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Gas Handling Systems & Equipment Including Components, Control, Metrology and Analyzers
Compiled by Terrence Thompson, Contributing Editor
This product showcase covers some commonly used gas handling systems, equipment, components, control, metrology and analyzers which are used in various production, R&D and other vacuum applications.
Vacuum pumps and systems remove the ambient atmospheric content so that precise gas mixtures may be introduced to meet a specific application’s requirements. Any hardware needed to transport, store, distribute, mix, regulate and monitor gas flows is a gas-handling product.
The following are representative gas handling products:
• Gas safety systems and cabinets/enclosures;
• Process instruments that measure/monitor/control as mixtures and flows including mass flow controllers, RGAs, flow detectors, flowmeters and manifolds;
• Sophisticated analytical systems such as mass spectrometers of all types and gas chromatography; and
• Gas cylinder hardware including leak detectors, dryers, gas filters, gas generators, manifolds, precision mixers, ionization detectors, purifiers, regulators, valves, gas vacuum feeders and vacuum gauges.
Product Descriptions
In the following product descriptions, vendors make distinctions to focus on specific intended applications so direct comparisons may be difficult. When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements.
EXTRIMA® Hydrogen Leak Detector for Hazardous Environments
The Adixen Sensistor from Alcatel Vacuum Products, Inc.  is an intrinsically safe leak detector. The equipment meets the ATEX directive for leak testing in explosive environments, such as aircraft fuel systems. The Extrima® is intended for leak detection with diluted hydrogen as trace gas in explosive environments, where the safety requirements are extremely high. The detector is intrinsically safe which means that it under no circumstances can ignite the explosive gas. Extrima has the European EEx ia IIC T4 classification equivalent to US Class 1, Div 1, groups A, B, C, D, which means that it meets the requirements for use in zone 0 according to the ATEX directive (ATmosphere EXplosible) of the European Commission. This detector can therefore be applied in the chemical and petrochemical industry as well as in the aviation and oil processing industries. A typical application is leak detection during maintenance of aircraft fuel systems. Since there is always some fuel left in the system, the equipment must meet specific requirements. Extrima quickly detects and locates the smallest possible fluid fuel leaks thereby ensuring 100% integrity of the test object. The Extrima has a unique Auto-Ranging function, which automatically tunes the instrument’s sensitivity for precise leak location. After a leak is located and the search for additional leaks continues, the sensitivity automatically readjusts to the highest level. With seven hours of continuous operation from rechargeable batteries and an IP67 waterproof rating, the Extrima meets all the requirements of the aviation, chemical, petrochemical and oil process industries for leak detection. www.adixen-usa.com
Adixen-Sensistor H2000 Plus Leak Detector
The Adixen-Sensistor H2000 Plus Leak Detector from Alcatel Vacuum Products, Inc.  uses H2 /N2 as trace gases, and can be used to detect leaks smaller than bacteria. Using Non-hazardous 5 percent hydrogen in a 95 percent nitrogen mixture, it measures and pinpoints minute leaks independent of part temperature or volume. This electronic device requires no vacuum pumps or valves and is therefore virtually maintenance free. Dynamic background compensation minimizes any potential problems with background interference assisted by the fact that hydrogen gas dissipates much more quickly than other gases. The instrument features a standard probe with no sample suction. www.adixen-usa.com
Sensistor ILS500 Leak Detection Test System
The Sensistor ILS500 Leak Detection System from Alcatel Vacuum Products, Inc.  contains 3 modules housed in one compact unit. These modules are configured for optimal testing conditions, short cycle times and operator convenience for specific test environments. The controller module has a central processing unit, a gas-filling unit, and machine and tooling interfaces. The detector module is the Sensistor H2000 Hydrogen leak detector that uses a safe hydrogen mixture as a trace gas. The third module is the operator touch screen interface for set-up as well as production test monitoring and operation. This plugand-play leak detection system is for demanding industrial leak testing applications. www.adixen-usa.com
Leak Detectors and Mass Spectrometers
