Gas Delivery & Diagnostics
June. '08 Digital Edition
Gas Delivery & Diagnostics
Mar. '08 Digital Edition
Gas Delivery & Diagnostics
Nov. '07 Digital Edition
Gas Delivery & Diagnostics
Sep '07 Digital Edition
|
|
|
Article
|
Vacuum Component Literature
Compiled by Terrence Thompson, Contributing Editor
“Components” is a broad term in the vacuum products industry where quality and precision are expected—and provided—by world-class vendors.
This Vacuum Technology & Coating product showcase overs some of the many “vacuum components” used in divers applications.
Ubiquitous Applications
Vacuum components are used in thousands of manufacturing operations. Since a component is simply part of something larger, anything from fittings to vacuum pumps and systems that are integral parts of a manufacturing facility’s equipment.
Product Descriptions
When in doubt, go to Vacuum Technology & Coating magazine’s home page at and click on the advertiser links for additional details or telephone numbers for calling to discuss your specific application requirements. Or, go to the websites listed for each manufacturer. As of press time, some 2008 catalogs and other literature were not available. Please contact the manufacturers for the latest versions.
A&N Corporation 40th Anniversary Catalog
A&N Corporation’s catalog includes: 15 High and  Ultra-High Vacuum Product Sections; expanded Product Descriptions and Specifications; Full-Color Product Photos; Detailed 3-D Product Illustrations; Bonus Guides: “10 Things You Need to Know aboutVacuum” and “How to Specify a Vacuum Chamber.” www.ancorp.com
A&N Vacuum Shut-Off Valves
These A&N Poppet Valves are available in three body styles  including 90?Angle, In-Line andAngle In-Line. Gate Valves offer unimpeded flow with minimal space required for the valve body. Ball Valves offer unimpeded flow, but are less sensitive to particulate contamination than the other valve types.
A&N Corporation
Williston, FL
www.ancorp.com
Tel: 1-800-352-6431
E-mail: pdonavan@ancorp.com
Accu-Glass Products, Inc. Subminiature-D Instrumentation Feedthrough Catalog
Accu-Glass Products, Inc. Subminiature-D Instrumentation  Feedthrough Catalog The Accu-Glass Products, Inc. Subminiature-D Instrumentation Feedthroughs catalog describes available 9, 15, 25 and 50 pin configurations. Accu-Glass has a large inventoryof hermetically-sealed electrical feed- throughs. Overall assembly ratings are ad- justed to that of the lowest rated component. Hermetic Subminiature-D feed- throughs are high density multipin instrumentation feed-throughs constructed with pin arrangements designed to meet MIL-C-24308 specifications for applications in instrumentation, power, coaxial and thermocouple power contact combinations. The 9, 15, 25 or 50 gold plated pins are her- metically sealed and electrically insulated in a stainless steel shell using the latest in glass-ceramic bonding technology. Ultrahigh Vacuum cable assemblies with Peek (polyetheretherketone thermoplastic) connectors and Kapton insulated ribbon cables are available to meet the rigorous demands of ultrahigh vacuum environ- ments.Air and vacuum side connectors are fitted with captured stainless steel socket head screws that provide a means of securely locking them to their mating feedthroughs.Vacuum side cable assemblies, stand-alone connectors and other accessories are also available along with connectors, cable assemblies and custom subminiature-d multipin assemblies with up to 250 pin configurations.
Accu-Glass Products, Inc.
San Fernando, CA
www.accuglassproducts.com
Tel: 1-818-365-4215
E-mail: Sales@accuglassproducts.com
Advanced Energy Cesar® RF Power Supplies Offer Customized Performance or Demanding Plasma Applications
The versatile Advanced Energy Cesar® platform offers exceptionally consistent RF power-delivery performance, as well as a diverse selection of models, each with a unique set of features and capabilities (2, 4, 13.56, 27.12, and 40.68 MHz; 0.3 to 5 kW; with a variety of user interfaces and input options). This enables you to choose a unit suited specifically to your application — without lengthy custom-generator lead times. Standard platform pack- aging makes it easy and inexpensive to replace one Cesar unit with another when your power requirements change. This also minimizes training costs and simplifies design and setup for systems with multiple RF power supplies. www.aei.com
Advanced Energy® Power Systems Crystal® Power Supply
The Advanced Energy® Crystal® resonant-circuit power supply is ideally suited for large-area glass coating, such as architectural, automotive, anti-reflective, and mirror applications. The Crystal platform is available in 60, 120, and 180 kW power levels, providing widerange, mid-frequency sinusoidal process power for dual- magnetron sputtering. Designed specifically for use in a plasma environment, the Crystal power supply produces stable, low-arc energy and compensates for plasma variations — increasing throughput and film quality while maximizing target utilization. www.aei.com
Advanced Energy Pinnacle® Diamond 8, 10, and 15 kW DC Power Supply
In both process and bias applications, the  Advanced Energy Pinnacle® Diamond DC power supply provides the highest efficiency and power factor commercially available, resulting in the lowest operating and installed cost in the industry. Remarkable Pinnacle process consistency and control deliver the additional benefits of significantly reduced variation and higher yields—all from one compact unit. The field-proven Pinnacle platform provides high performance and reliability; fast, configurable arc response, resulting in lowarc damage; and numerous display/control options. www.aei.com
Advanced Energy PEII/RAS Low-Frequency Sinusoidal Power for Dual Magnetron Reactive Sputtering
The Advanced Energy low-frequency PEII series  provides 40 kHz pulse width modulation (PMW) from 5 to 60 kW and features enhanced arc control and internal load matching—with no external combining hardware such as transformers. It provides minimal stored energy, and its superior arc control enables higher-quality film deposition over other AC products. The PEII power supply is easily expandable (to up to 60 kW) in 10 kW increments. When paired with the RAS accessory, it enables cost-effective, single–cathode, dualanode, reactive-sputtering processes and resolves the disappearing anode phenomenon common to reactive processes.
Advanced Energy Industries, Inc.
