versions. Nonrotatable CF flanges, unlike rotatable, contain both sealing surface and bolt holes in one unit. This makes the nonrotatable flange less expensive, and therefore the preferred choice when mating component orientation is not a concern. Nor-Cal Products, Inc. Yreka, CA www.n-c.comContact: Jacquie Daniel Tel: 1-800-824-4166 toll free or 1-530-841-9153 E-mail: jacquiedaniel@n-c.com
Angle and Inline Valves Pfeiffer Vacuum introduces a new series of angle and inline valves that are suitable for applications in the high vacuum range. The valves feature a robust design that is resistant to contamination, increases service life significantly, and makes them ideally suited for industrial applications. Pfeiffer Vacuum’s new valves are available in DN 16, 25 and 40 ISOKF sizes. This new series of manually, electropneumatically and electromagnetically operated angle and inline valves feature improved conductivity, resistance to differential pressure  and short r e s p o n s e times. The electropneumatic and electromagnetic valve models are e q u i p p e d with an integrated position indicator. The electromagnetic valve has the pressure pilot integrated into the case. www.pfeiffer-vacuum.com
CF UHV Components Pfeiffer-Vacuum’s CF UHV components are convenient and offer great flexibility in the design and construction of high and ultrahigh vacuum systems.  Fittings such as connecting bolts and screws, copper and viton seals, blanking and welding flanges, pipe components and bellows and adjusting components are some of the components offered. Most common parts are in stock and available for immediate delivery. CF flange components for UHV applications comply with standard ISO 3699 (Pneurop 6606). Standard Stainless steel components are made of steel 1.4306 (304L). CF flanges are available in steel 1.4429 (316LN). Flange components made of steel 1.4429 (316LN) have a very low magnetic permeability and have harder knife edges. The starting material is specially annealed in a low-hydrogen atmosphere. www.pfeiffer-vacuum.com
ISO-K Clamping Flange Connections Pfeiffer-Vacuum’s ISO-K Clamping Flange Connections are an economical system of reusable and interfacing stainless steel vacuum fittings. These flanges can operate in high vacuum environments and are ideally suited for applications requiring rapid and frequent assembly and disassembly. The Clamping flange components range from claw clamp and claw grip, centering and o-ring seals,  blanking a n d welding flanges to pipe compon e n t s including a 90° elbow, a T-piece and a cross-piece. Most common parts are in stock and available for immediate delivery. ISO-K/F Clamping flange components comply with DIN 28404 or Pneurop 6606. www.pfeiffer-vacuum.com
ISO-KF Small Flange Connections Pfeiffer-Vacuum’s ISO-KF Small Flange Connections are an economical system of reusable interfacing stainless steel vacuum fittings that can operate in high vacuum environments. The small flange components are ideally suited for applications requiring rapid and frequent assembly and disassembly.  The Small Flange c o m p o n e n t s include reducing centering, mesh centering, Oring, aluminum and indium seals as well as blanking flanges, short and long pipe socket flanges and a large assortment of pipe components including 45° and 90° configurations. Most common parts are in stock and available for immediate delivery. ISO-KF Small Flange components comply with DIN 28403 or Pneurop 6606. Pfeiffer Vacuum Inc. Nashua, NH www.pfeiffer-vacuum.comTel: 1-603-578-6500 E-Mail: valves@pfeiffer-vacuum.com
Soft-Pump Angle Valve The Trinos Vacuum Systems Inc.’s Soft-Pump  Angle Valve has a needle integrated into the head. This “needle” is used to avoid an abrupt pressure relief and can be opened pneumatically. It has a compact construction and can handle temperature ranges from 5-150° C. www.trinos.com
Slit Valve The Trinos Vacuum Systems Inc.’s slit valve has a rectangular  opening especially designed for wafer transfer. The unique “L” motion eliminates abrasion by lifting the gate prior to applying pressure to the seal- ing surface. This valve is rated for 2,000,000 cycles. The internal leak rate of the valve is 6.5 × 10 –10 mbar l/s. The slit valve is available in a variety of sizes accommodating various wafer sizes. www.trinos.com
CF Door The Trinos Vacuum Systems Inc.’s CF Door consists of a flange to be mounted to the chamber and sealed with a copper gasket. This flange has a hinge connecting to another flange containing Borosilicate glass for viewing inside the chamber. The viewing flange is sealed with a viton o-ring.  This assembly creates a CF port with a viewing window and easy access to the chamber. You do not need to disrupt the copper gasket seal to have access to the chamber. The CF Door is made of 304L SS and is also available in 316LN SS and 316MaxVac ™ SS. www.trinos.com
CF Cube The Trinos Vacuum Systems Inc. CF cube is literally a cube with all surfaces suitable  for a CF connection. The cube serves the same function as a 6 way cross but it saves considerable space and aligns the ports relative to each other with very little dimensional deviation. We carry CF cubes made of 304L in stock in several different sizes. We can also manufacture CF cubes from 316LN SS and 316MaxVac ™ SS upon request. www.trinos.com