Alcatel Vacuum Products manufactures a complete range of Adixen™ leak detectors with a choice between a N2/H2 GASFET (GAS field effect transistor) leak detection that is lightweight, portable with middle range sensitivity and a helium detection technique with high sensitivity. These leak detectors address HVAC, aerospace, and automotive, general engineering to semiconductor applications. Alcatel Adixen leak detectors and systems can be configured to test the overall leak rate of a component or system or to accurately and easily pinpoint a leak using a manual probe. Using helium or N2/H2 trace gas, methods are up to 1000X more sensitive than pressure decay or mass flow testing. Other advantages of trace gas leak testing are (a) the test is unaffected by temperature changes (b) the test is unaffected by component creep (c) the test is a direct measurement of the actual leakage from the component or system. Helium Mass Spectrometer systems can detect leaks as small as 1x10-10 cc/sec in vacuum while the Gas-FET detectors will detect leaks as small as 1 × 10- 6 cc/sec at atmospheric conditions. For automatic testing of components and systems that require high-sensitivity leak testing (<5 × 10-6 cc/sec) or need to be tested under vacuum, then a helium leak detector is the right choice. Adixen Mass Spectrometer Helium leak detectors detect leaks as small as 1x10-10 cc/sec under vacuum. For applications that are not as critical in terms of leak rate sensitivity (>1 × 10-6 cc/sec) or require lightweight, portable equipment, use an Adixen N2 /H2 (Gas-FET) leak detection systems. Gas-FET leak detectors will detect leaks as small as 1 × 10- 6 cc/sec at atmospheric conditions in a manual portable sniffing mode or as small as 5 × 10-5 cc/sec in an automatic accumulation chamber.
Alcatel Vacuum Products, Inc.
Adixen™ brand name
Hingham, MA
www.adixen-usa.com
Contact: JP De Luca, Director Sales, Helium Leak Detection
Tel: 1-781-331-4200
E-mail: JP.Deluca@adixen-usa.com
Dycor® CG1100-RTP Protects Against Oxygen Contamination, Improves Semiconductor Yields
AMETEK’s Dycor CG 1100-RTP oxygen analyzer targets semiconductor  rapid thermal processing (RTP) wafer fabrication systems. This advanced oxygen analyzer meets the special requirements for use on RTP tools and has been integrated by the leading semiconductor tool manufacturers into their RTP and mini-batch systems. RTP uses very rapid heating cycles to perform high-temperature processes traditionally done by slowerheating batch furnaces. The technology is suited for both 200 mm and 300mm wafers using reduced feature sizes that require advanced oxygen detection and control to ensure uniform and repeatable processing. The advantages of RTP and fast ramp mini-batch furnaces can be negated if there is not positive protection from the effects of oxygen contamination. The oxygen analyzer improves processing yields by detecting oxygen contamination at the parts-per-million level and maximizes throughput by ending the purge cycle as soon as the oxygen background is at an acceptable level. The CG 1100-RTP has a zirconium oxide sensor for accuracy and fast response; electronic flow control allowing a range of operating pressures; and a wide detection range (ppm to 100% oxygen). Integration into tool controller and data acquisition system is accomplished with RS-232 and RS-485 communications ports, analog 4-20mA outputs and I/O alarms and is configurable to allow end user to integrate into their tool
AMETEK Process Instruments
Pittsburgh, PA
www.ametekpi.com
Tel: 1-412-828-9040
E-mail: sales.info@anetek.com
TIC Instrument Controller Now With Six-Gauge and Capacitance Manometer Capability
The Edwards TIC instrument controller is compact with a large graphical  display and an intuitive user interface and serial communications providing full remote control. It is supplied with a WindowsTM PC program that provides a comprehensive data logging ability, and enables full setup and control from a PC using the RS232 interfaces as standard. The controller supports and automatically recognizes up to three gauges from the BOC Edwards range, with coverage from 2000 to 6.6 x 10-10 mbar. The TIC is available in three-channel, six-channel and six-channel capacitance manometer capable versions. When combined with the optional external relay box that allows for control of three 250 VAC 3 amp changeover relays, the TIC instrument controller provides for flexible operation of a wide range of vacuum system measurement and control configurations. Additional features include: direct pressure readout of common gasses (N2 , He, Ar, CO2 , Kr and Ne) without conversion factors and up to six 0 to 10 V buffered analogue outputs. User-configurable display options include a four-character alphanumeric name for each channel, the option to display one, three, or six channels simultaneously, and an ability to select gauge order when cycling through the display.