Fort Collins, CO
www.aei.com
Contact: Marna Shillman, Global Marketing Communications Director
Tel: 1-970-407-6280
E-mail: marna.shillman@aei.com
Alcatel Vacuum Products, Inc. AdixenTM Catalog
Alcatel Vacuum Products, Inc.  manufactures a complete range of AdixenTM brand products including dry vacuum pumps and dry pumping systems, rotary vane pumps, ceramic bearing turbomolecular pumps, full 5 axis maglev turbomolecular pumps, molecular drag pumps, vacuum valves, vacuum gauges, flanges/ fittings, and a complete range of leak detectors. We offer a choice between an N2/H2 detection technique that is lightweight, portable and has middle range sensitivity, and a Helium detection technique with high sensitivity. In the field of advanced process tools, Alcatel offers systems for deep etch, MEMS applications. Alcatel has sales and service offices worldwide to support AdixenTM products. Alcatel is committed to supplying AdixenTM brand high quality products to the world's vacuum technology industry. This precision manufacturing system enablesAlcatel to meet ever increasing and diversified demands for its products. AdixenTM products are used in many markets including semiconductor, automotive, analytical, medical, research and development, HVAC, aerospace, and other industrial markets. www.adixen-usa.com
Alcatel Vacuum Products, Inc. ACP Series Dry Vacuum Pumps
AdixenTM brand dry roughing pumps are particle-free and provide a  minimum of 20,000 run hours between maintenance intervals. The ACP series utilize a frictionless pumping mechanism based upon a proven multi-Roots design. This multi-Roots design produces consistent vacuum performance over the life of the pump (no tip seals or other wear parts in the pumping cell). Models under 66 cfm include a single-phase frequency converter that results in the same pumping speed both 50 and 60Hz. Pumps are available in 8.2 cfm, 16 cfm, 22 cfm and 66 cfm sizes. With an ultimate pressure lower than 3.8 × 10-2 Torr, these pumps are ideal for non-corrosive semiconductor, analytical, pharmaceutical, research and development applications. www.adixen-usa.com
Alcatel Vacuum Products, Inc. Maglev Hybrid Turbomolecular Pumps
The ATH-M series of AdixenTM brand  pumps are magnetically levitated. There is no mechanical contact, no friction and no wear resulting in no scheduled bearing maintenance and reduced cost of ownership. The pumps are actively controlled, real time, in five axis through an automatic balancing system. The pumps are designed for high throughput at high inlet pressure, are resistant against powder and provide a built-in purge to prevent deposition build-up inside the pumps. Additionally, no batteries are required because the motor acts as a generator in the event of a power failure. Pumps are available in pumping speeds ranging from 400 to 2100 liters/second and heated or non-heated versions. www.adixen-usa.com
Alcatel Vacuum Products, Inc. Turbomolecular Pumping Systems for Very High Vacuum Pumps and R&D Applications
The AdixenTM brand turbomolecular pumping  systems provide a flexible design providing a wide range of configurations. Systems are designed for installation on a workbench or below a vacuum chamber and offer optional casters to allow for easy movement. Turbopumps are available in pumping speeds ranging from 80 to 400 l/s, backing pumps are available wet from 5 to 21 m3/hr or a 34 m3/hr dry pump. Plus, numerous vacuum options such as turbopump vent valves, rotary vane pump isolation valves and integrated gauges are available. www.adixen-usa.com
Alcatel Vacuum Products, Inc. Drytel Dry Pumping Systems for High Vacuum Pumps and R&D Applications
The AdixenTM brand Drytel series dry pumping  systems provide a compact, portable, reliable dry design. Systems provide one switch operation from atmosphere to 10-8 mbar. The secondary pumps are available in 7.5 or 30 l/s pumping speeds, diaphragm backing pumps are available in 1 or 4 m3/hr. Options include an interface board allowing remote start/stop, automatic gas ballast to improve the pumping of light gases and reduction of condensation, an exhaust connection and chemical versions. The unique, modern, open design allows for easy maintenance when replacing the membranes that have a 10,000 hour MTBPM. www.adixen-usa.com
Alcatel Vacuum Products, Inc. ATH Series Hybrid Turbomolecular Pumps for Very High Vacuum Pumps and R&D Applications
The AdixenTM brand ATH Series hybrid  turbomolecular pumps incorporate grease lubricated ceramic ball bearings making them mountable in any orientation, low rotational speed providing increased resistance to air inrush and range in pumping speeds from 30 to 300 l/s. Outstanding compression ratios enable these pumps to reach 10-10 mbar ultimate pressure with backing pressures up to 45 mbar. These pumps are available in standard, interstage port and corrosive versions, with water or air cooling, as well as nude versions that may be inserted directly into your instrument - improving performance, decreasing the system size and providing cost savings. www.adixen-usa.com
Alcatel Vacuum Products, Inc. Rotary Vane Pumps
From the inventor of the direct drive rotary vane pump, comes a complete  range of single and two stage rotary vane vacuum pumps. The AdixenTM brand two stage rotary pumps available in 1.4 cfm to 85 cfm sizes. All Adixen brand two stage rotary pumps produce ultimate pressures lower than 2.2 × 103 Torr. These pumps are available in standard version as well as corrosive and hermetically sealed versions. Also offered, the Adixen brand single stage rotary pumps from 3.8 cfm to 500 cfm. Single stage pumps have ultimate pressures lower than 7.5 × 102Torr. www.adixen-usa.com
Alcatel Vacuum Products, Inc. ACP 120 Series General Purpose Dry Pumps
Successfully installed worldwide in the  Semiconductor industry for over ten years, the AdixenTM brand multi-roots technology is now available for other market segments. ACP 120 series pumps offer an attractive combination of pumping speed and ultimate pressure for many R&D and industrial applications. The pumps bring the benefits of clean and dry vacuum whenever particulate or oil contamination is an issue. ACP 120 standard version is for non-corrosive applications and the ACP 120 G version is suitable for pumping traces of corrosive gases or condensable vapors.
Alcatel Vacuum Products, Inc.
Hingham, MA
www.adixen-usa.com
Tel: 1-781-331-4200
E-mail: inquiry@adixen-usa.com
AJA International, Inc. A300-XP UHV Sputtering Sources
The A300-XP UHV sputtering sources are next generation, “expanded performance” versions of AJA International’s A300 SERIES sputtering sources which have dominated the high end, UHV sputter gun market since 1991. TheA300-XP SERIES has been designed to meet the most challenging application requirements in today’s thin film deposition markets. New “expanded performance” features/options include: UHV operation; In-situ or Manual tilt for optimum uniformity; 1 to 10 inch diameter target options; and Modular Magnet Array isolated from cooling water. www.ajaint.com
AJA International, Inc. ATC Series Sputtering Systems
ATC SERIES systems are designed to optimize the unique and extensive features of AJA International’s A300-XP, Stiletto, A3CV, Nautilus and ST-XL Series magnetron sputtering sources. These metal sealed, UHV compatible, modular systems offer an extensive array of optional components enabling end users to customize to meet their individual requirements. Features and capabilities include: 13 to 34 inch diameter chambers; Configured for up, down or horizontal sputtering; Single substrate or cassette type load lock; and Substrate holders with heating, cooling, RF bias, rotation and indexing. www.ajaint.com
AJA International, Inc. Nautilus Series “Rotating” Magnetron Sputtering Sources
The AJA International Nautilus  Series “rotating” magnetron sputtering sources have been designed to meet the most challenging application requirements in today’s thin film deposition markets. Sleek and compact, the Nautilus Series features a gearless direct-drive design with a minimum of moving parts and almost silent operation. Features and capabilities include: Unique “open architecture” Magnet Array; Tunable uniformity and target utilization; Rugged, compact design/ construction; Custom versions available; and Service friendly and virtually maintenance free for long term operation. www.ajaint.com
AJA International, Inc. Stiletto Series Magnetron Sputtering Sources
The AJA International Stiletto Series  magnetron sputtering sources have been designed to meet the most challenging needs of the HV thin film research community. Stiletto Series magnetrons are offered in 1 to 4 inches diameter as well as numerous rectangular target sizes. Features and capabilities include: Rugged HV construction; Unique Modular Magnet Array; In-situ or Manual tilt for optimum uniformity; Magnetic material sputtering/easy removal of large magnetic targets; and 0.5 to 700 mTorr operating pressure.
AJA International, Inc.
N. Scituate, MA
www.ajaint.com
Contact: William Hale, President
Tel: 1-781-545-7365
E-mail: topgun@ajaint.com
AMETEK Process Instruments Model 5100-NCM Analyzer Uses Tunable Diode Laser Absorption Spectroscopy
AMETEK Process Instruments Model 5100-NCMAnalyzer  is a tunable diode laser system that directly measures water vapor concentration in natural gas. The Model 5100-NCM offers natural gas producers, pipeline operators and service companies with a highly reliable and cost-effective method for quickly and accurately measuring moisture in natural gas. The 5100-NMC has a limit of detection of 5PPMV and an operating range of 5 to 2500 PPMV. It is accurate to less than 2% of reading or ±4PPMV, whichever is greater. The laser-based analyzer features compact, fully enclosed optics and sample conditioning, on-board moisture verification, and all digital signal processing. The rugged, compact unit is available in an IP-65 and NEMA 4 enclosure with both modbus and Ethernet analog and digital connectivity. AMETEK Process Instruments—is a leader in on-line analytical instrumentation with the industry’s most extensive product line—offers analyzers based upon eleven differentiated technology platforms and used by markets ranging from oil, gas, and power to pharmaceutical manufacture and semiconductor chip manufacturing. AMETEK Process Instruments is a unit of AMETEK, Inc., a leading global manufacturer of electronic instruments and electric motors. www.ametekpi.com
AMETEK Process Instruments CG1100-GS Oxygen Analyzer
The Ametek CG1100-GS catalog describes  how it is used for air separation, blanket/purge gases, welding atmospheres, food packaging, glove box applications, inert gas purity, nitrogen purity, oven/furnace and atmosphere applications. It features fast response over a Wide Operating Range over an operating range of 0.1 ppm to 100% oxygen. The easy to Integrate into Tool Controller and Data Acquisition System is equipped with an RS-232 and two RS-485 ports. It comes with configuration software for initial setup of operating parameters and accepts user-provided software for efficient integration with a host controller, or optional Dycor System 2000 software to record and process data. The mechanical Flow Meter automatically controls flow maintaining 150 sccm and a remote Calibration UnitAvailable. Optional System 2000 Software is available which provides enhanced interface and process monitoring with graphical user interface for Windows 95/98/2000/ NT/XP formats. A Zirconium Oxide Sensor makes certain that the system will not fail to zero oxygen reading. It is always protected, something not possible with other sensor technologies. The compact 8 × 8 × 8 inch cube houses all electronics, RS-232 port, two RS-485 ports, I/O port and analog output (4 to 20 mA) isolated.