EasyWeld TM ISO K Flange The EasyWeld ™ ISO K Flange was created by Trinos Vacuum Systems Inc. to ensure higher quality welds with less warping. Conventional weld flanges are thicker than the wall of a tube. When these two surfaces are welded, the variation in thickness causes warping and  distortion. The EasyWeld ™ Flange has a lip inside the weld flange. This lip is the same thickness as the wall of a tube and creates a distance between the welding surface and the flange. It is this lip that is welded to the tube creating an easier weld with less warping of the flange. EasyWeld ™ Flanges come standard in 304L SS and 316L SS and are available upon request in 316MaxVac ™ SS. www.trinos.com
CF Flanges made of 316MaxVacSS Trinos Vacuum Systems has developed the 316 MaxVac ™ SS Material for the use in high-end UHV applications such as in the CERN, Diamond DESY or Bessy accelerators.  This material is manufactured exclusively for Trinos Vacuum Systems. 316 MaxVac ™ starts as 316LN SS. Then, after the initial melting process, the steel is treated in an electric furnace under vacuum to greatly reduce the natural inclusions and impurities otherwise found in standard steels. This cleaner steel will allow for an improved vacuum performance and an improved degassing rate. The 316 MaxVac ™ has extremely low magnetic permeability. With an index of 1.002, it truly qualifies as a non-magnetic stainless steel. For even greater strength and purity, 316 MaxVac ™ can also be forged. The result is a truly amazing steel. This material is CERN certified. While this material is also available for UHV chambers, it is available in any size CF flange. Trinos Vacuum Systems Inc. Chicago, IL 60661 www.trinos.comContact: Maureen Rosenwinkel Tel: 1-206.203.6310 E-mail: rosenwinkel@trinos.com
Vacuubrand Valves Vacuubrand offers a wide range of vacuum valves including  manual ball valves, diaphragm valves, right angle bellows valves and butterfly valves. Also offered are small manual and electronic air admittance and isolation valves for use in fine and rough vacuum applications. Complete specifications are available on request. Typical sizes are ISO KF NW 10, NW 16, NW25 and NW 40. The valves are manufactured  in Germany of the highest quality materials, such as brass, stainless steel and aluminum, using state of the art CNC machinery. Complete specifications are available. Please call or e-mail. Vacuubrand Inc. Essex, CT www.vacuubrand.netContact: Bob Freeman Tel: 1-888-882-6730 E-mail: vbrand@vacuubrand.net
Roughing Angle Valves Vacuum Research’s angle valves for roughing in sizes from NW to16 to NW to 50 are available with aluminum or stainless steel bodies Both manual and  electro pneumatic actuators are available and the shaft seal can be either welded bellows or O-rings. Optional features include electronic position indicators and gauge ports with VCR-4 or 1 /8 inch NPT threads. www.vacuumresearch.com
Large Vacuum Valves Vacuum Research’s Gate and angle style valves  with port sizes up to ISO-600 or 24 inch ANSI. Available in aluminum or stainless steel with flanges to fit any cryo. turbo or diffusion pump. Pneumatic, electric motor and manual actuators are available. Optional features include gauge ports with NW flanges from 16 to 50 mm and roughing ports up to ISO-250 or ANSI 10 inch. www.vacuumresearch.com
Throttle Valve with Leak Tight Shut Off The Vacuum Research Throttlemaster ™ Valves with leak tight shut off eliminates the need for separate throttle and isolation valves. Suitable for 3 position or full PID applications. The digital valve positioner is  included and provides easy control to 0.1% from the front panel or from your PLC or computer. 4 to 20 mA or 0 to 10 VDC signals accepted. Also included are contact closures on rear panel for open and closed position indication. Valves are available in aluminum or stainless steel with ANSI flanges from 2 to 16 inches and ISO flanges from 63 to 400 mm. www.vacuumresearch.com
Vacuum Valves for Dirty and Dusty Applications Vacuum Research Valves designed for dirty and dusty applications such as investment casting or tire reclamation. They are also well suited for plasma systems. A protective ring keeps particles  and plasma away from O-rings and seal surfaces for long life in the most demanding applications. Pneumatic, manual and electric motor actuators. Port diameters up to ISO-600 or 24 inch ANSI. Shaft seal pump out ports and oilers available. Other options include position indicators, water cooling and ports for blowdown and clean out. Vacuum Research Pittsburgh, PA www.vacuumresearch.comContact: John Hartnett Tel: 1-800-426-9340 toll free or 1-412-261-7630 E-mail: vrl@vacuumresearch.com
All Metal Valves Varian’s all-metal  bakeable valves are designed for use in ultrahigh vacuum systems where bake-out temperatures up to 450°C preclude the use of elastomers and low melting temperature metals. The simplicity of the all-metal design, which employs the Varian ConFlat ® flange sealing principle, assures a low maintenance unit giving maximum reliability and vacuum sealing from atmospheric pressure to below 10 -11 Torr (mbar). www.varianinc.com