Edwards Vacuum
Wilmington, MA
www.bocedwards.com
Tel: 1-800-848-9800
E-mail: info@edwardsvacuum.com
Precise Sensitivity For Contamination Control with Transpector® 2 Gas Analysis System
The INFICON Transpector® 2 Gas Analysis  System provides accurate and reliable data for vacuum process monitoring, process diagnostics, and leak detection. In the Transpector 2, increased hydrogen sensitivity makes contaminants visible at sub-ppm levels. Low minimum detectable partial pressure for all gases means better contamination control, as well as faster and more stable scanning for maximum performance in today’s faster processes. Improved abundance sensitivity, superior peak position and amplitude stability contribute to the superior performance of this RGA. Combined with TWare 32 software, Transpector 2 is the ideal instrument for production process monitoring, data collection, and statistical process control. Firmware capability has been expanded in Transpector 2, and because it’s a smart sensor, you still have the flexibility of using your existing computer or choosing a PC from INFICON to run one or multiple gas analyzers. Transpector 2 is easily multiplexed to make multi-chamber systems simpler and more economical to operate.
INFICON
East Syracuse, NY
www.inficon.com
Tel: 1-315-434-1100
E-mail: reachus@inficon.com
B-RAX 3000 Rack-Mount Vacuum Gauge Controller
InstruTech’s new rack-mount vacuum gauge controller, the  BRAX 3000, is capable of operating one InstruTech Ionization gauge and two convection gauges providing a measurement range from 1 × 10-9 Torr to atmosphere. The B-RAX uses a different approach to traditional full range vacuum measurement practices. This typically results in significant cost savings for the user. The Electrometer for the Ionization gauge is built in to the InstruTech’s IGM-400 Ionization gauge module instead of the controller itself. This allows the B-RAX to be offered as a compact, low-heat generating and low-cost multi-gauge vacuum gauge controller. The B-RAX is offered with three independent front panel pressure measurement displays as well as three set point relays for process control. The Controller can also accept and display pressures using an alternate analog input from other types of vacuum gauges such as a capacitance diaphragm. The setup and programming is provided via a front panel setup screen and push buttons. The BRAX is offered in a space saving half rack design, bench top or instrument panel configurations. It can also be mounted as a full rack or dual rack using rack panels. www.instrutechinc.com
IGM-401 “Hornet” Miniature Ionization Vacuum Gauge Module
InstruTech’s miniature hot filament Ionization vacuum gauge module, the IGM401,  dubbed the Hornet, is for measuring pressures from 1 × 10-9 to 5 × 10-2 Torr. The IGM401 is a rugged metal Ionization gauge with dual filaments. It incorporates numerous features to reduce cost and improve performance. The electrometer auto zeroes to ensure that readings are not subject to temperature drift. The IGM-401 has an OLED display, one log-linear analog output, one setpoint relay and an RS485 interface. The display menu provides the user the choice to select from 16 common gas-es without having to apply manual correction factors. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. In addition to high vacuum measurements, a new option now available with the Hornet allows for connection of two convection vacuum gauges to the Hornet. The Hornet will operate and provide measurements from two external convection gauges without the need of another controller. The IGM gauge is also a direct drop-in plug-compatible replacement for the Granville-Phillips Micro-Ion® gauge, which has been in widespread use for many years. (Micro-Ion® is a registered trademark of Brooks Automation/Granville Phillips.) www.instrutechinc.com
IGM-402 “Hornet” Miniature Ionization Vacuum Gauge with Dual Convection