AMETEK Process Instruments
Pittsburgh, PA
www.ametekpi.com
Tel: 1-412-826-2494
E-mail: sales.info@ametek.com
New CeramTec North America 252-page Ceramaseal® Product Catalog
CeramTec North America’s new 252-page Ceramaseal® Product Catalog, with an expanded product line, is the most comprehensive catalog of hermetically sealed components in the world. Ceramaseal® products are built to endure extreme conditions, whether it is an ultra-high vacuum (UHV) environment, temperatures ranging from cryogenic (4K) to 450°C, pressures in excess of 25,000 psig, corrosive or caustic environments, while maintaining an unsurpassed level of reliability and performance. All temperature, pressure, current, and voltage ratings are specified for every part in the NEW Ceramaseal® Product Catalog. Request yours today at . There are more than 200 new parts in the catalog and these new products are focused on connectivity, therefore most new products have mating air and/or vacuum side plugs or cable assemblies. New products include a Micro D (MIL-DTL-83513) product line, an expanded Power Plug product family, high voltage feedthroughs with mating air side cable assemblies and standard high pressure (25k psi) feedthrough solutions. CeramTec pioneered the science of ceramic-to-metal sealing and still remains the world leader in ceramic-to-metal sealing technology. With the addition of glass-ceramic sealing, CeramTec has added high-density hermetically sealed components (Micro D, Sub D & Circular Connectors) to the line up. Ceramaseal® products include feedthroughs, multipin connectors, coaxial connectors, thermocouples, isolators, viewports, and vacuum hardware. These components are ideally suited to support optical, gas, liquid, power, instrumentation, and sensing applications. All of CeramTec's Ceramaseal® Products are guaranteed to a leak rate < 1 × 10-10 atm-cc/sec (He). A subsidiary of CeramTecAG, CeramTec NorthAmerica is a manufacturer and distributor of custom-engineered, high-tech ceramics. CeramTec's ISO 9001:2000 processes create technical ceramic and Ceramaseal® products and subassemblies with exceptional precision, thermal stability, performance and service life. Its products are specified across a broad spectrum of applications, including electrical, electronic, structural, textile, automotive, metal cutting tools and hermetic systems. www2.ceramtec.com
CeramTec North America Product Guide for Hermetic Electrical and Optical Components
CeramTec NorthAmerica pioneered the science of ceramic-to-metal sealing more than 55 years ago and remains the world leader in ceramicto-metal sealing technology. With the addition of glass-ceramic sealing, CeramTec has added high-density hermetically sealed components (Sub D Type & Circular Connectors) to the line up. These Hermetic Products include feed-throughs, multipin connectors, coaxial connectors, thermocouples, isolators, viewports, and vacuum hardware, which can all be found in the print Product Guide or within our online catalog (). These components are ideally suited to support optical, gas, liquid, power, instrumentation, and sensing applications. Our 376 page Hermetic Product Guide, with an expanded product line, is the most comprehensive catalog of hermetically sealed components in the world. CeramTec’s Hermetic Products are built to endure extreme conditions, whether it be an ultra-high vacuum (UHV) environment, temperatures ranging from cryogenic (4 K) to 450°C, pressures in excess of 25,000 psig, corrosive or caustic environments, while maintaining an unsurpassed level of reliability and performance. www2.ceramtec.com
New CeramTec Micro D Connector
Micro D Connectors are rugged and lightweight hermetic connectors designed to meet MIL-DTL-83513 specifications. Contacts are on 0.050 [1.27] centers, which provides a significant space and weight savings over other traditional Mil Spec connectors. Standard configurations include 9, 15, 25 and 51 gold-plated pin/ socket contacts, which are available as a weldable unit or in a ConFlat® or ISO flange. CeramTec uses a proprietary glass-ceramic sealing process to individually seal and electrically insulate each pin from the stainless steel housing. This allows for a very high pin/lead density and the extremely robust hermetic seal. These hermetic connectors are built for the most demanding environments and offer a much higher level of durability and reliability than any glass or elastomer sealed connector. Mating air side cable assemblies with standard color coded 6-inch flying leads are offered for ease of installation. Custom PEEK thermoplastic plugs are offered for easy connectivity on the vacuum side of the connector. These PEEK plugs are fitted with gold plated 0.020 female crimp contacts, which mate to the male pins on the vacuum side of the Micro D connector and can be used with #26 through 30 AWG Kapton® wire. www2.ceramtec.com
New CeramTec 40 & 50 kV Feedthroughs
The 40 & 50 kV feedthroughs with mating air side cable assemblies offerings include a 40 kV feedthrough and a 50 kV feedthrough, which each have a 10 amp current carrying capacity. These high voltage feedthroughs offer a much smaller solution to fluted high voltage feedthrough designs and have the added safety of the air side cable assembly, which has a threaded connection. The standard offering includes weldable, ConFlat® and ISO flange mounted installation configurations. The corona resistant high voltage cable assembly, which is required to achieve the 40 or 50 kV rating, utilizes a molded silicone body and silicone insulated cable. The standard length for these cable assemblies is 8 feet custom lengths are available. The use of silicone insulating grease is recommended for the air side cable assembly to feedthrough interface to help assure air exclusion. High voltage conditioning is also recommended for these feedthroughs. These new high voltage feedthroughs are built for use in extreme conditions. The feedthrough has a temperature capability of -269°C to 450°C and is guaranteed to be leak tight to a leak rate < 1 × 10-10 atm-cc/sec (He). www2.ceramtec.com
New CeramTec .154 & .250 Power Plug Feedthroughs
These Power Plug products are a high power  extension of CeramTec’s standard 10 kV and 20 kV Power Plug product line. The new .154 Power Plug offers a 10 kV rating and a current carrying capacity of 75 amps when mated with the air side cable assembly. The 0.250” Power Plug feedthrough is rated for 25 kV and 100 amps when mated with the air side cable assembly. Both are built for simple and safe high power connectivity. Both the 0.154” and the 0.250” Power Plug feedthroughs are standard with a nickel or copper conductor for high current applications. The standard offering includes weldable, ConFlat®, ISO flange or NPT fitting mounted installation configurations of 1 to 4 pins. The high voltage cable assembly, which is required to achieve the 10 or 25 kV ratings, utilizes a custom plug or boot to mate to the CeramTec feedthrough and an 8 AWG (.154 Power Plug) or 6 AWG (.250 Power Plug) tin plated copper conductor cable with silicone insulation.
CeramTec North America
Hermetic Products
Laurens, SC
www2.ceramtec.com
Tel: 1-800-752-7325
E-mail: sales@ceramtec.com
Comdel Power Supply Catalog
Comdel, Inc. designs and manufactures RF and DC power supplies and process instruments used in semiconductor vacuum and flat panel process tools, Solar Photovoltaic thin-film systems, industrial heating systems, medical sterilization, optical, drying and other induction and dielectric heating applications. Products include RF generators, auto-match impedance monitors, and electrostatic chuck power supplies that are in use worldwide by the industry’s major equipment and IC fabrication manufac- turers. The full-line of RF power supplies operates at frequencies from 20 kHz to 80 MHz with selected topographies up to 150 MHz. Our generators include power levels ranging from 100 to 100,000 watts. Comdel’s patented S-Technology, used in high frequency RF plasma generators, optimizes amplifier performance, reducing power gain changes due to plasma impedance fluctuations. This increased stability reduces process development time and improves process repeatability. Comdel’s products are compliant with CE, SEMI F47, and the ETL product safety mark. Configurations include custom packaging for high frequency, low frequency, dual frequency, DC or dual combinations of DC and RF power in one unique package. With flexible power delivery solutions, the broadest frequency ranges available, rapid prototyping, product certification and safety compliance, This Gloucester-based, ISO 9001:2000 company provides responsive support and product solutions from its offices in the US, UK, Asia, and Japan.
Comdel, Inc.