Block Valves Varian’s Block Valves are versatile, reliable, cost–effective vacuum shut-off devices that can be the workhorses of any vacuum system.  Suitable for performance from rough to high vacuum, they are available in aluminum or s t a i n l e s s steel, and with KF, ISO or ConFlat flanges. They employ a high cycle life bellows that provides a rating of over three hundred thousand cycles, and are designed to optimize conductance for maximum pumping efficiency. All pneumatically operated valves have visual position indication, and remote position indicators are available as options. In the standard configuration, the valves close rapidly (< 300 milliseconds) on loss of air or electrical power, thereby protecting your vacuum system. The high cycle life and rapid closure make the valves perfectly suited to high cycle applications such as semiconductor and disk processing, industrial coating, and many others. Varian Block Valves require little maintenance, but can be maintained easily and quickly when necessary. www.varianinc.com
GateKeeper Aluminum Gate Valves Varian’s GateKeeper Series Aluminum Gate Valves are economical, high cycle life, reliable vacuum shut-off devices. The valves provide a low-cost, low-particle, low profile means of isolating a high vacuum pump. The GateKeeper Series valve design employs a cast aluminum body, a counter plate sealing mechanism, and an elastomer shaft seal. The result is a clean, economical, smoothly actuated valve. The body is cast using the  VaPore ® process which tightly controls each material input and process to deliver a casting that is free of porosity. A reliable high vacuum shaft seal eliminates the need for a bellows. The linear drive and counter-plate sealing mechanism have been designed to minimize actuation shock and particle generation. The assembly is an elegant mechanism that uses a small number of precisionmachined components. The required sealing forces are generated with a minimum of moving parts, and without adjustment screws. As a result, very few particles are generated within the valve. The GateKeeper valves have a small face-to-face profile. ISO/F flange details are machined into the cast body to provide the convenience of standard ISO claw clamp connections. Varian, Inc. Vacuum Technologies Lexington, MA www.varianinc.comContact: Walter Stevenson (Steve) Palmer, Manager, Marketing and Merchandising, VVT Lexington Tel: 1-781-860-5426 E-mail: steve.palmer@varianinc.com
Series 29 Angle Valve with Soft-pump Function VAT introduces the Series 29 soft-pump angle valves based on a new patented design concept that offers many advantages to the end user. The valves provide a very wide range of softpump flow adjustment meaning that a wide range of chamber volumes and pump speeds can be accommodated with a single valve design. Additionally, the soft-pump conductance can be very easily adjusted by simply rotating a recessed screw at the top of the actuator. The adjustment is made in small, precise and repeatable steps and a scale is provided for visual confirmation of position. A ball detent system is used whereby each step is felt  and heard as a positive click m a k i n g v a c u u m s y s t e m setup very easy. By using only a very small number of parts moving inside the vacuum envelope, the particle performance of the valve is excellent. The small part count also means that servicing is very straight forward; reliability is very high and, very importantly, the cost of the product and the cost of ownership are extremely competitive. Visit for more details on this new product series. www.vatvalve.com
Pendulum Valve Control System Series 65.0 / 65.1 The VAT Series 65 Pendulum Valve is used for  pressure control & isolation in semiconductor and FPD processes such as etch and CVD. The VAT Series 65 Pendulum Valve is ideal for demanding semiconductor process and features extended operation intervals, compact, user-friendly, adaptive pressure control and low cost of ownership for process tools. The VAT Series 65 Pendulum Valve is available in sizes DN 100 - 400 mm with optional controller configurations, aluminum or aluminum hard anodized with ISO-F or JIS flanges. www.vatvalve.com
Series 16.8 Large Pendulum Valve VAT’s recently released Series 16.8 Large Pendulum Valve used for high vacuum isolation is available in sizes DN400 and DN500. This competitively priced valve has a small footprint, low shock actuation and is ideally suited for high vacuum pump isolation in many industries including, but not limited to: Semiconductor, FPD and Coating. Features  and benefits include: compact design, low shock a c t u a t i o n , light weight, high cycle life, outstanding leak tightness performance, quick/easy cleaning, and three-position actuator option. Aluminum casting technology allows VAT to offer this valve at a low price and the split body design to assure short down times after cleaning. Visit VAT's new website and find more information on this and other VAT products. www.vatvalve.com
Series 95 Isolation/Control System VAT now offers a combined  Series 61.2 butterfly control valve and Series 12.1 isolation gate valve in a single piece valve body. The single-body design provides for excellent pressure control, vacuum isolation and serviceability. The design saves valuable system space, reduces vacuum connections and improves installation time. The series 12.1 isolation valve is slaved to the Series 61.2 butterfly valve making for easy OEM interfacing. Visit where you can download information, including technical information, CAD drawings, etc, on this and other product offerings. VAT Inc. Woburn, MA www.vatvalve.comContact: Joyce Mackiewicz Tel: 1-781-537-5410 E-mail: joycem@vatvalve.com
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Vacuum Technology & Coating