InstruTech’s new miniature ionization vacuum gauge module,  the IGM402, is capable of operating two convection gauges simultaneously. Named the Hornet, it is a modular ionization gauge with an on-board controller capable of operating two convection gauges at the same time. The IGM-402 can combine the vacuum measurement from the ionization gauge and one of the convection gauges to provide a full range vacuum measurement from 1 × 10-9 to atmosphere, or simply operate the ion gauge and two convection gauges as individual gauges. Users have the choice to display all three measurements in one screen or auto cycle display from one gauge to the next. It is a rugged metal ionization gauge with dual filaments. It is design features to reduce cost and improve performance. The electrometer auto zeroes to ensure that readings are not subject to temperature drift. The IGM-402 is offered with a bright yellow, OLED display, three log-linear analog outputs, three setpoint relays and an RS485 interface. Service screens can diagnose and display warnings for fault conditions. Filament current, emission current, and ion current can be monitored in real time on the research screen. Sensitivity and degas time can be user adjusted. Users can turn the filaments on/off. The degas and change emission current feature uses three different modes of operation, including front panel push buttons, digital inputs or RS-485 commands.
InstruTech, Inc.
Longmont, CO
www.instrutechinc.com
Tel: 1-303-651-0551
E-mail: info@instrutechinc.com
KJLC™ 901P Series
The Kurt J. Lesker Company 901P series of pressure  transducers combines the accuracy and gas independence of a Piezo transducer, the proven dependability of a Pirani sensor, an atmospheric switch, and TRUE digital communications all into one economical transducer. The transducer accurately measures from 10-5 to 1000 Torr. The differential atmospheric switch, for load lock and gas backfill situations where overpressurization must be avoided, measures TRUE atmospheric pressure on one side and triggers the switch when the vacuum side achieves the same pressure. www.lesker.com
KJLC™ 902 Series
The Kurt J. Lesker Company 902 series of pressure  transducers combine the accuracy and gas independence of a Piezo transducer with TRUE digital communications. The transducer features a unique temperature compensator allowing high accuracy over a wide measurement from 1 to 1000 Torr. The CE marked unit features RS232 or RS485 and analog outputs. An optional LED onboard display is available. www.lesker.com
KJLC 979 Series
The Kurt J. Lesker Company 979 series wide range pressure  transducers offer the ability to monitor and control pressures from 760 Torr to 1×10-10 Torr. The dual sensor design (Ion/Pirani) and digital interface handle high-vacuum coating applications requiring long-term stability and accuracy. The compact package makes it ideal for system integrators and equipment manufacturers over a broad range of applications. Includes RS-485 communications and controls, three independent set-point relays, standard low power requirement 24VDC(10W), smooth analog output (0.5-7VDC), in a unique compact transducer assembly that is field serviceable. www.lesker.com
KJLC™ Convectron® “GP” Equivalent Series
The Kurt J. Lesker Company Convectron Equivalent series of pressure transducers and sensors   are direct “drop in” replacements for the Granville-Phillips Convectron gauges. All controllers, cables, and sensors are interchangeable PLUS they feature added benefits such as a more rugged design that is less prone to damage from mechanical shock or vibration and a faster response to pressure changes. RS232 and RS485 are standard ports on these controllers. www.lesker.com
KJLC™ DV-6M Equivalent Thermocouple Sensors
The Kurt J. Lesker Company KJL-6000 thermocouple tube  is a “drop in” pin exact replacement for the Teledyne Hastings DV-6M. However, the KJL-6000 features an all-metal stainless steel body and pins that are weather and corrosion resistant. The superior internal thermocouple supports ensure a longer life. This rugged tube can withstand a drop of 6 feet without damage. The Kurt J. Lesker Company offers a 30-day money-back guarantee on this product, with no questions asked.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Bob Wehrle, Product Manager
Tel: 1-800-245-1656 or 1-412-387-9200
E-mail: pressure@lesker.com
Stainless Steel Vacuum Angle and Inline Valves
MDC’s stainless steel angle and inline valves are for maximum conductance  and minimum size for easy installation. These valves are ideally suited for systems requiring high reliability and low outgassing. The valves’ low outgassing characteristics can be attributed to a fusion welded 304 stainless steel body, welded AM-350 stainless steel nesting bellows as well as small cross-section elastomers and the elimination of blind internal cavities. The angle and inline valves are in various sizes ranging from 0.25 to 10-inch port diameters. Standard port mounts include: Del-Seal™ CF metal seal flanges, recommended for ultrahigh vacuum service; ISO Kwik-Flange™ and ISO Large-Flange™ fast-make and fast-break elastomer seal flanges, ideal for high vacuum applications requiring frequent assembly and disassembly. www.mdcvacuum.com