Gloucester, MA
www.comdel.com
Contact: MaryBeth Masterson, Marketing Manager
Tel: 1-978-282-0620 Ext. 102
E-mail: marybeth_masterson@comdel.com
Denton Vacuum Explorer® Thin Film Deposition Platform
The Denton Vacuum Explorer offers the thin film user a flexible platform for deposition by electron beam, resistance evaporation, or sputtering on a cost-effective platform. PLC Automation is included as standard. The option to add a load-lock, additional deposition sources and an ion source are all available. For very sophisticated processes, Denton’s renowned ProcessPro software is also available. Denton specializes in offering custom thin film solutions to specific application requirements. By taking a flexible approach and discussing process requirements, Denton is able to offer the User a system configured to meet specific performance objectives. With many Explorer units installed, Denton offers 40 years of thin film experience to its customers. www.dentonvacuum.com
Denton Vacuum Discovery® HDG Family of Ion Beam Deposition Systems
Denton Vacuum LLC announced the launch  of the Discovery®-HDG family of ion beam deposition systems. The Discovery®-HDG was developed to address the needs of leading-edge R&D activities and pilot-scale production efforts that require maximum uptime, flexibility and materials choices. “Powered by Veeco’s leading edge ion source technology,” the Discovery®-HDG supports deposition sources 3-6 cm in diameter and etch/assist sources from 3 to 16 cm. Various tooling options are available from manual/automatic tilt (watercooled) single rotation stages to water-cooled, tilting planetaries.As with all Denton systems, the Discovery®-HDG incorporates best in class components, automation, and process support. The system is CE compliant and serviced by Denton’s world-wide organization.
Denton Vacuum U.S.A.
Moorestown, NJ
www.dentonvacuum.com
Tel: 1-856-439-9100
E-mail: info@dentonvacuum.com
Filmetrics “Taking the Mystery out of Thickness Measurements”
Filmetrics features a full line of  UV-NIR spectrometer systems for measuring thickness (from 30 Å to 450 µm) and optical properties of thin films. These affordable systems are faster, easier-to-use, and less expensive than conventional instruments. Filmetrics has also created an easy to understand guide entitled “Taking the Mystery out of Thin-Film Measurement”. After a short introduction to thinfilm technology, the guide starts to break down the complexities behind spectral reflectance for both single layer films as well as multiple layer film stacks and the interactions of thickness measurements with optical constants. It also provides details on how to determine film properties using spectral reflectance, comparing the use of spectroscopic reflectance versus ellipsometry. E-mail Filmetrics at to request your copy.
Filmetrics, Inc.
San Diego, CA
www.filmetrics.com
Tel: 1-858-573-9300
E-mail: TMO@filmetrics.com
Glassman High Voltage DC Power Supplies for High Voltage and Vacuum Processing Plasma Applications Catalog
Glassman High Voltage, since 1977, has  been a leading designer and manufacturer of DC Power Supplies for the High Voltage and Vacuum processing equipment markets. Power supply output voltages range from 1 kV-400 kV, output power from 15 W to 50 kW for a broad range of industrial, medical and scientific applications. Glassman's reputation of providing power supplies that offer long-term reliability and robust performance have made us the primary choice for OEM and Laboratory requirements.
Glassman High Voltage, Inc.
High Bridge, NJ
www.glassmanhv.com
Tel: 1-908-638-3800
E-mail: info@glassmanhv.com
Goodfellow Corporation High-Performance Polymer Materials
The Goodfellow Corporation catalog is available on CD-ROM. To get your free copy, send an e-mail with the words “CD-ROM Catalog” in the subject line. Many high performance materials are available. Polyphenylsulphone (PPSu) has recently been added to our range of polymer materials. Available from stock in a range of rod sizes from 12.7 mm to 40 mm diameter, this material is being used in various sectors, including the manufacture of medical devices. Other sizes and forms, including sheet, are available and will be added to the catalog in time. Polyphenylsulphone (PPSu) is an amorphous, high performance thermoplastic which offers better chemical and impact resistance than either polysulphone or polyetherimide. It offers superior hydrolysis resistance when compared to other amorphous thermoplastics (measured by steam autoclaving cycles to failure). PPSu has virtually unlimited steam sterilizability, outlasting other materials by a factor of 40:1. This factor makes it an excellent choice for medical devices as steam autoclaves are widely used to sterilize these items. PPSu also resists common acids and bases including commercial washing solutions over a broad temperature range. Industrial applications include sterilization trays, dental and surgical instrument handles, hot water fittings & aircraft cabin interior components. Goodfellow supplies metals, alloys, ceramics, polymers and other materials to meet the research, development and specialist production requirements of science and industry worldwide.
Goodfellow Corporation
Oakdale, PA
www.goodfellow.com
Tel: 1-800-821-2870
E-mail: info@goodfellow.com
HORIBA Jobin Yvon LEM: In-Situ Etch Rate Monitoring and Endpoint Detection
HORIBA Jobin Yvon’s LEM interferometer for in-situ etch rate monitoring and end point detection. The LEM is the next step from the previous SOFIE DigiLem. With its new compact design and enhanced image quality, the LEM can be mounted on any process chamber with a direct top view of the wafer. It provides a realtime digital CCD image of the sample surface, making its laser beam positioning simple and accurate. Based on interferometry technique, the LEM provide in-situ etch/growth rate monitoring for endpoint detection of a wide range of dry etch applications. Depending on the configuration selected, the LEM can provide a simple analog signal output for analysis with an external software, or can be delivered with our state-of-the-art APC software -SIGMA-P- for accurate etch rate, trench depth and process statistical calculations. By using simply a TTL trigger and our optional pattern recognition software, the LEM can be easily interfaced to any process chamber for an operator free process monitoring and end point detection. www.jobinyvon.com
HORIBA Jobin Yvon MM-16: Affordable Spectroscopic Ellipsometer for Advanced Thin Film Characterisation
HORIBA JobinYvon’s MM-16 is a highly accurate, sensitive and affordable spectroscopic ellipsometer that extends the capabilities of classical ellipsometry. Along with measurements of thin film thickness and optical constants, the MM-16 delivers in 2 seconds, the complete 16 elements of the Mueller Matrix in the visible-NIR spectral range (420 nm - 850 nm). Combined with the embedded analysis software -DeltaPsi2- this additional capability allows simple and easy characterization of anisotropy, birefringence and degree of depolarization. These complex materials properties are widely used in optical coatings, display, biotechnology, packaging and semiconductor applications. With the addition of options such as automatic variable angle of incidence and X-Y mapping stage, the MM-16 is the ideal spectroscopic ellipsometer for simple, fast and accurate measurements of your multilayer stack film thickness and optical constants.Attached to your process chamber for in-situ applications, the MM-16 will deliver real time film thickness and optical constants for process optimization.
HORIBA Jobin Yvon Inc.
Edison, NJ
www.jobinyvon.com
Contact: Eric Teboul
Tel: 1-732-494-8660 Ext. 117
E-mail: teboul@jobinyvon.com
Huettinger Electronics DC Power Supplies and Generators Catalog
HUETTINGER Electronics is a manufacturer of power supplies and generators for a variety of plasma process, vacuum coating and induction heating applications. The Company’s products cover the frequency range from DC to 13.56 MHz with output powers up to 500kW. Of particular interest to vacuum coaters is the Company’s line of DC and medium frequency (MF) power supplies for magnetron sputtering. With outputs from 1kW to 150kW, these products are ideally suited for sputtering metals or ceramics on a wide variety of substrates in all sizes and materials. HUETTINGER power supplies are available with advanced arc management systems, ARCtelligent™ and ARCgenius™ , for superior deposition results. In many applications, these sophisticated controls allow HUETTINGER’s standard DC power supplies to be used in place of more expensive pulsed DC power supplies. HUETTINGER is introducing their Series HMP power supplies for (High Power Impulse Magnetron Sputtering (HIPIMS) applications. These products provide very high output pulses, up to 18MW, for creating high density, highly ionized plasmas. Typical application include hard coating, plasma pre-treatment and high aspect ratio trench filling.
Huettinger Electronics, Inc.