Bakeable All-Metal Angle and Inline Valves
MDC’s bakeable all-metal angle and inline valves are designed  for use in ultrahigh vacuum environments where elevated temperatures preclude the use of elastomers and low temperature gasket metals. These valves provide reliable high temperature seals from atmospheric pressures to below 10-11 Torr. Wherever possible, bonnet gasket seals have been eliminated in an effort to minimize the number of potential leak paths. Valves fitted with bonnet seals have been so designed to facilitate gasket replacement. The size and orientation of the valve body ports on bonnet fitted valves precludes gasket removal through its ports. When operated at ambient temperatures, all-metal valves provide hundreds of leak free cycles between routine poppet gasket replacements. In hightemperature applications, life cycles are inversely proportional to the bakeout temperatures. When operated at the maximum bakeout temperature of 450°C, the poppet seal gasket life is reduced to approximately 50 open/close cycles. www.mdcvacuum.com
Soft-Start Angle Valve
MDC’s Soft-Start angle valves provide a smooth pressure transition  gradient from atmosphere to vacuum. A small 0.062” diameter adjustable aperture is activated independently from the main valve opening. Regulation of air flow through the bypass valve is made using an adjustment screw and observing the pressure change. Once the correct setting has been empirically determined, the adjustment screw is held in place with a knurled lock nut to assure consistent and repetitive air flow. The softstart is activated first through a solenoid valve. The main valve may be activated automatically through a set point controller. The soft-start feature provides a smooth pressure change where an abrupt or turbulent flow would disrupt delicate processes or instrumentation in the vacuum chamber. MDC angle valves with a Soft-Start bypass valve are offered in various sizes ranging from 1- to 2” port diameters. www.mdcvacuum.com
Complex Gas Delivery and Chemical Delivery System Assemblies
MDC SemiSystems manufactures a wide variety of custom complex gas delivery and chemical delivery system assemblies to meet end-user specifications. Core capabilities include welding of ultra-high purity gas lines, vacuum weldments, tube bending and assembly. SemiSystems manufactures complex gas delivery and chemical delivery system assemblies. A highly-skilled manufacturing team is supported by experienced Engineering, Quality and Material staff members. Gas Cabinets options include 1, 2, 3 and 4 cylinder gas cabinets; multi-gas cylinders with single controller interface; 1 through 14 stick VMB configurations; and manual/automatic/ semiautomatic gas cabinets. Life safety and SCADA interface are options as well as interior wetted-surfaces electro-polished to 10 to 15 ra; auto switchover; vacuum purge; powder coated 11 gage steel enclosures; and pressure ranging from 5 to 3000 PSI. Wetted parts are 316L stainless steel; and filtration is 0.003 microns with a 4-foot exhaust stack with monitoring sensor; seismic restraint standard; and a color touch screen or two line display. Quality standards include a UL-508 listed controller; leak tested to 1 × 10-9 cc/sec atm; moisture, oxygen and particle testing to the PPB levels; and Semi F-15 Tracer gas testing. Gas Panel platforms are available with traditional VCR • 1-1 /8” C-seals, W-seals, 1-1 /28” C-seals and W-seals. Material finish options include wetted parts are 316L stainless steel; filtration to 0.001 microns, interior surface electro-polished to 10 to 15 ra; anodized or powder coated back panels; and pressure ranges of 5 to 3000 PSI. Testing options include leak testing to 1 × 10-9 cc/sec atm; particle, moisture, oxygen, testing to PPB levels; functional testing to customer specifications; and calibration testing for MFC’s and transducers. Facilities Connection Box and Adapter Plates use of facilities connection box and adapter plates to reduce the time and cost associated with process equipment installation to reduce clean room floor space and can be adopted for multiple tools sets. Many standardized sizes and configuration are available to fit standard 2’× 2’ cleanroom tile vacuum, CDA, chemical, water, inert and specialty gas delivery; removable acyclic window; and bulkhead connections. Materials options are extensive and many custom fittings are available.
MDC Vacuum Products Corporation
Hayward, CA
www.mdcvacuum.com
Tel: 1-510-265-3544
E-mail: Kallen@mdcvacuum.com
MultiGas™ 2030 FTIR Gas Analyzer
The MKS MultiGas™ 2030 is an FTIR-based analyzer capable of  ppb to ppm sensitivity for multiple gas species in a variety of applications, such as stack emissions monitoring, automotive emissions monitoring, process monitoring, and ambient air monitoring. The MultiGas 2030 can perform analysis in gas streams that contain up to 30 gases. With permanently stored calibration spectra, the need for costly gas cylinders is reduced. In addition, operators will find the robust, fully automated MultiGas 2030 easy to operate and maintain. The MultiGas 2030 analyzer is composed of a process FTIR spectrometer, MKS’ patented high-optical-throughput sampling cell, applications-specific analysis software, and an instrumentindependent quantitative spectral library. This provides an accurate, highly-sensitive measurement of most gases and vapors. www.mksinst.com
e-Vision™ Series of RGAs for Monitoring and e-Diagnostics
The web-enabled MKS e-Vision™ represents a significant  advance in RGA technology, opening up new possibilities for vacuum monitoring and e-diagnostics. With an unprecedented range of instrument control options, e-Vision makes vacuum troubleshooting and monitoring of chamber residual gases straightforward. The integrated web server and 10 base-T Ethernet interface enables e-Vision to operate from all locations over any TCP/ IP network, including the internet. When used with a standard web browser, users have control of e-Vision, including access to e-Vision information from remote locations. Users may also directly interface with e-Vision through MKS’ EasyView™ software or using the ASCII protocol. Designed with serviceability and installation in mind, both the analyzer and control electronics are compact and rugged with minimum maintenance requirements. www.mksinst.com
Cirrus™ Atmospheric Pressure Gas Monitor
The MKS Cirrus™ Atmospheric Pressure gas monitor offers the versatility of  state-of-the-art quadrupole mass spectrometry in a convenient bench-top configuration. Incorporating an Ethernet interface, Cirrus systems may be operated from a local PC or connected directly into an Ethernet network hub or switch for remote operation. Cirrus systems are ideal for the on-line monitoring and analysis of gases and gas mixtures including trace contaminants in process gases; solvent vapors; hydrocarbons; atmospheric and inorganic gas species (including corrosives); Freons and noble gases. Gas compositions can be tracked over a wide dynamic range (ppb to percentage levels) with a speed of up to 150 data points per second. The systems are easy to install and operate and features automatic start-up and shut-down routines as well as built-in vacuum and heater interlocking for system protection. www.mksinst.com
Pressure-Insensitive Mass Flow Controllers (• MFC)
MKS MFC mass flow controllers with advanced technology, functionality and performance provide users in semiconductor and high purity thin-film applications increased tool throughput. Real-time accurate flow control that is insensitive to upstream and downstream pressure disturbances is provided through advanced digital algorithms. Real-time control of process gas flow, accuracy and repeatability is significantly improved over conventional PID based digital MFCs. An Integrated LED display shows flow rate, line pressure, gas type and Full Scale range. Complementary Ethernet interface is used for e-diagnostics.