Farmington, CT
www.huettinger.com
Tel: 1-860-255-6555
E-mail: info-us@huettinger.com
INFICON Vacuum Components for Demanding System Requirements
The INFICON Vacuum Control Catalog includes a broad range of vacuum gauges, valves, HV-fittings, feedthroughs, and UHV-fittings. Products highlighted include INFICON Digital SKY CDGs which provide economical, high accuracy pressure measurement and TripleGauge® , the combination vacuum gauge that combines Bayard-Alpert, Pirani, and Capacitance Diaphragm technologies into a single, compact, economical package. The Vacuum Control Catalog is available online at www.inficon.com
INFICON Leak Detectors Catalog
INFICON helium and refrigerant gas leak detectors provide quality control for a wide variety of leak testing applications and are available in portable, mobile, hand-held and stationary models. Products include the Protec® P3000 Helium Sniffer Leak Detector, well suited for demanding production environments, and the UL1000 Fab for fast, reliable results in cleanroom applications. The Leak Detectors Catalog is available online at www.inficon.com
INFICON Manually Actuated Valves
INFICON manually actuated, high  conductance, compact valves, modelVAHxxx, are available in both aluminum and stainless steel. These valves are factory tested for a leak rate specification of < than 10-09 mbar and have an expected cycle life of 10 million in a clean vacuum environment The spindle drive mechanism used on the manually actuated DN 63-100 ISO-K valves provides the user with a smooth and effortless means of opening and closing the valve. INFICON also offers, a series of virtually maintenancefree UHV stainless steel, manually actuated valves DN 16 to 63 CF, model VAHxxx-Z. www.inficon.com
INFICON Electro-Pneumatically Actuated Valves
INFICON’s a full line of electro-pneumatically actuated, high conductance valves, model VAPxxx, available in stainless steel or aluminum, size DN 16-160. All valves are bellows sealed, include a visual and electrical position indicator, and can be operated in the normally open or normally closed position, depending on the solenoid chosen. Valve sizes DN 16-40 KF have an expected service life of 10 million cycles under clean vacuum conditions. www.inficon.com
INFICON Variable Leak Valves and Controllers
INFICON’s a full line of variable leak valves ranging from manually actuated coarse control to fully automated fine control. Our manually actuated wide-range variable leak valve, VDH016-X with digital display and integrated shut-off that preserves the leak rate setpoint. INFICON offers two upstream automatic pressure control systems. The VDE016-X or VDM005-X /VCC500 system controls the absolute pressure of the vacuum system using the 0-10V output of a reference vacuum gauge. The auto or PID control mode adjusts the output signal to the control valve compensating for deviations from a pre-determined set point pressure. TheVDE040-U/VCE500 system controls gas pressure by thermal expansion or contraction of the valve stem. Depending on the type of signal generator used, total or partial pressure can be controlled. www.inficon.com
INFICON Components
For maximum convenience, INFICON offers a broad line of valves, HV-fittings, feedthroughs and UHV-fittings. Wide selection and design, fast product availability, and expert advice for standard and customized installations ensure a reliable solution for every vacuum engineering application in production or research. www.inficon.com
INFICON’s Three Technologies In One Compact Gauge Reduces Cost and Complexity of Process and Base Pressure Measurement
The INFICON TripleGauge Bayard-Alpert Pirani Capacitance  Diaphragm Gauge takes the place of three stand-alone gauges (hot ion, convection-enhanced Pirani, and vacuum switch). The unique TripleGauge reduces the complexity of installation, set-up, and vacuum measurement on the semiconductor tool for processing and transfer chambers. The TripleGauge BCG450 combines the advantages of three sensor technologies in a single, economical package to measure process and base pressures from 3.75 × 10-10 to 1125 Torr. Above 10 Torr, the TripleGauge BCG450 measures gas-typeindependent and solves venting problems with different gas types such as argon or helium. The integrated Pirani sensor protects the hot ion filament from burn-out by automatically switching emission off at high pressures. www.inficon.com
New Capacitance Diaphragm Gauges From INFICON Provide Economincal, Highly Accurate Pressure Measurement
The INFICON SKY CDG025D Capacitance Diaphragm Gauge line of highly accurate temperature compensated manometers is designed for stable performance in harsh manufacturing tool environments. Advanced digital electronics improve gauge performance and offer easy handling features such as one push-button zero function and setpoint adjustment. The corrosion resistant ultra pure ceramic sensor provides excellent zero stability with a long life expectancy of several million pressure cycles, including atmospheric bursts. A unique sensor shielding (patent pending) protects the gauge from process contamination. A robust mechanical design and digital electronics improve EMC compatibility, long-term stability and temperature compensation. The CDG025D sets new standards for fast stability after power on and fast recovery from atmospheric pressure exposure. The INFICON SKY CDG025D provides accurate and fast pressure measurement for demanding applications: semiconductor manufacturing equipment for Etch, CVD, PVD, ALD; data storage and display manufacturing equipment; industrial vacuum equipment and general high accuracy pressure measurement.
INFICON
East Syracuse, NY
www.inficon.com.
Tel: 1-315-434-1100
E-mail: reachus@inficon.com
Inland Vacuum Mechanical And Diffusion Pump Fluids
Inland Vacuum manufactures and distributes a complete line of mechanical and diffusion pump fluids for all pump types and vacuum applications. Inland also offers a line of preventive maintenance products, heat transfer fluids, and high vacuum greases and waxes. Inland’s services include custom distillation of fluids and a reclamation service for used fluids. Inland's mechanical pump fluids are vacuum distilled paraffinic hydrocarbons containing no aromatic or viscosity improvers that are lost during oil filtration. Compared to undistilled vacuum pump fluid, Inland's pure vacuum mechanical pump fluids provide excellent lubricity, oxidation resistance, lower vapor pressure and four to ten times longer fluid life. As an authorized distributor, Inland also offers a line of Fomblin PFPE fluids and Halovac inert vacuum pump fluids. Inland vacuum also offers a broad line of diffusion pump fluids for a wide range of applications. These fluids include distilled hydrocarbons, silicones, organic esters, and other synthetics.
Inland Vacuum
Churchville, NY
www.inlandvacuum.com
Tel: 1-585-293-3330
E-mail: info@inlandvacuum.com
InstruTech, Inc. Vacuum Gauging and Accessories Catalog
InstruTech’s catalog contains complete product descriptions, specifications, and applications for its vacuum gauging products and accessories. The catalog provides details of InstuTech’s Ionization and Convection Enhanced Pirani vacuum gauges using the latest advances in sensor and controller design. It describes a product portfolio of Convection Enhanced Piranis and Miniature Ionization vacuum gauges with a measurement range of 1 × 10-9 Torr to atmosphere. The catalog covers both stand alone vacuum gauge sensors and complete vacuum gauge modules with built-in or remote controllers with displays. In addition outputs for interface to customer’s system including analog, set-point relays and RS232/RS485 digital communications are fully described in the catalog.
InstruTech, Inc.
Longmont, CO
www.instrutechinc.com
Contact: Laura Anderson
Tel: 1-303-651 0551 Ext. 124
e-mail: info@instrutechinc.com
J. A. Woollam Company VUV-VASE® Second Generation Vacuum Ultraviolet Ellipsometer
The J. A. Woollam Company’s second  generation Vacuum Ultraviolet Ellipsometer accommodates large samples and photo mask or wafer mapping. J. A. Woollam Company introduced the original VUV-VASE in 2000. It's award winning design expanded spectroscopic ellipsometry down to 140 nm, to the vacuum ultraviolet (VUV) by using an innovative dry nitrogen purge system. Now the next generation VUV-VASE ellipsometer offers a larger sample stage to accommodate 300 mm samples along with optional translation and mapping. These new options make the 2nd Generation VUV-VASE even more capable and able meet industry needs than the original. The wide spectral range of theVUVVASE gives it an incredible versatility to characterize all type of materials: semiconductors, dielectrics, polymers, metals, multilayers, and more. Because the ellipsometer is able to measure such short wavelengths, it is sensitive to ultra-thin films and it's able to measure accurate n and k values at lithography exposure lines (157 nm, 193 nm, and 248 nm).A deuterium source and a PMT detector have been added to the existing Xe source and photodiode detector to increase short wavelength capabilities. This also provides a boost in signal to noise in the deep UV which is beneficial for the 193 nm lithography line.
J. A. Woollam Co., Inc.
Lincoln, NE
www.jawoollam.com
Tel: 1-402- 477-7501
E-mail: sales@jawoollam.com
KDF Electronic & Vacuum Services 900 Series In-Line Sputtering Tool for High Throughput Surface Acoustic Wave Manufacturing
KDF Electronic & Vacuum Services, Inc., produces batch in-line sputtering tools in a wide variety of R&D and production formats for the mainstream silicon, emerging materials and flat-panel display markets. KDF systems are used in the production of semiconductors, photomasks, telecommunications networks, wireless circuits, gallium arsenide (GaAs), high density interconnect, sensors, optoelectronics, flat panel display and radio frequency power devices. The 900 Series exceeds requirements for deposition of thin films in application critical devices and other applications requiring the absolute in uniformity. The 954NT is a four-target batch sputtering tool for front- and backside deposition. The tool, which is optimized for processing GaAs and other compound semiconductor applications, features a low cost of ownership, and enables high utilization and throughput.