MKS Instruments, Inc.
Andover, MA
www.mksinst.com
Contact: MKS Applications Engineering
Tel: 1-800-227-8766 (USA) or 1-978-645-5500 (worldwide)
E-mail: mks@mksinst.com
Intellisys Pressure Control
Nor-Cal Products offers high performance with the Intellisys downstream pressure control  system, providing measurable process benefits through higher resolution, speed and reliability. The Intellisys Adaptive Pressure Controller (APC) merges closed loop motor control with adaptive pressure control to provide advanced control system performance. An advanced adaptive algorithm eliminates pressure overshoot or gradual ramps during pressure transition. A Digital Signal Processor (DSP) enables DeviceNet™ communications protocol and programming flexibility for customer or process specific requirements. Intellisys motor control technology eliminates belts, gears and position switches, improving reliability, while increasing speed by at least a factor of twenty. Hightorque geared drives are also available as an option. Standard sizes range from one to twelve inches. Substantial cost and space savings can be realized with the IQSeries butterfly valves. All the control electronics are incorporated on to the valve motor drive, resulting in a compact size that is easy to integrate on any system. Nor-Cal Capacitance Diaphragm Gauges (CDG) feature a ceramic diaphragm designed to help stabilize output noise due to thermally induced variations found in other metal diaphragm designs. Heated, nonheated and DeviceNet compatible gauges are available with several tube fittings and in standard pressure ranges from 0.1 to 1000 Torr. Our Universal Valve Drive (UVD) easily replaces older drive technology found on other manufacturers’pressure control valves. When used with our APC, the universal valve drive can upgrade a competitive valve to approach Intellisys performance levels.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Tel: 1-800-824-4166
E-mail: info@n-c.com
PhoeniXL 300 Helium Leak Detector
The PhoeniXL 300 Helium Leak Detector from Oerlikon Leybold Vacuum is a mobile helium  leak detector suited for use in quality control labs, series production and service. The PhoeniXL 300 is qualified for many applications in industry and research where vacuum engineering leak testing including clean-room compatibility. An optional sniffer probe allows for PhoeniXL 300 to be used as a sniffer leak detector. The PhoeniXL 300 is easy to handle offering reliable measurement results, quick readiness for operation, fast response time and automatic calibration. The available LCD Display shows a trend mode, bar mode, universal display, vacuum diagrams and status information. Primary features include: lowest detectable leak rate for helium is < 5 × 10-12 mbar L/Sec; ready for operation in < 3 minutes after start-up; Helium pumping speed is 2.5 liters / second; counter flow design principle extends the service life for cathodes; normal operation at 15 mbar vacuum inlet pressure; ability to detect hydrogen in addition to helium and our exclusive 36 month warranty for the ion source. The PhoeniXL 300 offers an ergonomic and compact design that is maintenance-friendly.