KDF Electronic & Vacuum Services Inc.
Rockleigh, NJ
www.kdf.com
Tel: 1-201-784-5005
E-mail: sales@kdf.com
Kurt J. Lesker Company 900-Page Vacuum Technology Products Catalog
The Kurt J. Lesker Company 900-page Vacuum Technology Products Catalog is the most comprehensive vacuum product source and reference guidebook available. It is an indispensable resource for scientists, engineers, and anyone developing, designing or using vacuum equipment. This full-color edition includes our standard and custom vacuum components, sputtering sources and materials, sub-systems, general deposition systems, pumps, valves, hardware, manipulation products, and much more. Technical notes in every section explain general vacuum concepts. Call 800-245-1656 or visit for your free copy. www.lesker.com
New Kurt J. Lesker Company Sputter Target Bonding Technology
Kurt J. Lesker Company’s revolutionary LeskerBond™ service offers in-air room temperature sputter target bonding using the patented NanoBond® process technology and NanoFoil® from Reactive NanoTechnologies Inc. Our service offers superior bonding of targets to backing plates with different coefficients of thermal expansion (e.g., ceramics to metals), thus reducing or eliminating target cracking or debonding during deposition. For more information, data, and a video demonstration of the NanoBond® visit: www.lesker.com
Kurt J. Lesker Company Performance Sputtering Magnetrons
The Kurt J. Lesker Company continues to offer and has expanded its offering of Torus® Linear Magnetron Sputtering Sources. These sources are ideally suited for high volume coating applications due to their excellent target utilization (> 40%) and high power densities (> 500 W per square inch for the direct cooled version). The Torus® Linear sources, with clamped or bonded targets, are used in production coating applications that include: flat panel display, functional and wear resistant coatings, automotive coatings, optical films, and decorative coatings. The Torus® Linear sources accept targets ranging from 2” to 12” wide up to 1” thick, and lengths from 12” to three meters. All are RF, DC, or pulsed-DC compatible. Numerous options are offered including internal or external source mounting. New is a high performance, high utilization ITO cathode. www.lesker.com
Kurt J. Lesker Company Torus HV Round Magnetron Sputtering Cathodes
The Kurt J. Lesker Company has been manufacturing magnetron sputtering sources for nearly three decades under the Torus® Trademark. The Torus family of high vacuum capable round magnetron sputtering sources find application in a vast array of research and production applications. The Torus® HV sources utilize simple, clamped, disk shaped targets, are RF, DC and pulsed DC compatible, and are available in balanced and unbalanced versions. They are used to sputter metallic, magnetic, and insulating targets and can be supplied with numerous options including: direct gas injection, deposition chimneys, tilt, and cluster configurations. State of the art magnet arrays allow Torus HV sources to achieve outstanding deposition rates, film uniformity and material utilization for a wide variety of materials. All Torus® HV sources are compatible with vacuum levels to as low as 3 × 10-9 torr. Torus® HV round sources are available in sizes ranging from 1” to 12” diameter and are available with numerous mounting options. www.lesker.com
Kurt J. Lesker Company Organic Materials Evaporation Sources
Kurt J. Lesker Company’s three thermal evaporation  sources cover a range of temperatures required for thin-film deposition of materials of differing volatilities. Organic or organicmetallic materials are volatile, highly temperature sensitive, and cannot be sputtered. The LTE Low Temperature Evaporation Source is ideal for depositing organic thin-films requiring precise control of source temperatures from 100EC to 600EC to achieve appropriate deposition rates. This source is available with effusion cell capacities from 1 cc to 50 cc. Sources with operating temperatures up to 1500EC are also available. www.lesker.com
Kurt J. Lesker Company Chambers & Subassemblies
The Kurt J. Lesker Company proudly offers its Components, Chambers and Sub-Assemblies catalog for 2007. This fullcolor resource illustrates the capabilities of the Lesker manufacturing and assembly group. Products featured include: standard and custom chambers, subassemblies, hardware and components, frames, and sample handling (HV & UHV). www.lesker.com
Kurt J. Lesker Company UHV Products
Our Kurt J. Lesker Company UHV Products flyer features our lines of: Rotary/Linear PowerProbes; SET (Sample Exchange Technique) sample transfer components; SMC Series stepper motor controllers; MagiDrive magnetically-coupled rotary feedthroughs; LSM linear shift mechanisms; MultiBase XY and MultiStage XYZ Stages; and the EpiCentre 100 heating and rotation stage. www.lesker.com
Kurt J. Lesker Company Atomic Layer Deposition (ALD)
Kurt J. Lesker Company offers standalone ALD tools for basic research, or completely integrated deposition systems for complex R&D applications. All tools feature high speed ALD valves and integrated pumping, pressure measurement, and gas delivery packages optimized for any specific process.
Kurt J. Lesker Company
Clairton, PA
www.lesker.com
Contact: Bill Zinn, Marketing Spec.
Tel: 1-412.387.9200
E-mail: sales@lesker.com or international@lesker.com
Leybold Optics HELIOS Innovative Sputtering System The Leybold Optics HELIOS sputtering tool is a flexible platform for fast, precise and fully automated thin film coatings. Its specialty are high quality optical coatings featuring very low absorption and scattering. Excellent optical performance is ensured by the extremely dense, smooth, stoichiometric, and amorphous layers. Ultimate precision in layer growth control is facilitated by an optical monitoring system (option) for in-situ on-substrate measurements. HELIOS can be used for a wide range of optical coating applications, including edge, bandpass, color, and UV/IR cut filters as well as beam splitters and laser mirrors. Besides optical coatings, other dielectric coatings (oxides, nitrides) as well as metallic coatings can be easily produced, depending on the source configuration of the HELIOS.Applications include: precision optics; Optoelectronics; Sensors; and Telecom. www.leyboldoptics.com
Leybold Optics SYRUSpro CFM High Performance Coatings for Digital Optics
Optical thin film coatings are a key enabling technology for digital optics. Constantly increasing demands on image resolution, contrast, color definition, and brightness place exacting requirements on the optical filter performance. The Leybold Optics SYRUSpro CFM is an innovative and cost-effective thin film coating solution for high performance optical filters, tailored to fulfill current and future requirements in digital optics. The APSpro ensures shift-free UV/IR cut filters (top), and excellent filter performance with high transmission and low ripple (bottom). Outstanding uniformity and reproducibility is demonstrated by the data of five substrate positions distributed over the calotte radius, and 6 consecutive production runs. Note: Measurement without backside AR coating. Today’s filters meet a growing range of performance parameters and must be produced within ever-shorter deadlines. This is why excellent quality is the basis for modern digital optics production. A cost-effective thin film deposition system must also deliver increased productivity through consistently high throughput and high yields. Higher product requirements combined with lower cost of ownership demands all add up to an increasingly challenging business environment for the filter manufacturer. Innovative production technology from Leybold Optics provides mass production solutions with outstanding performance, productivity and reliability.
LEYBOLD OPTICS GmbH
Alzenau, Germany
www.leyboldoptics.com
Tel.: +49 (0) 60 23-50 0-467
E-Mail: info@leyboldoptics.com
MV Products Vacuum Inlet Traps, Cold Traps, Filter Elements, and Oil Mist Eliminators
The MV Products division of Mass-Vac continually conducts research and development on improving the quality and effectiveness of our products. Vacuum Inlet Traps, featuring the MV MULTI-TRAP, POSI-TRAP and VISI-TRAP provide flexible, highly efficient protection for your vacuum pumps and systems.All of our traps are available with a wide selection of filter elements that can be changed easily without breaking down your entire vacuum system. Filter elements are offered in several different types to best suit your specific system requirements. Process recommendations are based on empirical data enabling us to predict the trap efficiency as well as the trap maintenance interval. Trap results are documented and available on processes such asALD, LPCVD, PECVD, MOCVD, Metal Etch, and Crystal Growing. Oil mist eliminators for vacuum pump exhaust, featuring the MAXI-MIST, MIDI-MIST, and VISI-MIST offer one or more highly-efficiency, pleated low resistance microfiberglass coalescing filter element. Select the unit that best matches your vacuum pump size, from 1 to 300 CFM.
Mass-Vac, Inc.
North Billerica, MA
www.massvac.com
Tel: 1-978-667-2393
E-mail: sales@massvac.com
MDC Vacuum Products, LLC Vacuum Components Catalog – “Building Blocks for Vacuum Science & Technology”
This 528 page catalog details MDC’s expanded line of high and ultrahigh vacuum components. From basic elastomer gaskets to sophisticated instruments for e-beam evaporation, MDC provides dependable and reliable solutions for vacuum science and technology. MDC’s comprehensive product line includes: Flanges & Fittings- Del-SealTM CF, Kwik-FlangeTM ISO KF, Large-Flange, TM ISO LF; Valves- Angle, Inline, Circular & Rectangular , Gate, Leak; Roughing Components; Foreline Traps, Sorption Pumps, Del-Flex TM process line, stainless steel flexible hoses; Electrical & Fluid Feedthroughs- Coaxial, Power, Instrumentation, Breaks & Envelopes; Motion & Manipulation- Rotary, Linear, Multi-Motion, XYZ Stages, Load-Locks, Motors; and Chambers- Surface Science, Bell Jars, Collars, Baseplates, Base Wells. To request your FREE catalog, call 1-800-443-8817 or visit www.mdcvacuum.com
MDC e-Vap® and Re-Vap™ Evaporators
MDC produces state-of-the-art thin film vacuum coating equipment, and offers a wide range of choices and options in both, standard off-the-shelf components and customize designs. MDC’s e-Vap® and Re-Vap™ product lines fully support electron beam or thermal evaporation methods. Featured products include the super economical and compact, 4 pocket, 3 kW, e-Vap® Mighty Source™ . Specifically tailored for pilot production, lab/R&D and the university marketplace, the Mighty Source™ provides the ideal deposition solution for your evaporation needs. Contact MDC now and request your free brochure. www.mdcvacuum.com
New Insulator Seal Catalog
ISI’s latest catalog consists of 275 pages detailing an expanded line of Ceramic-to-Metal vacuum components. Featuring UHV-grade electrical feedthroughs and optical viewports for Ceramic-to-Metal seal applications, ISI provides dependable and reliable solutions for vacuum science and technology. Expanded product lines featured in this edition include Multi-pin, Low/high current power, Coaxial, Liquid, Thermocouple & RF Feedthroughs, Optical view- ports and Vacuum breaks & envelopes. ISI is ISO 9001:2000 registered. Call 1-800-443-8817 or visit to request your FREE catalog.
MDC Vacuum Products, LLC-
Dedicated to Quality and Service
Hayward, CA
www.mdcvacuum.com
Tel: 1-510-265-3500 or toll-free 1-800-443-8817
E-mail: sales@mdcvacuum.com
MeiVac HEDA RF Diode Large Area Dielectric Sputtering Tools Brochure
For more than 30 years MeiVac Inc. has supplied Semiconductor, Storage,  Optical, Decorative, Industrial, Academic & Government markets. Products include Standard & Custom Systems, precision Ambient and Cryo-cooled Waterpumping radial-vane Throttle Valves. The HEDA RF diode large area dielectric sputtering tools are a standard of Magnetic Storage and similar industries. HEDA models 2480 and 2460, also known as Comptech, have evolved from twenty-five years of continuous development. MeiVac’s 602 single wafer multi-chamber Cluster Tool is a natural partner for the batch loaded HEDA tool. It is specifically designed for thinner higher tolerance dielectric and metal layers.
MeiVac, Inc.
San Jose, CA
www.meivac.com
Contact: Harry Grover
Tel: 1-408-362-1000
E-mail: harrylg@meivac.com
MKS Instruments, Inc. - HPS Products ISO-KF Catalog
MKS Instruments, Inc. - HPS Products has published an expanded version of  the HPS® Series 31 Catalog of ISO-KF components. The 40 page catalog includes an introduction and installation notes, dimensions, specifi- cations, prices, a reference list and a size reference chart. The expanded HPS® Series 31 ISO-KF component line contains more than four hundred items ranging in size from 0.5 inch to 4.0 inches (10 mm to 100 mm). The ISO standard vacuum components provide a method to rapidly assemble, disassemble and modify vacuum systems. Components are made to international standards and include flanges, elbows, tees, flexible sections, feedthroughs, reducers and adapters. Fittings are available in brass, stainless steel and aluminum. The HPS® Series 31 component catalogis available to download from: www.mksinst.com
MKS Instruments, Inc. - HPS Products Series 88 CF Ultra High Vacuum Components Catalog
MKS Instruments, Inc. - HPS Products, has published a revised and expanded version of the HPS® Series 88 Catalog of CF ultra high vacuum components. The thirty-two page catalog includes an expanded product description, detailed installation notes, CAD drawings, product dimensions and specifications, as well as part numbers and prices. HPS® Series 88 components comprise a full line of metal sealed CF flanges and fittings that are designed for applications requiring a very clean environment, ultra high vacuum conditions, high temperature ranges, or where critical or dangerous materials must be contained or excluded. The HPS® Series 88 components can be used with pressures down to 10-13 Torr and temperatures ranging from -196° to 500°C. HPS® Series 88 CF components are available in sizes from 1 1 /3-inch to 10-inch (34mm to 254 mm). Choices of rotatable and nonrotatable flanges are available as well as a variety of bore sizes, gaskets and assembly hardware. The HPS® Series 88 CF component catalog is available at: www.mksinst.com
MKS Instruments, Inc. - HPS Products ISO-Universal Component Line, Drawings Available
The Vacuum Products Group of MKS Instruments has expanded its HPS™ Series 76 line of ISO-Universal vacuum components. Drawings of all components are available for downloading from the MKS website. The HPS™ Series 76 line of ISO-Universal vacuum components range in size from 2½ to 25 inches in diameter. The flanges are sealed with symmetrical centering ring, then held together with clamps or bolts. The selection of over 275 parts are manufactured to international standard for rapid assembly, disassembly, and interchange- ability. In addition to the flanges, crosses, elbows, tees, tubing and bellows are additional sizes and styles of reduc- ers and adapters as well as flange protectors. The full line of HPS™ Series 76 components is available in .DWG and .DXF format on the MKS website. The drawings can speed system design using HPS™ Series 31 components. www.mksinst.com
HPS Single Stage and Multiple Stage Vacuum Valves and Leak Check and Specialty Valves
The HPS line of single and two-stage valves includes standard , low profile, and metal-sealed styles in angle and inline configurations. In port sizes ranging from NW 16 to NW 160 for single stage, and NW 25 to NW 100 for multiple stage, these valves reduce particle contamination and damage due to sudden pressure changes. MKS has developed compact vacuum valves for gauge isolation and leak checking. The Cv• valve is ideal for isolating sensors or closing off leak check ports. The IDA• valve enables in-situ calibration of MKS Baratron® manometers on a vacuum system. MKS also offers specialty safety valves. The patented Vacuum Sentry® valve protects the system in the event of power failure to the pump. The AUTO-SOFT® valve protects the vacuum system from particle contamination and prevents product damage in the event of a sudden change in the system. www.mksinst.com
MKS Stainless Steel Fittings
MKS offers a wide variety of fittings and components such as tees, crosses, elbows, tubes, flanges, end caps, reducers, and seals in standard sizes and configurations. These fittings are offered in the Series 23 Buttweld, Series 31 ISO-KF, Series 76 ISO Universal, and the Series 88 CF components. For more information, call or visit www.mksinst.com.
MKS Series 900 Vacuum Transducers
The MKS Series 900 vacuum transducers are a complete suite of microprocessor-based, standalone gauges, offering a wide pressure measurement range from above atmosphere to ultra high vacuum. Designed for system integration, the transducers offer both analog and digital communication (RS485 and RS232). Digital transducers allow for all adjustments and monitoring to be delivered real-time, via a host computer. The transducers incorporate MEMS (Micro Electro-Mechanical Systems) based technologies, including MicroPirani™ and piezo sensors, combined with Mini Ion BA technology resulting in a broad product offering for a wide variety of customer applications.
MKS Instruments, Inc.