Oerlikon Leybold Vacuum
Export, PA
Contact: Mike Ridenour
Tel:1-800-764-5369
E-mail: mike.ridenour@oerlikon.com
PrismaPlus™ Mass Spectrometer
The combination of high sensitivity, stability and intelligent operation are the “Plus” in the Pfeiffer Vacuum PrismaPlus™ mass spectrometer. In qualitative and quantitative gas analysis and leak detection the user benefits from its robust, compact design, simple integration and from over 40 years of Pfeiffer Vacuum experience in mass spectrometry. With the ability to select different mass ranges (100, 200, 300amu), detectors, ion sources and interface options, it can be employed in many applications, such as: industrial, coatings, analytical, R&D and leak detection. The PrismaPlus is the optimum solution for applications ranging from quality assurance and residual gas analysis through to complex, quantitative tasks. The PrismaPlus delivers precise and stable results down to a detection limit of 1×10-14 mbar. With available Faraday and SEM detectors, even low-level contamination in the vacuum system can be quickly identified. The Quadera® intelligent software is easy to operate and has an easy-to-read platform for capturing and displaying measured data. Using interfaces such as Ethernet, digital and analog I/O, integration in any system is simple. www.pfeiffer-vacuum.com
OmniStar Gas Analysis System
The Pfeiffer Vacuum OmniStar™ gas analysis system is a high  performance, flexible quadrupole mass spectrometer in a compact benchtop package. OmniStar is capable of simultaneously monitoring up to 64 gasses from 100% to below 10ppb with available mass ranges of 1 to 100, 1 to 200 and 1 to 300 amu. Dual filaments are standard with the OmniStar for maximum up-time as well as a secondary electron multiplier detector for fast, low level measurements. Pressure is constantly monitored via a Pfeiffer Vacuum Full Range gauge and the filaments and detector are interlocked based on a user defined trip level. Integral bakeout and inlet heaters are included to reduce backgrounds and prevent condensation. The OmniStar allows for monitoring of gas purity at point-of-use or for accurate quantitative gas mixture measurements. Process control software is standard offering many options for interfacing to the gas handling system. It is also available with protection for corrosive and explosive gas mixtures and can be used over a wide range of gas pressures with many inlet options. Powerful Quadstar™ software running on Windows XP™ , handles the analysis operation and data collection. Quadstar features matrix-inversion routines for quantitative analysis of gas mixtures even with overlapping masses as well as a macro programming module for automatic operation and programming of custom user interfaces. Serial and fiber optic LAN communication ports are included allowing operation of multiple units over long distances with immunity to electrical interference.
Pfeiffer Vacuum, Inc.
Nashua, NH
www.pfeiffer-vacuum.com;
Tel: 1-603-578-6500
E-Mail: prismaplus@pfeiffer-vacuum.com
UGA Series Universal Gas Analyzers
The Stanford Research Systems, Inc. UGA Series Gas Analyzers operate from atmospheric pressure to UHV, with a mass range of up to 300 amu. Standard features include electron multiplier, builtin system heaters, dualdiaphragm pumps, and a multi-capillary input (opt.). The UGA Windows software allows complex graphing and data analysis, as well as complete system control. Three models are available: UGA100, $30,950; UGA200, $31,950 and UGA300 at $32,950 (all U.S. list prices).
Stanford Research Systems, Inc.
Sunnyvale, CA
www.thinkSRS.com
Tel: 1-408-744-9040
E-mail: info@thinkSRS.com
Qulee Quadrupole Mass Spectrometer
The compact ULVAC Qulee quadrupole mass spectrometer has integrated measurement display and control  electronics, eliminating the need for a PC to operate the unit. One-touch control displays the partial pressure readout in Pascal, Torr or mbar of He, H2 O, N2 , O2 , O2 /N2 ratio, and a user selectable channel from mass ranges of 1 to 50, 100 and 200 amu. A removable front-end electronics package permits easy and cost-effective replacement of the quadrupole gauge, which when removed allows the gauge head to be baked at temperatures of up to 250°C. It has built in set points with serial I/O remote control, RS232C and 485 outputs and easy-to-use software enable Qulee to be used for leak detection, RGA and process gas monitoring in PVD systems. A maximum operating pressure of 2 Pa can eliminate the need for differential pumping, and the minimum detectable partial pressure is 1 × 10-10 Pa. Optional differential pumping is available for applications that require it.
ULVAC Technologies, Inc.
Methuen, MA
www.ulvac.com
Tel: 1-978-686-7550
E-mail: sales@ulvac.com
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