Wilmington, MA
www.mksinst.com
Contact: MKS HPS Applications Engineering
Tel: 1-800-227-8766 (USA) or 1-978-284-4000 worldwide
E-mail: mks@mksinst.com
Nor-Cal Products Full Line Catalog
Since 1962, Nor-Cal Products, Inc. has manufactured high and ultrahigh vacuum components for semiconductor, thin film, surface analysis, and research applications. Nor-Cal is ISO 9000-2001 registered. Our engineers can oversee chamber fabrication from sketches or specifications. An entire system can be supplied complete with sample transfer and manipulation devices, stand, pumps, gauges and deposition monitors. Our isolation valves are the standard for many semiconductor equip- ment manufacturers. Product lines include the JV Series Valves, the Genesis™ modular valve system, the Intellisys™ adaptive pressure control system, multistage traps, ball valves and oil mist eliminators. Nor-Cal’s experience allows us to provide comprehensive solutions to extend downstream preventative maintenance intervals with heater jackets and process specific foreline traps.
Nor-Cal Products, Inc.
Yreka, CA
www.n-c.com
Contact: Jacquie Daniel
Tel: 1-530-841-9153 direct
E-mail: jacquiedaniel@n-c.com
Pfeiffer Vacuum Solutions for Coating Applications
Pfeiffer Vacuum offers a comprehensive product portfolio of components that generate, control and measure vacuum. We supply individual components as well as pumping stations that are custom-tailored to produce the optimum vacuum solution for reflection and wear protection, ophthalmics, storage media, flat panel displays, photovoltaic and glass coatings. Pfeiffer Vacuum rotary vane, roots and turbopumps offer minimal operating costs through better performance, longer service operation and simple and reduced maintenance. The roots and rotary vane pumps are available in low maintenance, magnetically couple versions, while the turbopumps feature proven bearing design with the longest Mean Time to Failure. For more information, email: www.pfeiffer-vacuum.com
Pfeiffer Vacuum, The Right Vacuum Solution for Every Application
The Pfeiffer Vacuum mini-catalog covers the range of pumps, instruments, hardware and services that PfeifferVacuum offers as solutions for vacuum applications. Included are the UnoLine™ and DuoLine™ rotary vane pumps; OktaLine™ roots pumps and CombiLine™ roots pumping stations; dry pumps including XtraDry™ , diaphragm and Revo-Dry™ ; OnTool™ , the HV pump that pumps against atmosphere; turbopumps and turbo pumping stations; components, feedthroughs and valves; Digi- Line™ , ActiveLine and Modul-Line vacuum measurement and control units; SmartTest leak detectors; PrismaPlus™ , OmniStar™ and ThermoStar™ gas analyzers; helium leak detection systems; as well as service and training. Each product is shown with applications, product advantages and important technical data. www.pfeiffer-vacuum.com
Pfeiffer Vacuum’s Vacuum Technology Components Catalog
The Pfeiffer Vacuum Components catalog covers the complete range of vacuum technology, including equipment  for producing, controlling and measuring vacuum, as well as accessories and components. It provides solutions for semiconductor, analytical, R&D and industrial vacuum applications. For each vacuum pump, gauge or instrument, the catalog contains information on the field of application, features, technical data and part numbers. The products covered in the catalog include turbomolecular, rotary vane, Roots and dry pumps, vacuum gauges and controllers, helium leak detectors, flanges, feedthroughs and valves. New to the catalog are XtraDry™ positive displacement dry pumps and HiMag™ maglev turbo pumps with integrated controller; the first magnetically coupled Roots pump; ActiveLine total pressure gauges, as well as new models of turbo pumps, rotary vane pumps and valves.Available online at www.pfeiffer-vacuum.com
Pfeiffer Vacuum Mass Spectrometer Catalog
The Pfeiffer Vacuum Mass Spectrometer catalog  contains the complete MS (mass spectrometer) product offering from low-cost Prisma™ RGA (Residual GasAnalyzer) to the new HiQuad™ analytical MS, as well as component parts for those building their own MS system. In addition, PfeifferVacuum offers an extensive line of mass spectrometers for specific applications including OmniStar™ for general gas analysis, ThermoStar™ for connection to a thermobalance, sputter process monitors, end point detectors and ion beam analysis systems. The mass spectrometry catalog covers fundamentals including how MS systems work, mass filter theory and ion source design. The catalog also describes measurements of externally generated ions, such as plasma diagnostics and SIMS (Secondary Ion Mass Spectrometer) applications. Various pumping options are depicted along with different inlet arrangements covering a large range of mass spectrometry applications. Detailed specifications and application examples are included. www.pfeiffer-vacuum.com
Pfeiffer Dry Turbo Pumping Station for $4950
Pfeiffer Vacuum, has introduced  the $4950 E-Station, a complete dry vacuum pump station. The plug-and-play vacuum station includes a turbomolecular and dry diaphragm pump and is available with 63 CF or 63 ISO flange sizes. The E-Station is ideal for R&D and vacuum applications that require hydrocarbon-free vacuum. Pfeiffer Vacuum’s bench-top E-Station has a high pumping speed of 60 l/s and an ultimate pressure of < 10-8 mbar. This dry vacuum unit is easy to service with a DCU that allows control and diagnostics of the pumping station. For more information, e-mail: www.pfeiffer-vacuum.com
Pfeiffer Vacuum ActiveLine™ Vacuum Gauges
Pfeiffer Vacuum offers an extensive line of ActiveLine™ analog vacuum gauges to meet the most demanding pressure measurement and process control requirements.ActiveLine™ gauges feature an easy-to-use interface and integrated electronics that permits operation with or without a controller. For additional control flexibility, PfeifferVacuum also offers a line of controllers, providing an analog output voltage representing pressure, control relays, simple calibration, and a digital readout of the vacuum level. By combining rough and high vacuum gauge technologies into single, compact packages, Pfeiffer Vacuum offers the unique ability to easily measure a wide range of pressures from atmosphere to 1.0E-9 Torr with a single gauge head. Active-Line is available in Piezo, Capacitance Diaphragm, Pirani, Cold Cathode, Process Ion, Full Range and Full Range BA gauges. For more information, e-mail: www.pfeiffer-vacuum.com
Pfeiffer SmartTest Helium Leak Detector
The Pfeiffer Vacuum  SmartTest• portable helium leak detector is simple to operate, rugged, and offers the lowest cost of ownership in the industry. SmartTest• utilizes a user selected backing pump to match any application and comes with vacuum and sniffer standard operating modes. It offers an industry best 3-year Ion Source and Filament warranty. SmartTest• provides the smallest detectable leak rate for helium: 5-10-12 mbar l/s and the highest possible inlet pressure of 25 mbar. Combined, these enable a user to begin testing sooner after startup and enables the user to find the smallest leaks. It is designed with an integrated test leak for self-calibration, a convenient work surface and an optional industrial proof hand-held remote control. For more information, e-mail: www.pfeiffer-vacuum.com
Pfeiffer Compact Turbo Pump
The rugged and reliable line of Pfeiffer CompactTurbo pumps deliver pumping speeds from 33 to 1,900 l/s for N2 and are available for mounting in any orientation. Ideal for research and coating applications these Pfeiffer Vacuum pumps feature proven oil lubricated pump bearings for longer life. The compact turbo pumps, with integrated controller, provide built-in intelligence permitting users to customize their vacuum processes with “plug and play” capability, easily adding pump peripherals that meet specific vacuum applications. For information, email: www.pfeiffer-vacuum.com
Pfeiffer Vacuum Solutions for Industrial Applications Brochure
Pfeiffer Vacuum offers a comprehensive product portfolio of components that generate, control and measure vacuum. Cost-effective and reliable, these pumping packages are tailored to meet the needs of industrial applications such as: metallurgy, leak detection, electron beam welding, freeze drying, vacuum drying and general vacuum applications. Pfeiffer Vacuum rotary vane, roots and turbopumps offer minimal operating costs through better performance, longer service operation and simple and reduced maintenance. The Roots and rotary vane pumps are available in low maintenance, magnetically couple versions. For more information, e-mail: www.pfeiffer-vacuum.com
Pfeiffer Vacuum Magnetic Rotary Vane Pumps
The Pfeiffer Vacuum M Series is the world’s only magnetic rotary vane pump that features a magnetic coupling, eliminating the radial shaft seal. This results in virtually no maintenance or service requirements. The environmentally responsible design also eliminates oil leaks and messy oil pans, as well as liability and pollution concerns. The single-stage UNO 30M rotary vane pump delivers a pumping speed of 30 m3/hr and comes standard with a single-phase motor for easy electrical connection. For more information, e-mail: www.pfeiffer-vacuum.com
| | |
